8/11/2011	12:00:10 AM	H2 valve closed
8/11/2011	12:00:10 AM	BCl3 valve closed
8/11/2011	12:00:10 AM	PH3 valve closed
8/11/2011	12:00:10 AM	SiCl4 pre valve closed
8/11/2011	12:00:10 AM	SiCl4 post valve closed
8/11/2011	12:00:10 AM	Bypass valve closed
8/11/2011	12:00:10 AM	Bubbler valve closed
8/11/2011	12:00:10 AM	Helium valve opened
8/11/2011	12:00:10 AM	Main Vac valve opened
8/11/2011	12:00:10 AM	Helium MFC set to  20.000000
8/11/2011	12:00:10 AM	H2 MFC set to  0.000000
8/11/2011	12:00:10 AM	BCl3 MFC set to  0.000000
8/11/2011	12:00:10 AM	PHl3 MFC set to  0.000000
8/11/2011	12:00:10 AM	SiCl4 MFC set to  0.000000
8/11/2011	12:00:10 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:00:10 AM	Tube furnace set to 0
8/11/2011	12:00:40 AM	Helium valve closed
8/11/2011	12:00:40 AM	H2 valve closed
8/11/2011	12:00:40 AM	BCl3 valve closed
8/11/2011	12:00:40 AM	PH3 valve closed
8/11/2011	12:00:40 AM	SiCl4 pre valve closed
8/11/2011	12:00:40 AM	SiCl4 post valve closed
8/11/2011	12:00:40 AM	Bypass valve closed
8/11/2011	12:00:40 AM	Bubbler valve closed
8/11/2011	12:00:40 AM	Main Vac valve opened
8/11/2011	12:00:40 AM	Helium MFC set to  0.000000
8/11/2011	12:00:40 AM	H2 MFC set to  0.000000
8/11/2011	12:00:40 AM	BCl3 MFC set to  0.000000
8/11/2011	12:00:40 AM	PHl3 MFC set to  0.000000
8/11/2011	12:00:40 AM	SiCl4 MFC set to  0.000000
8/11/2011	12:00:40 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:00:40 AM	Tube furnace set to 0
8/11/2011	12:01:10 AM	H2 valve closed
8/11/2011	12:01:10 AM	BCl3 valve closed
8/11/2011	12:01:10 AM	PH3 valve closed
8/11/2011	12:01:10 AM	SiCl4 pre valve closed
8/11/2011	12:01:10 AM	SiCl4 post valve closed
8/11/2011	12:01:10 AM	Bypass valve closed
8/11/2011	12:01:10 AM	Bubbler valve closed
8/11/2011	12:01:10 AM	Helium valve opened
8/11/2011	12:01:10 AM	Main Vac valve opened
8/11/2011	12:01:10 AM	Helium MFC set to  20.000000
8/11/2011	12:01:10 AM	H2 MFC set to  0.000000
8/11/2011	12:01:10 AM	BCl3 MFC set to  0.000000
8/11/2011	12:01:10 AM	PHl3 MFC set to  0.000000
8/11/2011	12:01:10 AM	SiCl4 MFC set to  0.000000
8/11/2011	12:01:10 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:01:10 AM	Tube furnace set to 0
8/11/2011	12:01:40 AM	Helium valve closed
8/11/2011	12:01:40 AM	H2 valve closed
8/11/2011	12:01:40 AM	BCl3 valve closed
8/11/2011	12:01:40 AM	PH3 valve closed
8/11/2011	12:01:40 AM	SiCl4 pre valve closed
8/11/2011	12:01:40 AM	SiCl4 post valve closed
8/11/2011	12:01:40 AM	Bypass valve closed
8/11/2011	12:01:40 AM	Bubbler valve closed
8/11/2011	12:01:40 AM	Main Vac valve opened
8/11/2011	12:01:40 AM	Helium MFC set to  0.000000
8/11/2011	12:01:40 AM	H2 MFC set to  0.000000
8/11/2011	12:01:40 AM	BCl3 MFC set to  0.000000
8/11/2011	12:01:40 AM	PHl3 MFC set to  0.000000
8/11/2011	12:01:40 AM	SiCl4 MFC set to  0.000000
8/11/2011	12:01:40 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:01:40 AM	Tube furnace set to 0
8/11/2011	12:02:10 AM	H2 valve closed
8/11/2011	12:02:10 AM	BCl3 valve closed
8/11/2011	12:02:10 AM	PH3 valve closed
8/11/2011	12:02:10 AM	SiCl4 pre valve closed
8/11/2011	12:02:10 AM	SiCl4 post valve closed
8/11/2011	12:02:10 AM	Bypass valve closed
8/11/2011	12:02:10 AM	Bubbler valve closed
8/11/2011	12:02:10 AM	Helium valve opened
8/11/2011	12:02:10 AM	Main Vac valve opened
8/11/2011	12:02:10 AM	Helium MFC set to  20.000000
8/11/2011	12:02:10 AM	H2 MFC set to  0.000000
8/11/2011	12:02:10 AM	BCl3 MFC set to  0.000000
8/11/2011	12:02:10 AM	PHl3 MFC set to  0.000000
8/11/2011	12:02:10 AM	SiCl4 MFC set to  0.000000
8/11/2011	12:02:10 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:02:11 AM	Tube furnace set to 0
8/11/2011	12:02:41 AM	Helium valve closed
8/11/2011	12:02:41 AM	H2 valve closed
8/11/2011	12:02:41 AM	BCl3 valve closed
8/11/2011	12:02:41 AM	PH3 valve closed
8/11/2011	12:02:41 AM	SiCl4 pre valve closed
8/11/2011	12:02:41 AM	SiCl4 post valve closed
8/11/2011	12:02:41 AM	Bypass valve closed
8/11/2011	12:02:41 AM	Bubbler valve closed
8/11/2011	12:02:41 AM	Main Vac valve opened
8/11/2011	12:02:41 AM	Helium MFC set to  0.000000
8/11/2011	12:02:41 AM	H2 MFC set to  0.000000
8/11/2011	12:02:41 AM	BCl3 MFC set to  0.000000
8/11/2011	12:02:41 AM	PHl3 MFC set to  0.000000
8/11/2011	12:02:41 AM	SiCl4 MFC set to  0.000000
8/11/2011	12:02:41 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:02:41 AM	Tube furnace set to 0
8/11/2011	12:03:11 AM	H2 valve closed
8/11/2011	12:03:11 AM	BCl3 valve closed
8/11/2011	12:03:11 AM	PH3 valve closed
8/11/2011	12:03:11 AM	SiCl4 pre valve closed
8/11/2011	12:03:11 AM	SiCl4 post valve closed
8/11/2011	12:03:11 AM	Bypass valve closed
8/11/2011	12:03:11 AM	Bubbler valve closed
8/11/2011	12:03:11 AM	Helium valve opened
8/11/2011	12:03:11 AM	Main Vac valve opened
8/11/2011	12:03:11 AM	Helium MFC set to  20.000000
8/11/2011	12:03:11 AM	H2 MFC set to  0.000000
8/11/2011	12:03:11 AM	BCl3 MFC set to  0.000000
8/11/2011	12:03:11 AM	PHl3 MFC set to  0.000000
8/11/2011	12:03:11 AM	SiCl4 MFC set to  0.000000
8/11/2011	12:03:11 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:03:11 AM	Tube furnace set to 0
8/11/2011	12:03:41 AM	Helium valve closed
8/11/2011	12:03:41 AM	H2 valve closed
8/11/2011	12:03:41 AM	BCl3 valve closed
8/11/2011	12:03:41 AM	PH3 valve closed
8/11/2011	12:03:41 AM	SiCl4 pre valve closed
8/11/2011	12:03:41 AM	SiCl4 post valve closed
8/11/2011	12:03:41 AM	Bypass valve closed
8/11/2011	12:03:41 AM	Bubbler valve closed
8/11/2011	12:03:41 AM	Main Vac valve opened
8/11/2011	12:03:41 AM	Helium MFC set to  0.000000
8/11/2011	12:03:41 AM	H2 MFC set to  0.000000
8/11/2011	12:03:41 AM	BCl3 MFC set to  0.000000
8/11/2011	12:03:41 AM	PHl3 MFC set to  0.000000
8/11/2011	12:03:41 AM	SiCl4 MFC set to  0.000000
8/11/2011	12:03:41 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:03:41 AM	Tube furnace set to 0
8/11/2011	12:04:11 AM	H2 valve closed
8/11/2011	12:04:11 AM	BCl3 valve closed
8/11/2011	12:04:11 AM	PH3 valve closed
8/11/2011	12:04:11 AM	SiCl4 pre valve closed
8/11/2011	12:04:11 AM	SiCl4 post valve closed
8/11/2011	12:04:11 AM	Bypass valve closed
8/11/2011	12:04:11 AM	Bubbler valve closed
8/11/2011	12:04:11 AM	Helium valve opened
8/11/2011	12:04:11 AM	Main Vac valve opened
8/11/2011	12:04:11 AM	Helium MFC set to  20.000000
8/11/2011	12:04:11 AM	H2 MFC set to  0.000000
8/11/2011	12:04:11 AM	BCl3 MFC set to  0.000000
8/11/2011	12:04:11 AM	PHl3 MFC set to  0.000000
8/11/2011	12:04:11 AM	SiCl4 MFC set to  0.000000
8/11/2011	12:04:11 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:04:11 AM	Tube furnace set to 0
8/11/2011	12:04:41 AM	Helium valve closed
8/11/2011	12:04:41 AM	H2 valve closed
8/11/2011	12:04:41 AM	BCl3 valve closed
8/11/2011	12:04:41 AM	PH3 valve closed
8/11/2011	12:04:41 AM	SiCl4 pre valve closed
8/11/2011	12:04:41 AM	SiCl4 post valve closed
8/11/2011	12:04:41 AM	Bypass valve closed
8/11/2011	12:04:41 AM	Bubbler valve closed
8/11/2011	12:04:41 AM	Main Vac valve opened
8/11/2011	12:04:41 AM	Helium MFC set to  0.000000
8/11/2011	12:04:41 AM	H2 MFC set to  0.000000
8/11/2011	12:04:41 AM	BCl3 MFC set to  0.000000
8/11/2011	12:04:41 AM	PHl3 MFC set to  0.000000
8/11/2011	12:04:41 AM	SiCl4 MFC set to  0.000000
8/11/2011	12:04:41 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:04:42 AM	Tube furnace set to 0
8/11/2011	12:04:43 AM	Run finished at 12:04 AM
8/11/2011	12:42:30 AM	Main Vac valve closed
8/11/2011	12:42:44 AM	Main Vac valve opened
8/11/2011	12:44:48 AM	Recipe started at 12:44 AM
8/11/2011	12:44:48 AM	Helium valve closed
8/11/2011	12:44:48 AM	H2 valve closed
8/11/2011	12:44:48 AM	BCl3 valve closed
8/11/2011	12:44:48 AM	PH3 valve closed
8/11/2011	12:44:48 AM	SiCl4 pre valve closed
8/11/2011	12:44:48 AM	SiCl4 post valve closed
8/11/2011	12:44:48 AM	Main Vac valve closed
8/11/2011	12:44:48 AM	Bypass valve closed
8/11/2011	12:44:48 AM	Bubbler valve closed
8/11/2011	12:44:48 AM	Helium MFC set to  0.000000
8/11/2011	12:44:48 AM	H2 MFC set to  0.000000
8/11/2011	12:44:48 AM	BCl3 MFC set to  0.000000
8/11/2011	12:44:48 AM	PHl3 MFC set to  0.000000
8/11/2011	12:44:48 AM	SiCl4 MFC set to  0.000000
8/11/2011	12:44:48 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:44:49 AM	Tube furnace set to 0
8/11/2011	12:44:52 AM	Helium valve closed
8/11/2011	12:44:52 AM	BCl3 valve closed
8/11/2011	12:44:52 AM	PH3 valve closed
8/11/2011	12:44:52 AM	SiCl4 pre valve closed
8/11/2011	12:44:52 AM	SiCl4 post valve closed
8/11/2011	12:44:52 AM	Main Vac valve closed
8/11/2011	12:44:52 AM	Bypass valve closed
8/11/2011	12:44:52 AM	Bubbler valve closed
8/11/2011	12:44:52 AM	H2 valve opened
8/11/2011	12:44:52 AM	Helium MFC set to  0.000000
8/11/2011	12:44:52 AM	H2 MFC set to  500.000000
8/11/2011	12:44:52 AM	BCl3 MFC set to  0.000000
8/11/2011	12:44:52 AM	PHl3 MFC set to  0.000000
8/11/2011	12:44:52 AM	SiCl4 MFC set to  0.000000
8/11/2011	12:44:52 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:44:52 AM	Tube furnace set to 0
8/11/2011	12:45:58 AM	Helium valve closed
8/11/2011	12:45:58 AM	BCl3 valve closed
8/11/2011	12:45:58 AM	PH3 valve closed
8/11/2011	12:45:58 AM	SiCl4 pre valve closed
8/11/2011	12:45:58 AM	SiCl4 post valve closed
8/11/2011	12:45:58 AM	Main Vac valve closed
8/11/2011	12:45:58 AM	Bypass valve closed
8/11/2011	12:45:58 AM	H2 valve opened
8/11/2011	12:45:58 AM	Bubbler valve opened
8/11/2011	12:45:58 AM	Helium MFC set to  0.000000
8/11/2011	12:45:58 AM	H2 MFC set to  500.000000
8/11/2011	12:45:58 AM	BCl3 MFC set to  0.000000
8/11/2011	12:45:58 AM	PHl3 MFC set to  0.000000
8/11/2011	12:45:58 AM	SiCl4 MFC set to  0.000000
8/11/2011	12:45:58 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:45:58 AM	Tube furnace set to 0
8/11/2011	12:45:59 AM	Helium valve closed
8/11/2011	12:45:59 AM	BCl3 valve closed
8/11/2011	12:45:59 AM	PH3 valve closed
8/11/2011	12:45:59 AM	SiCl4 pre valve closed
8/11/2011	12:45:59 AM	SiCl4 post valve closed
8/11/2011	12:45:59 AM	Main Vac valve closed
8/11/2011	12:45:59 AM	Bypass valve closed
8/11/2011	12:45:59 AM	H2 valve opened
8/11/2011	12:45:59 AM	Bubbler valve opened
8/11/2011	12:45:59 AM	Helium MFC set to  0.000000
8/11/2011	12:45:59 AM	H2 MFC set to  500.000000
8/11/2011	12:45:59 AM	BCl3 MFC set to  0.000000
8/11/2011	12:45:59 AM	PHl3 MFC set to  0.000000
8/11/2011	12:45:59 AM	SiCl4 MFC set to  0.000000
8/11/2011	12:45:59 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:45:59 AM	Tube furnace set to 1000
8/11/2011	1:05:59 AM	Helium valve closed
8/11/2011	1:05:59 AM	PH3 valve closed
8/11/2011	1:05:59 AM	Main Vac valve closed
8/11/2011	1:05:59 AM	Bypass valve closed
8/11/2011	1:05:59 AM	H2 valve opened
8/11/2011	1:05:59 AM	BCl3 valve opened
8/11/2011	1:05:59 AM	SiCl4 pre valve opened
8/11/2011	1:05:59 AM	SiCl4 post valve opened
8/11/2011	1:05:59 AM	Bubbler valve opened
8/11/2011	1:05:59 AM	Helium MFC set to  0.000000
8/11/2011	1:05:59 AM	H2 MFC set to  500.000000
8/11/2011	1:05:59 AM	BCl3 MFC set to  2.500000
8/11/2011	1:05:59 AM	PHl3 MFC set to  0.000000
8/11/2011	1:05:59 AM	SiCl4 MFC set to  50.000000
8/11/2011	1:05:59 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	1:05:59 AM	Tube furnace set to 1000
8/11/2011	1:20:29 AM	Helium valve closed
8/11/2011	1:20:29 AM	BCl3 valve closed
8/11/2011	1:20:29 AM	PH3 valve closed
8/11/2011	1:20:29 AM	SiCl4 pre valve closed
8/11/2011	1:20:29 AM	SiCl4 post valve closed
8/11/2011	1:20:29 AM	Main Vac valve closed
8/11/2011	1:20:29 AM	Bypass valve closed
8/11/2011	1:20:29 AM	H2 valve opened
8/11/2011	1:20:29 AM	Bubbler valve opened
8/11/2011	1:20:29 AM	Helium MFC set to  0.000000
8/11/2011	1:20:29 AM	H2 MFC set to  500.000000
8/11/2011	1:20:29 AM	BCl3 MFC set to  0.000000
8/11/2011	1:20:29 AM	PHl3 MFC set to  0.000000
8/11/2011	1:20:29 AM	SiCl4 MFC set to  0.000000
8/11/2011	1:20:29 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	1:20:29 AM	Tube furnace set to 750
8/11/2011	1:25:29 AM	H2 valve closed
8/11/2011	1:25:29 AM	BCl3 valve closed
8/11/2011	1:25:29 AM	PH3 valve closed
8/11/2011	1:25:29 AM	SiCl4 pre valve closed
8/11/2011	1:25:29 AM	SiCl4 post valve closed
8/11/2011	1:25:29 AM	Main Vac valve closed
8/11/2011	1:25:29 AM	Bypass valve closed
8/11/2011	1:25:29 AM	Helium valve opened
8/11/2011	1:25:29 AM	Bubbler valve opened
8/11/2011	1:25:29 AM	Helium MFC set to  500.000000
8/11/2011	1:25:29 AM	H2 MFC set to  0.000000
8/11/2011	1:25:29 AM	BCl3 MFC set to  0.000000
8/11/2011	1:25:29 AM	PHl3 MFC set to  0.000000
8/11/2011	1:25:29 AM	SiCl4 MFC set to  0.000000
8/11/2011	1:25:29 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	1:25:29 AM	Tube furnace set to 0
8/11/2011	1:45:29 AM	Helium valve closed
8/11/2011	1:45:29 AM	H2 valve closed
8/11/2011	1:45:29 AM	BCl3 valve closed
8/11/2011	1:45:29 AM	PH3 valve closed
8/11/2011	1:45:29 AM	SiCl4 pre valve closed
8/11/2011	1:45:29 AM	SiCl4 post valve closed
8/11/2011	1:45:29 AM	Main Vac valve closed
8/11/2011	1:45:29 AM	Bypass valve closed
8/11/2011	1:45:29 AM	Bubbler valve closed
8/11/2011	1:45:29 AM	Helium MFC set to  0.000000
8/11/2011	1:45:29 AM	H2 MFC set to  0.000000
8/11/2011	1:45:29 AM	BCl3 MFC set to  0.000000
8/11/2011	1:45:29 AM	PHl3 MFC set to  0.000000
8/11/2011	1:45:29 AM	SiCl4 MFC set to  0.000000
8/11/2011	1:45:29 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	1:45:30 AM	Tube furnace set to 0
8/11/2011	1:45:31 AM	Run finished at 1:45 AM
8/11/2011	2:59:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	2:59:55 AM	Recipe started at 2:59 AM
8/11/2011	2:59:55 AM	Helium valve closed
8/11/2011	2:59:55 AM	H2 valve closed
8/11/2011	2:59:55 AM	BCl3 valve closed
8/11/2011	2:59:55 AM	PH3 valve closed
8/11/2011	2:59:55 AM	SiCl4 pre valve closed
8/11/2011	2:59:55 AM	SiCl4 post valve closed
8/11/2011	2:59:55 AM	Main Vac valve closed
8/11/2011	2:59:55 AM	Bypass valve closed
8/11/2011	2:59:55 AM	Bubbler valve closed
8/11/2011	2:59:55 AM	Helium MFC set to  0.000000
8/11/2011	2:59:55 AM	H2 MFC set to  0.000000
8/11/2011	2:59:55 AM	BCl3 MFC set to  0.000000
8/11/2011	2:59:55 AM	PHl3 MFC set to  0.000000
8/11/2011	2:59:55 AM	SiCl4 MFC set to  0.000000
8/11/2011	2:59:55 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:59:55 AM	Tube furnace set to 0
8/11/2011	2:59:58 AM	H2 valve closed
8/11/2011	2:59:58 AM	BCl3 valve closed
8/11/2011	2:59:58 AM	PH3 valve closed
8/11/2011	2:59:58 AM	SiCl4 pre valve closed
8/11/2011	2:59:58 AM	SiCl4 post valve closed
8/11/2011	2:59:58 AM	Main Vac valve closed
8/11/2011	2:59:58 AM	Bypass valve closed
8/11/2011	2:59:58 AM	Bubbler valve closed
8/11/2011	2:59:58 AM	Helium valve opened
8/11/2011	2:59:58 AM	Helium MFC set to  500.000000
8/11/2011	2:59:58 AM	H2 MFC set to  0.000000
8/11/2011	2:59:58 AM	BCl3 MFC set to  0.000000
8/11/2011	2:59:58 AM	PHl3 MFC set to  0.000000
8/11/2011	2:59:58 AM	SiCl4 MFC set to  0.000000
8/11/2011	2:59:58 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:59:58 AM	Tube furnace set to 0
8/11/2011	3:00:02 AM	Helium valve closed
8/11/2011	3:00:02 AM	H2 valve closed
8/11/2011	3:00:02 AM	BCl3 valve closed
8/11/2011	3:00:02 AM	PH3 valve closed
8/11/2011	3:00:02 AM	SiCl4 pre valve closed
8/11/2011	3:00:02 AM	SiCl4 post valve closed
8/11/2011	3:00:02 AM	Main Vac valve closed
8/11/2011	3:00:02 AM	Bypass valve closed
8/11/2011	3:00:02 AM	Bubbler valve closed
8/11/2011	3:00:02 AM	Helium MFC set to  0.000000
8/11/2011	3:00:02 AM	H2 MFC set to  0.000000
8/11/2011	3:00:02 AM	BCl3 MFC set to  0.000000
8/11/2011	3:00:02 AM	PHl3 MFC set to  0.000000
8/11/2011	3:00:02 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:00:02 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:00:02 AM	Tube furnace set to 0
8/11/2011	3:00:03 AM	Run finished at 3:00 AM
8/11/2011	3:00:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	3:07:18 AM	Recipe started at 3:07 AM
8/11/2011	3:07:18 AM	Helium valve closed
8/11/2011	3:07:18 AM	H2 valve closed
8/11/2011	3:07:18 AM	BCl3 valve closed
8/11/2011	3:07:18 AM	PH3 valve closed
8/11/2011	3:07:18 AM	SiCl4 pre valve closed
8/11/2011	3:07:18 AM	SiCl4 post valve closed
8/11/2011	3:07:18 AM	Main Vac valve closed
8/11/2011	3:07:18 AM	Bubbler valve closed
8/11/2011	3:07:18 AM	Bypass valve opened
8/11/2011	3:07:18 AM	Helium MFC set to  0.000000
8/11/2011	3:07:18 AM	H2 MFC set to  0.000000
8/11/2011	3:07:18 AM	BCl3 MFC set to  0.000000
8/11/2011	3:07:18 AM	PHl3 MFC set to  0.000000
8/11/2011	3:07:18 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:07:18 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:07:18 AM	Tube furnace set to 0
8/11/2011	3:08:23 AM	Helium valve closed
8/11/2011	3:08:23 AM	H2 valve closed
8/11/2011	3:08:23 AM	BCl3 valve closed
8/11/2011	3:08:23 AM	PH3 valve closed
8/11/2011	3:08:23 AM	SiCl4 pre valve closed
8/11/2011	3:08:23 AM	SiCl4 post valve closed
8/11/2011	3:08:23 AM	Main Vac valve closed
8/11/2011	3:08:23 AM	Bubbler valve closed
8/11/2011	3:08:23 AM	Bypass valve opened
8/11/2011	3:08:23 AM	Helium MFC set to  0.000000
8/11/2011	3:08:23 AM	H2 MFC set to  0.000000
8/11/2011	3:08:23 AM	BCl3 MFC set to  0.000000
8/11/2011	3:08:23 AM	PHl3 MFC set to  0.000000
8/11/2011	3:08:23 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:08:23 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:08:23 AM	Tube furnace set to 0
8/11/2011	3:08:54 AM	Helium valve closed
8/11/2011	3:08:54 AM	H2 valve closed
8/11/2011	3:08:54 AM	BCl3 valve closed
8/11/2011	3:08:54 AM	PH3 valve closed
8/11/2011	3:08:54 AM	SiCl4 pre valve closed
8/11/2011	3:08:54 AM	SiCl4 post valve closed
8/11/2011	3:08:54 AM	Bypass valve closed
8/11/2011	3:08:54 AM	Bubbler valve closed
8/11/2011	3:08:54 AM	Main Vac valve opened
8/11/2011	3:08:54 AM	Helium MFC set to  0.000000
8/11/2011	3:08:54 AM	H2 MFC set to  0.000000
8/11/2011	3:08:54 AM	BCl3 MFC set to  0.000000
8/11/2011	3:08:54 AM	PHl3 MFC set to  0.000000
8/11/2011	3:08:54 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:08:54 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:08:54 AM	Tube furnace set to 0
8/11/2011	3:38:54 AM	H2 valve closed
8/11/2011	3:38:54 AM	BCl3 valve closed
8/11/2011	3:38:54 AM	PH3 valve closed
8/11/2011	3:38:54 AM	SiCl4 pre valve closed
8/11/2011	3:38:54 AM	SiCl4 post valve closed
8/11/2011	3:38:54 AM	Bypass valve closed
8/11/2011	3:38:54 AM	Bubbler valve closed
8/11/2011	3:38:54 AM	Helium valve opened
8/11/2011	3:38:54 AM	Main Vac valve opened
8/11/2011	3:38:54 AM	Helium MFC set to  20.000000
8/11/2011	3:38:54 AM	H2 MFC set to  0.000000
8/11/2011	3:38:54 AM	BCl3 MFC set to  0.000000
8/11/2011	3:38:54 AM	PHl3 MFC set to  0.000000
8/11/2011	3:38:54 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:38:54 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:38:54 AM	Tube furnace set to 0
8/11/2011	3:39:24 AM	Helium valve closed
8/11/2011	3:39:24 AM	H2 valve closed
8/11/2011	3:39:24 AM	BCl3 valve closed
8/11/2011	3:39:24 AM	PH3 valve closed
8/11/2011	3:39:24 AM	SiCl4 pre valve closed
8/11/2011	3:39:24 AM	SiCl4 post valve closed
8/11/2011	3:39:24 AM	Bypass valve closed
8/11/2011	3:39:24 AM	Bubbler valve closed
8/11/2011	3:39:24 AM	Main Vac valve opened
8/11/2011	3:39:24 AM	Helium MFC set to  0.000000
8/11/2011	3:39:24 AM	H2 MFC set to  0.000000
8/11/2011	3:39:24 AM	BCl3 MFC set to  0.000000
8/11/2011	3:39:24 AM	PHl3 MFC set to  0.000000
8/11/2011	3:39:24 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:39:24 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:39:24 AM	Tube furnace set to 0
8/11/2011	3:39:54 AM	H2 valve closed
8/11/2011	3:39:54 AM	BCl3 valve closed
8/11/2011	3:39:54 AM	PH3 valve closed
8/11/2011	3:39:54 AM	SiCl4 pre valve closed
8/11/2011	3:39:54 AM	SiCl4 post valve closed
8/11/2011	3:39:54 AM	Bypass valve closed
8/11/2011	3:39:54 AM	Bubbler valve closed
8/11/2011	3:39:54 AM	Helium valve opened
8/11/2011	3:39:54 AM	Main Vac valve opened
8/11/2011	3:39:54 AM	Helium MFC set to  20.000000
8/11/2011	3:39:54 AM	H2 MFC set to  0.000000
8/11/2011	3:39:54 AM	BCl3 MFC set to  0.000000
8/11/2011	3:39:54 AM	PHl3 MFC set to  0.000000
8/11/2011	3:39:54 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:39:54 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:39:54 AM	Tube furnace set to 0
8/11/2011	3:40:24 AM	Helium valve closed
8/11/2011	3:40:24 AM	H2 valve closed
8/11/2011	3:40:24 AM	BCl3 valve closed
8/11/2011	3:40:24 AM	PH3 valve closed
8/11/2011	3:40:24 AM	SiCl4 pre valve closed
8/11/2011	3:40:24 AM	SiCl4 post valve closed
8/11/2011	3:40:24 AM	Bypass valve closed
8/11/2011	3:40:24 AM	Bubbler valve closed
8/11/2011	3:40:24 AM	Main Vac valve opened
8/11/2011	3:40:24 AM	Helium MFC set to  0.000000
8/11/2011	3:40:24 AM	H2 MFC set to  0.000000
8/11/2011	3:40:24 AM	BCl3 MFC set to  0.000000
8/11/2011	3:40:24 AM	PHl3 MFC set to  0.000000
8/11/2011	3:40:24 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:40:24 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:40:24 AM	Tube furnace set to 0
8/11/2011	3:40:54 AM	H2 valve closed
8/11/2011	3:40:54 AM	BCl3 valve closed
8/11/2011	3:40:54 AM	PH3 valve closed
8/11/2011	3:40:54 AM	SiCl4 pre valve closed
8/11/2011	3:40:54 AM	SiCl4 post valve closed
8/11/2011	3:40:54 AM	Bypass valve closed
8/11/2011	3:40:54 AM	Bubbler valve closed
8/11/2011	3:40:54 AM	Helium valve opened
8/11/2011	3:40:54 AM	Main Vac valve opened
8/11/2011	3:40:54 AM	Helium MFC set to  20.000000
8/11/2011	3:40:54 AM	H2 MFC set to  0.000000
8/11/2011	3:40:54 AM	BCl3 MFC set to  0.000000
8/11/2011	3:40:54 AM	PHl3 MFC set to  0.000000
8/11/2011	3:40:54 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:40:54 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:40:55 AM	Tube furnace set to 0
8/11/2011	3:41:25 AM	Helium valve closed
8/11/2011	3:41:25 AM	H2 valve closed
8/11/2011	3:41:25 AM	BCl3 valve closed
8/11/2011	3:41:25 AM	PH3 valve closed
8/11/2011	3:41:25 AM	SiCl4 pre valve closed
8/11/2011	3:41:25 AM	SiCl4 post valve closed
8/11/2011	3:41:25 AM	Bypass valve closed
8/11/2011	3:41:25 AM	Bubbler valve closed
8/11/2011	3:41:25 AM	Main Vac valve opened
8/11/2011	3:41:25 AM	Helium MFC set to  0.000000
8/11/2011	3:41:25 AM	H2 MFC set to  0.000000
8/11/2011	3:41:25 AM	BCl3 MFC set to  0.000000
8/11/2011	3:41:25 AM	PHl3 MFC set to  0.000000
8/11/2011	3:41:25 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:41:25 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:41:25 AM	Tube furnace set to 0
8/11/2011	3:41:55 AM	H2 valve closed
8/11/2011	3:41:55 AM	BCl3 valve closed
8/11/2011	3:41:55 AM	PH3 valve closed
8/11/2011	3:41:55 AM	SiCl4 pre valve closed
8/11/2011	3:41:55 AM	SiCl4 post valve closed
8/11/2011	3:41:55 AM	Bypass valve closed
8/11/2011	3:41:55 AM	Bubbler valve closed
8/11/2011	3:41:55 AM	Helium valve opened
8/11/2011	3:41:55 AM	Main Vac valve opened
8/11/2011	3:41:55 AM	Helium MFC set to  20.000000
8/11/2011	3:41:55 AM	H2 MFC set to  0.000000
8/11/2011	3:41:55 AM	BCl3 MFC set to  0.000000
8/11/2011	3:41:55 AM	PHl3 MFC set to  0.000000
8/11/2011	3:41:55 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:41:55 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:41:55 AM	Tube furnace set to 0
8/11/2011	3:42:25 AM	Helium valve closed
8/11/2011	3:42:25 AM	H2 valve closed
8/11/2011	3:42:25 AM	BCl3 valve closed
8/11/2011	3:42:25 AM	PH3 valve closed
8/11/2011	3:42:25 AM	SiCl4 pre valve closed
8/11/2011	3:42:25 AM	SiCl4 post valve closed
8/11/2011	3:42:25 AM	Bypass valve closed
8/11/2011	3:42:25 AM	Bubbler valve closed
8/11/2011	3:42:25 AM	Main Vac valve opened
8/11/2011	3:42:25 AM	Helium MFC set to  0.000000
8/11/2011	3:42:25 AM	H2 MFC set to  0.000000
8/11/2011	3:42:25 AM	BCl3 MFC set to  0.000000
8/11/2011	3:42:25 AM	PHl3 MFC set to  0.000000
8/11/2011	3:42:25 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:42:25 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:42:25 AM	Tube furnace set to 0
8/11/2011	3:42:55 AM	H2 valve closed
8/11/2011	3:42:55 AM	BCl3 valve closed
8/11/2011	3:42:55 AM	PH3 valve closed
8/11/2011	3:42:55 AM	SiCl4 pre valve closed
8/11/2011	3:42:55 AM	SiCl4 post valve closed
8/11/2011	3:42:55 AM	Bypass valve closed
8/11/2011	3:42:55 AM	Bubbler valve closed
8/11/2011	3:42:55 AM	Helium valve opened
8/11/2011	3:42:55 AM	Main Vac valve opened
8/11/2011	3:42:55 AM	Helium MFC set to  20.000000
8/11/2011	3:42:55 AM	H2 MFC set to  0.000000
8/11/2011	3:42:55 AM	BCl3 MFC set to  0.000000
8/11/2011	3:42:55 AM	PHl3 MFC set to  0.000000
8/11/2011	3:42:55 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:42:55 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:42:55 AM	Tube furnace set to 0
8/11/2011	3:43:26 AM	Helium valve closed
8/11/2011	3:43:26 AM	H2 valve closed
8/11/2011	3:43:26 AM	BCl3 valve closed
8/11/2011	3:43:26 AM	PH3 valve closed
8/11/2011	3:43:26 AM	SiCl4 pre valve closed
8/11/2011	3:43:26 AM	SiCl4 post valve closed
8/11/2011	3:43:26 AM	Bypass valve closed
8/11/2011	3:43:26 AM	Bubbler valve closed
8/11/2011	3:43:26 AM	Main Vac valve opened
8/11/2011	3:43:26 AM	Helium MFC set to  0.000000
8/11/2011	3:43:26 AM	H2 MFC set to  0.000000
8/11/2011	3:43:26 AM	BCl3 MFC set to  0.000000
8/11/2011	3:43:26 AM	PHl3 MFC set to  0.000000
8/11/2011	3:43:26 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:43:26 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:43:26 AM	Tube furnace set to 0
8/11/2011	3:43:56 AM	H2 valve closed
8/11/2011	3:43:56 AM	BCl3 valve closed
8/11/2011	3:43:56 AM	PH3 valve closed
8/11/2011	3:43:56 AM	SiCl4 pre valve closed
8/11/2011	3:43:56 AM	SiCl4 post valve closed
8/11/2011	3:43:56 AM	Bypass valve closed
8/11/2011	3:43:56 AM	Bubbler valve closed
8/11/2011	3:43:56 AM	Helium valve opened
8/11/2011	3:43:56 AM	Main Vac valve opened
8/11/2011	3:43:56 AM	Helium MFC set to  20.000000
8/11/2011	3:43:56 AM	H2 MFC set to  0.000000
8/11/2011	3:43:56 AM	BCl3 MFC set to  0.000000
8/11/2011	3:43:56 AM	PHl3 MFC set to  0.000000
8/11/2011	3:43:56 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:43:56 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:43:56 AM	Tube furnace set to 0
8/11/2011	3:44:26 AM	Helium valve closed
8/11/2011	3:44:26 AM	H2 valve closed
8/11/2011	3:44:26 AM	BCl3 valve closed
8/11/2011	3:44:26 AM	PH3 valve closed
8/11/2011	3:44:26 AM	SiCl4 pre valve closed
8/11/2011	3:44:26 AM	SiCl4 post valve closed
8/11/2011	3:44:26 AM	Bypass valve closed
8/11/2011	3:44:26 AM	Bubbler valve closed
8/11/2011	3:44:26 AM	Main Vac valve opened
8/11/2011	3:44:26 AM	Helium MFC set to  0.000000
8/11/2011	3:44:26 AM	H2 MFC set to  0.000000
8/11/2011	3:44:26 AM	BCl3 MFC set to  0.000000
8/11/2011	3:44:26 AM	PHl3 MFC set to  0.000000
8/11/2011	3:44:26 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:44:26 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:44:26 AM	Tube furnace set to 0
8/11/2011	3:44:56 AM	H2 valve closed
8/11/2011	3:44:56 AM	BCl3 valve closed
8/11/2011	3:44:56 AM	PH3 valve closed
8/11/2011	3:44:56 AM	SiCl4 pre valve closed
8/11/2011	3:44:56 AM	SiCl4 post valve closed
8/11/2011	3:44:56 AM	Bypass valve closed
8/11/2011	3:44:56 AM	Bubbler valve closed
8/11/2011	3:44:56 AM	Helium valve opened
8/11/2011	3:44:56 AM	Main Vac valve opened
8/11/2011	3:44:56 AM	Helium MFC set to  20.000000
8/11/2011	3:44:56 AM	H2 MFC set to  0.000000
8/11/2011	3:44:56 AM	BCl3 MFC set to  0.000000
8/11/2011	3:44:56 AM	PHl3 MFC set to  0.000000
8/11/2011	3:44:56 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:44:56 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:44:56 AM	Tube furnace set to 0
8/11/2011	3:45:26 AM	Helium valve closed
8/11/2011	3:45:26 AM	H2 valve closed
8/11/2011	3:45:26 AM	BCl3 valve closed
8/11/2011	3:45:26 AM	PH3 valve closed
8/11/2011	3:45:26 AM	SiCl4 pre valve closed
8/11/2011	3:45:26 AM	SiCl4 post valve closed
8/11/2011	3:45:26 AM	Bypass valve closed
8/11/2011	3:45:26 AM	Bubbler valve closed
8/11/2011	3:45:26 AM	Main Vac valve opened
8/11/2011	3:45:26 AM	Helium MFC set to  0.000000
8/11/2011	3:45:26 AM	H2 MFC set to  0.000000
8/11/2011	3:45:26 AM	BCl3 MFC set to  0.000000
8/11/2011	3:45:26 AM	PHl3 MFC set to  0.000000
8/11/2011	3:45:26 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:45:26 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:45:27 AM	Tube furnace set to 0
8/11/2011	3:45:57 AM	H2 valve closed
8/11/2011	3:45:57 AM	BCl3 valve closed
8/11/2011	3:45:57 AM	PH3 valve closed
8/11/2011	3:45:57 AM	SiCl4 pre valve closed
8/11/2011	3:45:57 AM	SiCl4 post valve closed
8/11/2011	3:45:57 AM	Bypass valve closed
8/11/2011	3:45:57 AM	Bubbler valve closed
8/11/2011	3:45:57 AM	Helium valve opened
8/11/2011	3:45:57 AM	Main Vac valve opened
8/11/2011	3:45:57 AM	Helium MFC set to  20.000000
8/11/2011	3:45:57 AM	H2 MFC set to  0.000000
8/11/2011	3:45:57 AM	BCl3 MFC set to  0.000000
8/11/2011	3:45:57 AM	PHl3 MFC set to  0.000000
8/11/2011	3:45:57 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:45:57 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:45:57 AM	Tube furnace set to 0
8/11/2011	3:46:27 AM	Helium valve closed
8/11/2011	3:46:27 AM	H2 valve closed
8/11/2011	3:46:27 AM	BCl3 valve closed
8/11/2011	3:46:27 AM	PH3 valve closed
8/11/2011	3:46:27 AM	SiCl4 pre valve closed
8/11/2011	3:46:27 AM	SiCl4 post valve closed
8/11/2011	3:46:27 AM	Bypass valve closed
8/11/2011	3:46:27 AM	Bubbler valve closed
8/11/2011	3:46:27 AM	Main Vac valve opened
8/11/2011	3:46:27 AM	Helium MFC set to  0.000000
8/11/2011	3:46:27 AM	H2 MFC set to  0.000000
8/11/2011	3:46:27 AM	BCl3 MFC set to  0.000000
8/11/2011	3:46:27 AM	PHl3 MFC set to  0.000000
8/11/2011	3:46:27 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:46:27 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:46:27 AM	Tube furnace set to 0
8/11/2011	3:46:57 AM	H2 valve closed
8/11/2011	3:46:57 AM	BCl3 valve closed
8/11/2011	3:46:57 AM	PH3 valve closed
8/11/2011	3:46:57 AM	SiCl4 pre valve closed
8/11/2011	3:46:57 AM	SiCl4 post valve closed
8/11/2011	3:46:57 AM	Bypass valve closed
8/11/2011	3:46:57 AM	Bubbler valve closed
8/11/2011	3:46:57 AM	Helium valve opened
8/11/2011	3:46:57 AM	Main Vac valve opened
8/11/2011	3:46:57 AM	Helium MFC set to  20.000000
8/11/2011	3:46:57 AM	H2 MFC set to  0.000000
8/11/2011	3:46:57 AM	BCl3 MFC set to  0.000000
8/11/2011	3:46:57 AM	PHl3 MFC set to  0.000000
8/11/2011	3:46:57 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:46:57 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:46:57 AM	Tube furnace set to 0
8/11/2011	3:47:27 AM	Helium valve closed
8/11/2011	3:47:27 AM	H2 valve closed
8/11/2011	3:47:27 AM	BCl3 valve closed
8/11/2011	3:47:27 AM	PH3 valve closed
8/11/2011	3:47:27 AM	SiCl4 pre valve closed
8/11/2011	3:47:27 AM	SiCl4 post valve closed
8/11/2011	3:47:27 AM	Bypass valve closed
8/11/2011	3:47:27 AM	Bubbler valve closed
8/11/2011	3:47:27 AM	Main Vac valve opened
8/11/2011	3:47:27 AM	Helium MFC set to  0.000000
8/11/2011	3:47:27 AM	H2 MFC set to  0.000000
8/11/2011	3:47:27 AM	BCl3 MFC set to  0.000000
8/11/2011	3:47:27 AM	PHl3 MFC set to  0.000000
8/11/2011	3:47:27 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:47:27 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:47:27 AM	Tube furnace set to 0
8/11/2011	3:47:57 AM	H2 valve closed
8/11/2011	3:47:57 AM	BCl3 valve closed
8/11/2011	3:47:57 AM	PH3 valve closed
8/11/2011	3:47:57 AM	SiCl4 pre valve closed
8/11/2011	3:47:57 AM	SiCl4 post valve closed
8/11/2011	3:47:57 AM	Bypass valve closed
8/11/2011	3:47:57 AM	Bubbler valve closed
8/11/2011	3:47:57 AM	Helium valve opened
8/11/2011	3:47:57 AM	Main Vac valve opened
8/11/2011	3:47:57 AM	Helium MFC set to  20.000000
8/11/2011	3:47:57 AM	H2 MFC set to  0.000000
8/11/2011	3:47:57 AM	BCl3 MFC set to  0.000000
8/11/2011	3:47:57 AM	PHl3 MFC set to  0.000000
8/11/2011	3:47:57 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:47:57 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:47:58 AM	Tube furnace set to 0
8/11/2011	3:48:28 AM	Helium valve closed
8/11/2011	3:48:28 AM	H2 valve closed
8/11/2011	3:48:28 AM	BCl3 valve closed
8/11/2011	3:48:28 AM	PH3 valve closed
8/11/2011	3:48:28 AM	SiCl4 pre valve closed
8/11/2011	3:48:28 AM	SiCl4 post valve closed
8/11/2011	3:48:28 AM	Bypass valve closed
8/11/2011	3:48:28 AM	Bubbler valve closed
8/11/2011	3:48:28 AM	Main Vac valve opened
8/11/2011	3:48:28 AM	Helium MFC set to  0.000000
8/11/2011	3:48:28 AM	H2 MFC set to  0.000000
8/11/2011	3:48:28 AM	BCl3 MFC set to  0.000000
8/11/2011	3:48:28 AM	PHl3 MFC set to  0.000000
8/11/2011	3:48:28 AM	SiCl4 MFC set to  0.000000
8/11/2011	3:48:28 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:48:28 AM	Tube furnace set to 0
8/11/2011	3:48:29 AM	Run finished at 3:48 AM
8/11/2011	4:10:23 AM	Main Vac valve closed
8/11/2011	4:10:38 AM	Main Vac valve opened
8/11/2011	4:11:43 AM	Recipe started at 4:11 AM
8/11/2011	4:11:43 AM	Helium valve closed
8/11/2011	4:11:43 AM	H2 valve closed
8/11/2011	4:11:43 AM	BCl3 valve closed
8/11/2011	4:11:43 AM	PH3 valve closed
8/11/2011	4:11:43 AM	SiCl4 pre valve closed
8/11/2011	4:11:43 AM	SiCl4 post valve closed
8/11/2011	4:11:43 AM	Main Vac valve closed
8/11/2011	4:11:43 AM	Bypass valve closed
8/11/2011	4:11:43 AM	Bubbler valve closed
8/11/2011	4:11:43 AM	Helium MFC set to  0.000000
8/11/2011	4:11:43 AM	H2 MFC set to  0.000000
8/11/2011	4:11:43 AM	BCl3 MFC set to  0.000000
8/11/2011	4:11:43 AM	PHl3 MFC set to  0.000000
8/11/2011	4:11:43 AM	SiCl4 MFC set to  0.000000
8/11/2011	4:11:43 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:11:43 AM	Tube furnace set to 0
8/11/2011	4:11:46 AM	Helium valve closed
8/11/2011	4:11:46 AM	BCl3 valve closed
8/11/2011	4:11:46 AM	PH3 valve closed
8/11/2011	4:11:46 AM	SiCl4 pre valve closed
8/11/2011	4:11:46 AM	SiCl4 post valve closed
8/11/2011	4:11:46 AM	Main Vac valve closed
8/11/2011	4:11:46 AM	Bypass valve closed
8/11/2011	4:11:46 AM	Bubbler valve closed
8/11/2011	4:11:46 AM	H2 valve opened
8/11/2011	4:11:46 AM	Helium MFC set to  0.000000
8/11/2011	4:11:46 AM	H2 MFC set to  500.000000
8/11/2011	4:11:46 AM	BCl3 MFC set to  0.000000
8/11/2011	4:11:46 AM	PHl3 MFC set to  0.000000
8/11/2011	4:11:46 AM	SiCl4 MFC set to  0.000000
8/11/2011	4:11:46 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:11:46 AM	Tube furnace set to 0
8/11/2011	4:12:52 AM	Helium valve closed
8/11/2011	4:12:52 AM	BCl3 valve closed
8/11/2011	4:12:52 AM	PH3 valve closed
8/11/2011	4:12:52 AM	SiCl4 pre valve closed
8/11/2011	4:12:52 AM	SiCl4 post valve closed
8/11/2011	4:12:52 AM	Main Vac valve closed
8/11/2011	4:12:52 AM	Bypass valve closed
8/11/2011	4:12:53 AM	H2 valve opened
8/11/2011	4:12:53 AM	Bubbler valve opened
8/11/2011	4:12:53 AM	Helium MFC set to  0.000000
8/11/2011	4:12:53 AM	H2 MFC set to  500.000000
8/11/2011	4:12:53 AM	BCl3 MFC set to  0.000000
8/11/2011	4:12:53 AM	PHl3 MFC set to  0.000000
8/11/2011	4:12:53 AM	SiCl4 MFC set to  0.000000
8/11/2011	4:12:53 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:12:53 AM	Tube furnace set to 0
8/11/2011	4:12:54 AM	Helium valve closed
8/11/2011	4:12:54 AM	BCl3 valve closed
8/11/2011	4:12:54 AM	PH3 valve closed
8/11/2011	4:12:54 AM	SiCl4 pre valve closed
8/11/2011	4:12:54 AM	SiCl4 post valve closed
8/11/2011	4:12:54 AM	Main Vac valve closed
8/11/2011	4:12:54 AM	Bypass valve closed
8/11/2011	4:12:54 AM	H2 valve opened
8/11/2011	4:12:54 AM	Bubbler valve opened
8/11/2011	4:12:54 AM	Helium MFC set to  0.000000
8/11/2011	4:12:54 AM	H2 MFC set to  500.000000
8/11/2011	4:12:54 AM	BCl3 MFC set to  0.000000
8/11/2011	4:12:54 AM	PHl3 MFC set to  0.000000
8/11/2011	4:12:54 AM	SiCl4 MFC set to  0.000000
8/11/2011	4:12:54 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:12:54 AM	Tube furnace set to 1000
8/11/2011	4:32:54 AM	Helium valve closed
8/11/2011	4:32:54 AM	PH3 valve closed
8/11/2011	4:32:54 AM	Main Vac valve closed
8/11/2011	4:32:54 AM	Bypass valve closed
8/11/2011	4:32:54 AM	H2 valve opened
8/11/2011	4:32:54 AM	BCl3 valve opened
8/11/2011	4:32:54 AM	SiCl4 pre valve opened
8/11/2011	4:32:54 AM	SiCl4 post valve opened
8/11/2011	4:32:54 AM	Bubbler valve opened
8/11/2011	4:32:54 AM	Helium MFC set to  0.000000
8/11/2011	4:32:54 AM	H2 MFC set to  500.000000
8/11/2011	4:32:54 AM	BCl3 MFC set to  2.500000
8/11/2011	4:32:54 AM	PHl3 MFC set to  0.000000
8/11/2011	4:32:54 AM	SiCl4 MFC set to  50.000000
8/11/2011	4:32:54 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:32:54 AM	Tube furnace set to 1000
8/11/2011	4:47:24 AM	Helium valve closed
8/11/2011	4:47:24 AM	BCl3 valve closed
8/11/2011	4:47:24 AM	PH3 valve closed
8/11/2011	4:47:24 AM	SiCl4 pre valve closed
8/11/2011	4:47:24 AM	SiCl4 post valve closed
8/11/2011	4:47:24 AM	Main Vac valve closed
8/11/2011	4:47:24 AM	Bypass valve closed
8/11/2011	4:47:24 AM	H2 valve opened
8/11/2011	4:47:24 AM	Bubbler valve opened
8/11/2011	4:47:24 AM	Helium MFC set to  0.000000
8/11/2011	4:47:24 AM	H2 MFC set to  500.000000
8/11/2011	4:47:24 AM	BCl3 MFC set to  0.000000
8/11/2011	4:47:24 AM	PHl3 MFC set to  0.000000
8/11/2011	4:47:24 AM	SiCl4 MFC set to  0.000000
8/11/2011	4:47:24 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:47:24 AM	Tube furnace set to 750
8/11/2011	4:52:24 AM	H2 valve closed
8/11/2011	4:52:24 AM	BCl3 valve closed
8/11/2011	4:52:24 AM	PH3 valve closed
8/11/2011	4:52:24 AM	SiCl4 pre valve closed
8/11/2011	4:52:24 AM	SiCl4 post valve closed
8/11/2011	4:52:24 AM	Main Vac valve closed
8/11/2011	4:52:24 AM	Bypass valve closed
8/11/2011	4:52:24 AM	Helium valve opened
8/11/2011	4:52:24 AM	Bubbler valve opened
8/11/2011	4:52:24 AM	Helium MFC set to  500.000000
8/11/2011	4:52:24 AM	H2 MFC set to  0.000000
8/11/2011	4:52:24 AM	BCl3 MFC set to  0.000000
8/11/2011	4:52:24 AM	PHl3 MFC set to  0.000000
8/11/2011	4:52:24 AM	SiCl4 MFC set to  0.000000
8/11/2011	4:52:24 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:52:24 AM	Tube furnace set to 0
8/11/2011	5:12:24 AM	Helium valve closed
8/11/2011	5:12:24 AM	H2 valve closed
8/11/2011	5:12:24 AM	BCl3 valve closed
8/11/2011	5:12:24 AM	PH3 valve closed
8/11/2011	5:12:24 AM	SiCl4 pre valve closed
8/11/2011	5:12:24 AM	SiCl4 post valve closed
8/11/2011	5:12:24 AM	Main Vac valve closed
8/11/2011	5:12:24 AM	Bypass valve closed
8/11/2011	5:12:24 AM	Bubbler valve closed
8/11/2011	5:12:24 AM	Helium MFC set to  0.000000
8/11/2011	5:12:24 AM	H2 MFC set to  0.000000
8/11/2011	5:12:24 AM	BCl3 MFC set to  0.000000
8/11/2011	5:12:24 AM	PHl3 MFC set to  0.000000
8/11/2011	5:12:24 AM	SiCl4 MFC set to  0.000000
8/11/2011	5:12:24 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:12:24 AM	Tube furnace set to 0
8/11/2011	5:12:25 AM	Run finished at 5:12 AM
8/11/2011	5:52:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	5:52:58 AM	Recipe started at 5:52 AM
8/11/2011	5:52:58 AM	Helium valve closed
8/11/2011	5:52:58 AM	H2 valve closed
8/11/2011	5:52:58 AM	BCl3 valve closed
8/11/2011	5:52:58 AM	PH3 valve closed
8/11/2011	5:52:58 AM	SiCl4 pre valve closed
8/11/2011	5:52:58 AM	SiCl4 post valve closed
8/11/2011	5:52:58 AM	Main Vac valve closed
8/11/2011	5:52:58 AM	Bypass valve closed
8/11/2011	5:52:58 AM	Bubbler valve closed
8/11/2011	5:52:58 AM	Helium MFC set to  0.000000
8/11/2011	5:52:58 AM	H2 MFC set to  0.000000
8/11/2011	5:52:58 AM	BCl3 MFC set to  0.000000
8/11/2011	5:52:58 AM	PHl3 MFC set to  0.000000
8/11/2011	5:52:58 AM	SiCl4 MFC set to  0.000000
8/11/2011	5:52:58 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:52:58 AM	Tube furnace set to 0
8/11/2011	5:53:01 AM	H2 valve closed
8/11/2011	5:53:01 AM	BCl3 valve closed
8/11/2011	5:53:01 AM	PH3 valve closed
8/11/2011	5:53:01 AM	SiCl4 pre valve closed
8/11/2011	5:53:01 AM	SiCl4 post valve closed
8/11/2011	5:53:01 AM	Main Vac valve closed
8/11/2011	5:53:01 AM	Bypass valve closed
8/11/2011	5:53:01 AM	Bubbler valve closed
8/11/2011	5:53:01 AM	Helium valve opened
8/11/2011	5:53:01 AM	Helium MFC set to  500.000000
8/11/2011	5:53:01 AM	H2 MFC set to  0.000000
8/11/2011	5:53:01 AM	BCl3 MFC set to  0.000000
8/11/2011	5:53:01 AM	PHl3 MFC set to  0.000000
8/11/2011	5:53:01 AM	SiCl4 MFC set to  0.000000
8/11/2011	5:53:01 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:53:01 AM	Tube furnace set to 0
8/11/2011	5:53:06 AM	Helium valve closed
8/11/2011	5:53:06 AM	H2 valve closed
8/11/2011	5:53:06 AM	BCl3 valve closed
8/11/2011	5:53:06 AM	PH3 valve closed
8/11/2011	5:53:06 AM	SiCl4 pre valve closed
8/11/2011	5:53:06 AM	SiCl4 post valve closed
8/11/2011	5:53:06 AM	Main Vac valve closed
8/11/2011	5:53:06 AM	Bypass valve closed
8/11/2011	5:53:06 AM	Bubbler valve closed
8/11/2011	5:53:06 AM	Helium MFC set to  0.000000
8/11/2011	5:53:06 AM	H2 MFC set to  0.000000
8/11/2011	5:53:06 AM	BCl3 MFC set to  0.000000
8/11/2011	5:53:06 AM	PHl3 MFC set to  0.000000
8/11/2011	5:53:06 AM	SiCl4 MFC set to  0.000000
8/11/2011	5:53:06 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:53:07 AM	Tube furnace set to 0
8/11/2011	5:53:08 AM	Run finished at 5:53 AM
8/11/2011	5:53:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	6:00:15 AM	Recipe started at 6:00 AM
8/11/2011	6:00:15 AM	Helium valve closed
8/11/2011	6:00:15 AM	H2 valve closed
8/11/2011	6:00:15 AM	BCl3 valve closed
8/11/2011	6:00:15 AM	PH3 valve closed
8/11/2011	6:00:15 AM	SiCl4 pre valve closed
8/11/2011	6:00:15 AM	SiCl4 post valve closed
8/11/2011	6:00:15 AM	Main Vac valve closed
8/11/2011	6:00:15 AM	Bubbler valve closed
8/11/2011	6:00:15 AM	Bypass valve opened
8/11/2011	6:00:15 AM	Helium MFC set to  0.000000
8/11/2011	6:00:15 AM	H2 MFC set to  0.000000
8/11/2011	6:00:15 AM	BCl3 MFC set to  0.000000
8/11/2011	6:00:15 AM	PHl3 MFC set to  0.000000
8/11/2011	6:00:15 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:00:15 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:00:15 AM	Tube furnace set to 0
8/11/2011	6:01:24 AM	Helium valve closed
8/11/2011	6:01:24 AM	H2 valve closed
8/11/2011	6:01:24 AM	BCl3 valve closed
8/11/2011	6:01:24 AM	PH3 valve closed
8/11/2011	6:01:24 AM	SiCl4 pre valve closed
8/11/2011	6:01:24 AM	SiCl4 post valve closed
8/11/2011	6:01:24 AM	Main Vac valve closed
8/11/2011	6:01:24 AM	Bubbler valve closed
8/11/2011	6:01:24 AM	Bypass valve opened
8/11/2011	6:01:24 AM	Helium MFC set to  0.000000
8/11/2011	6:01:24 AM	H2 MFC set to  0.000000
8/11/2011	6:01:24 AM	BCl3 MFC set to  0.000000
8/11/2011	6:01:24 AM	PHl3 MFC set to  0.000000
8/11/2011	6:01:24 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:01:24 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:01:24 AM	Tube furnace set to 0
8/11/2011	6:01:54 AM	Helium valve closed
8/11/2011	6:01:54 AM	H2 valve closed
8/11/2011	6:01:54 AM	BCl3 valve closed
8/11/2011	6:01:54 AM	PH3 valve closed
8/11/2011	6:01:54 AM	SiCl4 pre valve closed
8/11/2011	6:01:54 AM	SiCl4 post valve closed
8/11/2011	6:01:54 AM	Bypass valve closed
8/11/2011	6:01:54 AM	Bubbler valve closed
8/11/2011	6:01:54 AM	Main Vac valve opened
8/11/2011	6:01:54 AM	Helium MFC set to  0.000000
8/11/2011	6:01:54 AM	H2 MFC set to  0.000000
8/11/2011	6:01:54 AM	BCl3 MFC set to  0.000000
8/11/2011	6:01:54 AM	PHl3 MFC set to  0.000000
8/11/2011	6:01:54 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:01:54 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:01:54 AM	Tube furnace set to 0
8/11/2011	6:31:54 AM	H2 valve closed
8/11/2011	6:31:54 AM	BCl3 valve closed
8/11/2011	6:31:54 AM	PH3 valve closed
8/11/2011	6:31:54 AM	SiCl4 pre valve closed
8/11/2011	6:31:54 AM	SiCl4 post valve closed
8/11/2011	6:31:54 AM	Bypass valve closed
8/11/2011	6:31:54 AM	Bubbler valve closed
8/11/2011	6:31:54 AM	Helium valve opened
8/11/2011	6:31:54 AM	Main Vac valve opened
8/11/2011	6:31:54 AM	Helium MFC set to  20.000000
8/11/2011	6:31:54 AM	H2 MFC set to  0.000000
8/11/2011	6:31:54 AM	BCl3 MFC set to  0.000000
8/11/2011	6:31:54 AM	PHl3 MFC set to  0.000000
8/11/2011	6:31:54 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:31:54 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:31:54 AM	Tube furnace set to 0
8/11/2011	6:32:24 AM	Helium valve closed
8/11/2011	6:32:24 AM	H2 valve closed
8/11/2011	6:32:24 AM	BCl3 valve closed
8/11/2011	6:32:24 AM	PH3 valve closed
8/11/2011	6:32:24 AM	SiCl4 pre valve closed
8/11/2011	6:32:24 AM	SiCl4 post valve closed
8/11/2011	6:32:24 AM	Bypass valve closed
8/11/2011	6:32:24 AM	Bubbler valve closed
8/11/2011	6:32:24 AM	Main Vac valve opened
8/11/2011	6:32:24 AM	Helium MFC set to  0.000000
8/11/2011	6:32:24 AM	H2 MFC set to  0.000000
8/11/2011	6:32:24 AM	BCl3 MFC set to  0.000000
8/11/2011	6:32:24 AM	PHl3 MFC set to  0.000000
8/11/2011	6:32:24 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:32:24 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:32:24 AM	Tube furnace set to 0
8/11/2011	6:32:54 AM	H2 valve closed
8/11/2011	6:32:54 AM	BCl3 valve closed
8/11/2011	6:32:54 AM	PH3 valve closed
8/11/2011	6:32:54 AM	SiCl4 pre valve closed
8/11/2011	6:32:54 AM	SiCl4 post valve closed
8/11/2011	6:32:54 AM	Bypass valve closed
8/11/2011	6:32:54 AM	Bubbler valve closed
8/11/2011	6:32:54 AM	Helium valve opened
8/11/2011	6:32:54 AM	Main Vac valve opened
8/11/2011	6:32:54 AM	Helium MFC set to  20.000000
8/11/2011	6:32:54 AM	H2 MFC set to  0.000000
8/11/2011	6:32:54 AM	BCl3 MFC set to  0.000000
8/11/2011	6:32:54 AM	PHl3 MFC set to  0.000000
8/11/2011	6:32:54 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:32:54 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:32:55 AM	Tube furnace set to 0
8/11/2011	6:33:25 AM	Helium valve closed
8/11/2011	6:33:25 AM	H2 valve closed
8/11/2011	6:33:25 AM	BCl3 valve closed
8/11/2011	6:33:25 AM	PH3 valve closed
8/11/2011	6:33:25 AM	SiCl4 pre valve closed
8/11/2011	6:33:25 AM	SiCl4 post valve closed
8/11/2011	6:33:25 AM	Bypass valve closed
8/11/2011	6:33:25 AM	Bubbler valve closed
8/11/2011	6:33:25 AM	Main Vac valve opened
8/11/2011	6:33:25 AM	Helium MFC set to  0.000000
8/11/2011	6:33:25 AM	H2 MFC set to  0.000000
8/11/2011	6:33:25 AM	BCl3 MFC set to  0.000000
8/11/2011	6:33:25 AM	PHl3 MFC set to  0.000000
8/11/2011	6:33:25 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:33:25 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:33:25 AM	Tube furnace set to 0
8/11/2011	6:33:55 AM	H2 valve closed
8/11/2011	6:33:55 AM	BCl3 valve closed
8/11/2011	6:33:55 AM	PH3 valve closed
8/11/2011	6:33:55 AM	SiCl4 pre valve closed
8/11/2011	6:33:55 AM	SiCl4 post valve closed
8/11/2011	6:33:55 AM	Bypass valve closed
8/11/2011	6:33:55 AM	Bubbler valve closed
8/11/2011	6:33:55 AM	Helium valve opened
8/11/2011	6:33:55 AM	Main Vac valve opened
8/11/2011	6:33:55 AM	Helium MFC set to  20.000000
8/11/2011	6:33:55 AM	H2 MFC set to  0.000000
8/11/2011	6:33:55 AM	BCl3 MFC set to  0.000000
8/11/2011	6:33:55 AM	PHl3 MFC set to  0.000000
8/11/2011	6:33:55 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:33:55 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:33:55 AM	Tube furnace set to 0
8/11/2011	6:34:25 AM	Helium valve closed
8/11/2011	6:34:25 AM	H2 valve closed
8/11/2011	6:34:25 AM	BCl3 valve closed
8/11/2011	6:34:25 AM	PH3 valve closed
8/11/2011	6:34:25 AM	SiCl4 pre valve closed
8/11/2011	6:34:25 AM	SiCl4 post valve closed
8/11/2011	6:34:25 AM	Bypass valve closed
8/11/2011	6:34:25 AM	Bubbler valve closed
8/11/2011	6:34:25 AM	Main Vac valve opened
8/11/2011	6:34:25 AM	Helium MFC set to  0.000000
8/11/2011	6:34:25 AM	H2 MFC set to  0.000000
8/11/2011	6:34:25 AM	BCl3 MFC set to  0.000000
8/11/2011	6:34:25 AM	PHl3 MFC set to  0.000000
8/11/2011	6:34:25 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:34:25 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:34:25 AM	Tube furnace set to 0
8/11/2011	6:34:55 AM	H2 valve closed
8/11/2011	6:34:55 AM	BCl3 valve closed
8/11/2011	6:34:55 AM	PH3 valve closed
8/11/2011	6:34:55 AM	SiCl4 pre valve closed
8/11/2011	6:34:55 AM	SiCl4 post valve closed
8/11/2011	6:34:55 AM	Bypass valve closed
8/11/2011	6:34:55 AM	Bubbler valve closed
8/11/2011	6:34:55 AM	Helium valve opened
8/11/2011	6:34:55 AM	Main Vac valve opened
8/11/2011	6:34:55 AM	Helium MFC set to  20.000000
8/11/2011	6:34:55 AM	H2 MFC set to  0.000000
8/11/2011	6:34:55 AM	BCl3 MFC set to  0.000000
8/11/2011	6:34:55 AM	PHl3 MFC set to  0.000000
8/11/2011	6:34:55 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:34:55 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:34:55 AM	Tube furnace set to 0
8/11/2011	6:35:26 AM	Helium valve closed
8/11/2011	6:35:26 AM	H2 valve closed
8/11/2011	6:35:26 AM	BCl3 valve closed
8/11/2011	6:35:26 AM	PH3 valve closed
8/11/2011	6:35:26 AM	SiCl4 pre valve closed
8/11/2011	6:35:26 AM	SiCl4 post valve closed
8/11/2011	6:35:26 AM	Bypass valve closed
8/11/2011	6:35:26 AM	Bubbler valve closed
8/11/2011	6:35:26 AM	Main Vac valve opened
8/11/2011	6:35:26 AM	Helium MFC set to  0.000000
8/11/2011	6:35:26 AM	H2 MFC set to  0.000000
8/11/2011	6:35:26 AM	BCl3 MFC set to  0.000000
8/11/2011	6:35:26 AM	PHl3 MFC set to  0.000000
8/11/2011	6:35:26 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:35:26 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:35:26 AM	Tube furnace set to 0
8/11/2011	6:35:56 AM	H2 valve closed
8/11/2011	6:35:56 AM	BCl3 valve closed
8/11/2011	6:35:56 AM	PH3 valve closed
8/11/2011	6:35:56 AM	SiCl4 pre valve closed
8/11/2011	6:35:56 AM	SiCl4 post valve closed
8/11/2011	6:35:56 AM	Bypass valve closed
8/11/2011	6:35:56 AM	Bubbler valve closed
8/11/2011	6:35:56 AM	Helium valve opened
8/11/2011	6:35:56 AM	Main Vac valve opened
8/11/2011	6:35:56 AM	Helium MFC set to  20.000000
8/11/2011	6:35:56 AM	H2 MFC set to  0.000000
8/11/2011	6:35:56 AM	BCl3 MFC set to  0.000000
8/11/2011	6:35:56 AM	PHl3 MFC set to  0.000000
8/11/2011	6:35:56 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:35:56 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:35:56 AM	Tube furnace set to 0
8/11/2011	6:36:26 AM	Helium valve closed
8/11/2011	6:36:26 AM	H2 valve closed
8/11/2011	6:36:26 AM	BCl3 valve closed
8/11/2011	6:36:26 AM	PH3 valve closed
8/11/2011	6:36:26 AM	SiCl4 pre valve closed
8/11/2011	6:36:26 AM	SiCl4 post valve closed
8/11/2011	6:36:26 AM	Bypass valve closed
8/11/2011	6:36:26 AM	Bubbler valve closed
8/11/2011	6:36:26 AM	Main Vac valve opened
8/11/2011	6:36:26 AM	Helium MFC set to  0.000000
8/11/2011	6:36:26 AM	H2 MFC set to  0.000000
8/11/2011	6:36:26 AM	BCl3 MFC set to  0.000000
8/11/2011	6:36:26 AM	PHl3 MFC set to  0.000000
8/11/2011	6:36:26 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:36:26 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:36:26 AM	Tube furnace set to 0
8/11/2011	6:36:56 AM	H2 valve closed
8/11/2011	6:36:56 AM	BCl3 valve closed
8/11/2011	6:36:56 AM	PH3 valve closed
8/11/2011	6:36:56 AM	SiCl4 pre valve closed
8/11/2011	6:36:56 AM	SiCl4 post valve closed
8/11/2011	6:36:56 AM	Bypass valve closed
8/11/2011	6:36:56 AM	Bubbler valve closed
8/11/2011	6:36:56 AM	Helium valve opened
8/11/2011	6:36:56 AM	Main Vac valve opened
8/11/2011	6:36:56 AM	Helium MFC set to  20.000000
8/11/2011	6:36:56 AM	H2 MFC set to  0.000000
8/11/2011	6:36:56 AM	BCl3 MFC set to  0.000000
8/11/2011	6:36:56 AM	PHl3 MFC set to  0.000000
8/11/2011	6:36:56 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:36:56 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:36:56 AM	Tube furnace set to 0
8/11/2011	6:37:26 AM	Helium valve closed
8/11/2011	6:37:26 AM	H2 valve closed
8/11/2011	6:37:26 AM	BCl3 valve closed
8/11/2011	6:37:26 AM	PH3 valve closed
8/11/2011	6:37:26 AM	SiCl4 pre valve closed
8/11/2011	6:37:26 AM	SiCl4 post valve closed
8/11/2011	6:37:26 AM	Bypass valve closed
8/11/2011	6:37:26 AM	Bubbler valve closed
8/11/2011	6:37:26 AM	Main Vac valve opened
8/11/2011	6:37:26 AM	Helium MFC set to  0.000000
8/11/2011	6:37:26 AM	H2 MFC set to  0.000000
8/11/2011	6:37:26 AM	BCl3 MFC set to  0.000000
8/11/2011	6:37:26 AM	PHl3 MFC set to  0.000000
8/11/2011	6:37:26 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:37:26 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:37:27 AM	Tube furnace set to 0
8/11/2011	6:37:57 AM	H2 valve closed
8/11/2011	6:37:57 AM	BCl3 valve closed
8/11/2011	6:37:57 AM	PH3 valve closed
8/11/2011	6:37:57 AM	SiCl4 pre valve closed
8/11/2011	6:37:57 AM	SiCl4 post valve closed
8/11/2011	6:37:57 AM	Bypass valve closed
8/11/2011	6:37:57 AM	Bubbler valve closed
8/11/2011	6:37:57 AM	Helium valve opened
8/11/2011	6:37:57 AM	Main Vac valve opened
8/11/2011	6:37:57 AM	Helium MFC set to  20.000000
8/11/2011	6:37:57 AM	H2 MFC set to  0.000000
8/11/2011	6:37:57 AM	BCl3 MFC set to  0.000000
8/11/2011	6:37:57 AM	PHl3 MFC set to  0.000000
8/11/2011	6:37:57 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:37:57 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:37:57 AM	Tube furnace set to 0
8/11/2011	6:38:27 AM	Helium valve closed
8/11/2011	6:38:27 AM	H2 valve closed
8/11/2011	6:38:27 AM	BCl3 valve closed
8/11/2011	6:38:27 AM	PH3 valve closed
8/11/2011	6:38:27 AM	SiCl4 pre valve closed
8/11/2011	6:38:27 AM	SiCl4 post valve closed
8/11/2011	6:38:27 AM	Bypass valve closed
8/11/2011	6:38:27 AM	Bubbler valve closed
8/11/2011	6:38:27 AM	Main Vac valve opened
8/11/2011	6:38:27 AM	Helium MFC set to  0.000000
8/11/2011	6:38:27 AM	H2 MFC set to  0.000000
8/11/2011	6:38:27 AM	BCl3 MFC set to  0.000000
8/11/2011	6:38:27 AM	PHl3 MFC set to  0.000000
8/11/2011	6:38:27 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:38:27 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:38:27 AM	Tube furnace set to 0
8/11/2011	6:38:57 AM	H2 valve closed
8/11/2011	6:38:57 AM	BCl3 valve closed
8/11/2011	6:38:57 AM	PH3 valve closed
8/11/2011	6:38:57 AM	SiCl4 pre valve closed
8/11/2011	6:38:57 AM	SiCl4 post valve closed
8/11/2011	6:38:57 AM	Bypass valve closed
8/11/2011	6:38:57 AM	Bubbler valve closed
8/11/2011	6:38:57 AM	Helium valve opened
8/11/2011	6:38:57 AM	Main Vac valve opened
8/11/2011	6:38:57 AM	Helium MFC set to  20.000000
8/11/2011	6:38:57 AM	H2 MFC set to  0.000000
8/11/2011	6:38:57 AM	BCl3 MFC set to  0.000000
8/11/2011	6:38:57 AM	PHl3 MFC set to  0.000000
8/11/2011	6:38:57 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:38:57 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:38:57 AM	Tube furnace set to 0
8/11/2011	6:39:27 AM	Helium valve closed
8/11/2011	6:39:27 AM	H2 valve closed
8/11/2011	6:39:27 AM	BCl3 valve closed
8/11/2011	6:39:27 AM	PH3 valve closed
8/11/2011	6:39:27 AM	SiCl4 pre valve closed
8/11/2011	6:39:27 AM	SiCl4 post valve closed
8/11/2011	6:39:27 AM	Bypass valve closed
8/11/2011	6:39:27 AM	Bubbler valve closed
8/11/2011	6:39:27 AM	Main Vac valve opened
8/11/2011	6:39:27 AM	Helium MFC set to  0.000000
8/11/2011	6:39:27 AM	H2 MFC set to  0.000000
8/11/2011	6:39:27 AM	BCl3 MFC set to  0.000000
8/11/2011	6:39:27 AM	PHl3 MFC set to  0.000000
8/11/2011	6:39:27 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:39:27 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:39:27 AM	Tube furnace set to 0
8/11/2011	6:39:57 AM	H2 valve closed
8/11/2011	6:39:57 AM	BCl3 valve closed
8/11/2011	6:39:57 AM	PH3 valve closed
8/11/2011	6:39:57 AM	SiCl4 pre valve closed
8/11/2011	6:39:57 AM	SiCl4 post valve closed
8/11/2011	6:39:57 AM	Bypass valve closed
8/11/2011	6:39:57 AM	Bubbler valve closed
8/11/2011	6:39:57 AM	Helium valve opened
8/11/2011	6:39:57 AM	Main Vac valve opened
8/11/2011	6:39:57 AM	Helium MFC set to  20.000000
8/11/2011	6:39:57 AM	H2 MFC set to  0.000000
8/11/2011	6:39:57 AM	BCl3 MFC set to  0.000000
8/11/2011	6:39:57 AM	PHl3 MFC set to  0.000000
8/11/2011	6:39:57 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:39:57 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:39:58 AM	Tube furnace set to 0
8/11/2011	6:40:28 AM	Helium valve closed
8/11/2011	6:40:28 AM	H2 valve closed
8/11/2011	6:40:28 AM	BCl3 valve closed
8/11/2011	6:40:28 AM	PH3 valve closed
8/11/2011	6:40:28 AM	SiCl4 pre valve closed
8/11/2011	6:40:28 AM	SiCl4 post valve closed
8/11/2011	6:40:28 AM	Bypass valve closed
8/11/2011	6:40:28 AM	Bubbler valve closed
8/11/2011	6:40:28 AM	Main Vac valve opened
8/11/2011	6:40:28 AM	Helium MFC set to  0.000000
8/11/2011	6:40:28 AM	H2 MFC set to  0.000000
8/11/2011	6:40:28 AM	BCl3 MFC set to  0.000000
8/11/2011	6:40:28 AM	PHl3 MFC set to  0.000000
8/11/2011	6:40:28 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:40:28 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:40:28 AM	Tube furnace set to 0
8/11/2011	6:40:58 AM	H2 valve closed
8/11/2011	6:40:58 AM	BCl3 valve closed
8/11/2011	6:40:58 AM	PH3 valve closed
8/11/2011	6:40:58 AM	SiCl4 pre valve closed
8/11/2011	6:40:58 AM	SiCl4 post valve closed
8/11/2011	6:40:58 AM	Bypass valve closed
8/11/2011	6:40:58 AM	Bubbler valve closed
8/11/2011	6:40:58 AM	Helium valve opened
8/11/2011	6:40:58 AM	Main Vac valve opened
8/11/2011	6:40:58 AM	Helium MFC set to  20.000000
8/11/2011	6:40:58 AM	H2 MFC set to  0.000000
8/11/2011	6:40:58 AM	BCl3 MFC set to  0.000000
8/11/2011	6:40:58 AM	PHl3 MFC set to  0.000000
8/11/2011	6:40:58 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:40:58 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:40:58 AM	Tube furnace set to 0
8/11/2011	6:41:28 AM	Helium valve closed
8/11/2011	6:41:28 AM	H2 valve closed
8/11/2011	6:41:28 AM	BCl3 valve closed
8/11/2011	6:41:28 AM	PH3 valve closed
8/11/2011	6:41:28 AM	SiCl4 pre valve closed
8/11/2011	6:41:28 AM	SiCl4 post valve closed
8/11/2011	6:41:28 AM	Bypass valve closed
8/11/2011	6:41:28 AM	Bubbler valve closed
8/11/2011	6:41:28 AM	Main Vac valve opened
8/11/2011	6:41:28 AM	Helium MFC set to  0.000000
8/11/2011	6:41:28 AM	H2 MFC set to  0.000000
8/11/2011	6:41:28 AM	BCl3 MFC set to  0.000000
8/11/2011	6:41:28 AM	PHl3 MFC set to  0.000000
8/11/2011	6:41:28 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:41:28 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:41:28 AM	Tube furnace set to 0
8/11/2011	6:41:29 AM	Run finished at 6:41 AM
8/11/2011	6:47:18 AM	Main Vac valve closed
8/11/2011	6:47:26 AM	Main Vac valve opened
8/11/2011	6:53:36 AM	Main Vac valve closed
8/11/2011	6:53:49 AM	Main Vac valve opened
8/11/2011	6:57:44 AM	Recipe started at 6:57 AM
8/11/2011	6:57:44 AM	Helium valve closed
8/11/2011	6:57:44 AM	H2 valve closed
8/11/2011	6:57:44 AM	BCl3 valve closed
8/11/2011	6:57:44 AM	PH3 valve closed
8/11/2011	6:57:44 AM	SiCl4 pre valve closed
8/11/2011	6:57:44 AM	SiCl4 post valve closed
8/11/2011	6:57:44 AM	Main Vac valve closed
8/11/2011	6:57:44 AM	Bypass valve closed
8/11/2011	6:57:44 AM	Bubbler valve closed
8/11/2011	6:57:44 AM	Helium MFC set to  0.000000
8/11/2011	6:57:44 AM	H2 MFC set to  0.000000
8/11/2011	6:57:44 AM	BCl3 MFC set to  0.000000
8/11/2011	6:57:44 AM	PHl3 MFC set to  0.000000
8/11/2011	6:57:44 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:57:44 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:57:44 AM	Tube furnace set to 0
8/11/2011	6:57:47 AM	Helium valve closed
8/11/2011	6:57:47 AM	BCl3 valve closed
8/11/2011	6:57:47 AM	PH3 valve closed
8/11/2011	6:57:47 AM	SiCl4 pre valve closed
8/11/2011	6:57:47 AM	SiCl4 post valve closed
8/11/2011	6:57:47 AM	Main Vac valve closed
8/11/2011	6:57:47 AM	Bypass valve closed
8/11/2011	6:57:47 AM	Bubbler valve closed
8/11/2011	6:57:47 AM	H2 valve opened
8/11/2011	6:57:47 AM	Helium MFC set to  0.000000
8/11/2011	6:57:47 AM	H2 MFC set to  500.000000
8/11/2011	6:57:47 AM	BCl3 MFC set to  0.000000
8/11/2011	6:57:47 AM	PHl3 MFC set to  0.000000
8/11/2011	6:57:47 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:57:47 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:57:47 AM	Tube furnace set to 0
8/11/2011	6:58:53 AM	Helium valve closed
8/11/2011	6:58:53 AM	BCl3 valve closed
8/11/2011	6:58:53 AM	PH3 valve closed
8/11/2011	6:58:53 AM	SiCl4 pre valve closed
8/11/2011	6:58:53 AM	SiCl4 post valve closed
8/11/2011	6:58:53 AM	Main Vac valve closed
8/11/2011	6:58:53 AM	Bypass valve closed
8/11/2011	6:58:53 AM	H2 valve opened
8/11/2011	6:58:53 AM	Bubbler valve opened
8/11/2011	6:58:53 AM	Helium MFC set to  0.000000
8/11/2011	6:58:53 AM	H2 MFC set to  500.000000
8/11/2011	6:58:53 AM	BCl3 MFC set to  0.000000
8/11/2011	6:58:53 AM	PHl3 MFC set to  0.000000
8/11/2011	6:58:53 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:58:53 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:58:53 AM	Tube furnace set to 0
8/11/2011	6:58:54 AM	Helium valve closed
8/11/2011	6:58:54 AM	BCl3 valve closed
8/11/2011	6:58:54 AM	PH3 valve closed
8/11/2011	6:58:54 AM	SiCl4 pre valve closed
8/11/2011	6:58:54 AM	SiCl4 post valve closed
8/11/2011	6:58:54 AM	Main Vac valve closed
8/11/2011	6:58:54 AM	Bypass valve closed
8/11/2011	6:58:54 AM	H2 valve opened
8/11/2011	6:58:54 AM	Bubbler valve opened
8/11/2011	6:58:54 AM	Helium MFC set to  0.000000
8/11/2011	6:58:54 AM	H2 MFC set to  500.000000
8/11/2011	6:58:54 AM	BCl3 MFC set to  0.000000
8/11/2011	6:58:54 AM	PHl3 MFC set to  0.000000
8/11/2011	6:58:54 AM	SiCl4 MFC set to  0.000000
8/11/2011	6:58:54 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:58:54 AM	Tube furnace set to 1000
8/11/2011	7:18:54 AM	Helium valve closed
8/11/2011	7:18:54 AM	PH3 valve closed
8/11/2011	7:18:54 AM	Main Vac valve closed
8/11/2011	7:18:54 AM	Bypass valve closed
8/11/2011	7:18:54 AM	H2 valve opened
8/11/2011	7:18:54 AM	BCl3 valve opened
8/11/2011	7:18:54 AM	SiCl4 pre valve opened
8/11/2011	7:18:54 AM	SiCl4 post valve opened
8/11/2011	7:18:54 AM	Bubbler valve opened
8/11/2011	7:18:54 AM	Helium MFC set to  0.000000
8/11/2011	7:18:54 AM	H2 MFC set to  500.000000
8/11/2011	7:18:54 AM	BCl3 MFC set to  2.500000
8/11/2011	7:18:54 AM	PHl3 MFC set to  0.000000
8/11/2011	7:18:54 AM	SiCl4 MFC set to  50.000000
8/11/2011	7:18:54 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	7:18:54 AM	Tube furnace set to 1000
8/11/2011	7:33:24 AM	Helium valve closed
8/11/2011	7:33:24 AM	BCl3 valve closed
8/11/2011	7:33:24 AM	PH3 valve closed
8/11/2011	7:33:24 AM	SiCl4 pre valve closed
8/11/2011	7:33:24 AM	SiCl4 post valve closed
8/11/2011	7:33:24 AM	Main Vac valve closed
8/11/2011	7:33:24 AM	Bypass valve closed
8/11/2011	7:33:24 AM	H2 valve opened
8/11/2011	7:33:24 AM	Bubbler valve opened
8/11/2011	7:33:24 AM	Helium MFC set to  0.000000
8/11/2011	7:33:24 AM	H2 MFC set to  500.000000
8/11/2011	7:33:24 AM	BCl3 MFC set to  0.000000
8/11/2011	7:33:24 AM	PHl3 MFC set to  0.000000
8/11/2011	7:33:24 AM	SiCl4 MFC set to  0.000000
8/11/2011	7:33:24 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	7:33:25 AM	Tube furnace set to 750
8/11/2011	7:38:25 AM	H2 valve closed
8/11/2011	7:38:25 AM	BCl3 valve closed
8/11/2011	7:38:25 AM	PH3 valve closed
8/11/2011	7:38:25 AM	SiCl4 pre valve closed
8/11/2011	7:38:25 AM	SiCl4 post valve closed
8/11/2011	7:38:25 AM	Main Vac valve closed
8/11/2011	7:38:25 AM	Bypass valve closed
8/11/2011	7:38:25 AM	Helium valve opened
8/11/2011	7:38:25 AM	Bubbler valve opened
8/11/2011	7:38:25 AM	Helium MFC set to  500.000000
8/11/2011	7:38:25 AM	H2 MFC set to  0.000000
8/11/2011	7:38:25 AM	BCl3 MFC set to  0.000000
8/11/2011	7:38:25 AM	PHl3 MFC set to  0.000000
8/11/2011	7:38:25 AM	SiCl4 MFC set to  0.000000
8/11/2011	7:38:25 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	7:38:25 AM	Tube furnace set to 0
8/11/2011	7:58:25 AM	Helium valve closed
8/11/2011	7:58:25 AM	H2 valve closed
8/11/2011	7:58:25 AM	BCl3 valve closed
8/11/2011	7:58:25 AM	PH3 valve closed
8/11/2011	7:58:25 AM	SiCl4 pre valve closed
8/11/2011	7:58:25 AM	SiCl4 post valve closed
8/11/2011	7:58:25 AM	Main Vac valve closed
8/11/2011	7:58:25 AM	Bypass valve closed
8/11/2011	7:58:25 AM	Bubbler valve closed
8/11/2011	7:58:25 AM	Helium MFC set to  0.000000
8/11/2011	7:58:25 AM	H2 MFC set to  0.000000
8/11/2011	7:58:25 AM	BCl3 MFC set to  0.000000
8/11/2011	7:58:25 AM	PHl3 MFC set to  0.000000
8/11/2011	7:58:25 AM	SiCl4 MFC set to  0.000000
8/11/2011	7:58:25 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	7:58:25 AM	Tube furnace set to 0
8/11/2011	7:58:26 AM	Run finished at 7:58 AM
8/11/2011	8:17:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	8:17:44 AM	Recipe started at 8:17 AM
8/11/2011	8:17:44 AM	Helium valve closed
8/11/2011	8:17:44 AM	H2 valve closed
8/11/2011	8:17:44 AM	BCl3 valve closed
8/11/2011	8:17:44 AM	PH3 valve closed
8/11/2011	8:17:44 AM	SiCl4 pre valve closed
8/11/2011	8:17:44 AM	SiCl4 post valve closed
8/11/2011	8:17:44 AM	Main Vac valve closed
8/11/2011	8:17:44 AM	Bypass valve closed
8/11/2011	8:17:44 AM	Bubbler valve closed
8/11/2011	8:17:44 AM	Helium MFC set to  0.000000
8/11/2011	8:17:44 AM	H2 MFC set to  0.000000
8/11/2011	8:17:44 AM	BCl3 MFC set to  0.000000
8/11/2011	8:17:44 AM	PHl3 MFC set to  0.000000
8/11/2011	8:17:44 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:17:44 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:17:44 AM	Tube furnace set to 0
8/11/2011	8:17:47 AM	H2 valve closed
8/11/2011	8:17:47 AM	BCl3 valve closed
8/11/2011	8:17:47 AM	PH3 valve closed
8/11/2011	8:17:47 AM	SiCl4 pre valve closed
8/11/2011	8:17:47 AM	SiCl4 post valve closed
8/11/2011	8:17:47 AM	Main Vac valve closed
8/11/2011	8:17:47 AM	Bypass valve closed
8/11/2011	8:17:47 AM	Bubbler valve closed
8/11/2011	8:17:47 AM	Helium valve opened
8/11/2011	8:17:47 AM	Helium MFC set to  500.000000
8/11/2011	8:17:47 AM	H2 MFC set to  0.000000
8/11/2011	8:17:47 AM	BCl3 MFC set to  0.000000
8/11/2011	8:17:47 AM	PHl3 MFC set to  0.000000
8/11/2011	8:17:47 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:17:47 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:17:47 AM	Tube furnace set to 0
8/11/2011	8:17:53 AM	Helium valve closed
8/11/2011	8:17:53 AM	H2 valve closed
8/11/2011	8:17:53 AM	BCl3 valve closed
8/11/2011	8:17:53 AM	PH3 valve closed
8/11/2011	8:17:53 AM	SiCl4 pre valve closed
8/11/2011	8:17:53 AM	SiCl4 post valve closed
8/11/2011	8:17:53 AM	Main Vac valve closed
8/11/2011	8:17:53 AM	Bypass valve closed
8/11/2011	8:17:53 AM	Bubbler valve closed
8/11/2011	8:17:53 AM	Helium MFC set to  0.000000
8/11/2011	8:17:53 AM	H2 MFC set to  0.000000
8/11/2011	8:17:53 AM	BCl3 MFC set to  0.000000
8/11/2011	8:17:53 AM	PHl3 MFC set to  0.000000
8/11/2011	8:17:53 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:17:53 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:17:54 AM	Tube furnace set to 0
8/11/2011	8:17:55 AM	Run finished at 8:17 AM
8/11/2011	8:17:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	8:23:28 AM	Recipe started at 8:23 AM
8/11/2011	8:23:28 AM	Helium valve closed
8/11/2011	8:23:28 AM	H2 valve closed
8/11/2011	8:23:28 AM	BCl3 valve closed
8/11/2011	8:23:28 AM	PH3 valve closed
8/11/2011	8:23:28 AM	SiCl4 pre valve closed
8/11/2011	8:23:28 AM	SiCl4 post valve closed
8/11/2011	8:23:28 AM	Main Vac valve closed
8/11/2011	8:23:28 AM	Bubbler valve closed
8/11/2011	8:23:28 AM	Bypass valve opened
8/11/2011	8:23:28 AM	Helium MFC set to  0.000000
8/11/2011	8:23:28 AM	H2 MFC set to  0.000000
8/11/2011	8:23:28 AM	BCl3 MFC set to  0.000000
8/11/2011	8:23:28 AM	PHl3 MFC set to  0.000000
8/11/2011	8:23:28 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:23:28 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:23:28 AM	Tube furnace set to 0
8/11/2011	8:24:35 AM	Helium valve closed
8/11/2011	8:24:35 AM	H2 valve closed
8/11/2011	8:24:35 AM	BCl3 valve closed
8/11/2011	8:24:35 AM	PH3 valve closed
8/11/2011	8:24:35 AM	SiCl4 pre valve closed
8/11/2011	8:24:35 AM	SiCl4 post valve closed
8/11/2011	8:24:35 AM	Main Vac valve closed
8/11/2011	8:24:35 AM	Bubbler valve closed
8/11/2011	8:24:35 AM	Bypass valve opened
8/11/2011	8:24:35 AM	Helium MFC set to  0.000000
8/11/2011	8:24:35 AM	H2 MFC set to  0.000000
8/11/2011	8:24:35 AM	BCl3 MFC set to  0.000000
8/11/2011	8:24:35 AM	PHl3 MFC set to  0.000000
8/11/2011	8:24:35 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:24:35 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:24:35 AM	Tube furnace set to 0
8/11/2011	8:25:05 AM	Helium valve closed
8/11/2011	8:25:05 AM	H2 valve closed
8/11/2011	8:25:05 AM	BCl3 valve closed
8/11/2011	8:25:05 AM	PH3 valve closed
8/11/2011	8:25:05 AM	SiCl4 pre valve closed
8/11/2011	8:25:05 AM	SiCl4 post valve closed
8/11/2011	8:25:05 AM	Bypass valve closed
8/11/2011	8:25:05 AM	Bubbler valve closed
8/11/2011	8:25:05 AM	Main Vac valve opened
8/11/2011	8:25:05 AM	Helium MFC set to  0.000000
8/11/2011	8:25:05 AM	H2 MFC set to  0.000000
8/11/2011	8:25:05 AM	BCl3 MFC set to  0.000000
8/11/2011	8:25:05 AM	PHl3 MFC set to  0.000000
8/11/2011	8:25:05 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:25:05 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:25:06 AM	Tube furnace set to 0
8/11/2011	8:55:05 AM	H2 valve closed
8/11/2011	8:55:05 AM	BCl3 valve closed
8/11/2011	8:55:05 AM	PH3 valve closed
8/11/2011	8:55:05 AM	SiCl4 pre valve closed
8/11/2011	8:55:05 AM	SiCl4 post valve closed
8/11/2011	8:55:05 AM	Bypass valve closed
8/11/2011	8:55:05 AM	Bubbler valve closed
8/11/2011	8:55:06 AM	Helium valve opened
8/11/2011	8:55:06 AM	Main Vac valve opened
8/11/2011	8:55:06 AM	Helium MFC set to  20.000000
8/11/2011	8:55:06 AM	H2 MFC set to  0.000000
8/11/2011	8:55:06 AM	BCl3 MFC set to  0.000000
8/11/2011	8:55:06 AM	PHl3 MFC set to  0.000000
8/11/2011	8:55:06 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:55:06 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:55:06 AM	Tube furnace set to 0
8/11/2011	8:55:36 AM	Helium valve closed
8/11/2011	8:55:36 AM	H2 valve closed
8/11/2011	8:55:36 AM	BCl3 valve closed
8/11/2011	8:55:36 AM	PH3 valve closed
8/11/2011	8:55:36 AM	SiCl4 pre valve closed
8/11/2011	8:55:36 AM	SiCl4 post valve closed
8/11/2011	8:55:36 AM	Bypass valve closed
8/11/2011	8:55:36 AM	Bubbler valve closed
8/11/2011	8:55:36 AM	Main Vac valve opened
8/11/2011	8:55:36 AM	Helium MFC set to  0.000000
8/11/2011	8:55:36 AM	H2 MFC set to  0.000000
8/11/2011	8:55:36 AM	BCl3 MFC set to  0.000000
8/11/2011	8:55:36 AM	PHl3 MFC set to  0.000000
8/11/2011	8:55:36 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:55:36 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:55:36 AM	Tube furnace set to 0
8/11/2011	8:56:06 AM	H2 valve closed
8/11/2011	8:56:06 AM	BCl3 valve closed
8/11/2011	8:56:06 AM	PH3 valve closed
8/11/2011	8:56:06 AM	SiCl4 pre valve closed
8/11/2011	8:56:06 AM	SiCl4 post valve closed
8/11/2011	8:56:06 AM	Bypass valve closed
8/11/2011	8:56:06 AM	Bubbler valve closed
8/11/2011	8:56:06 AM	Helium valve opened
8/11/2011	8:56:06 AM	Main Vac valve opened
8/11/2011	8:56:06 AM	Helium MFC set to  20.000000
8/11/2011	8:56:06 AM	H2 MFC set to  0.000000
8/11/2011	8:56:06 AM	BCl3 MFC set to  0.000000
8/11/2011	8:56:06 AM	PHl3 MFC set to  0.000000
8/11/2011	8:56:06 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:56:06 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:56:06 AM	Tube furnace set to 0
8/11/2011	8:56:36 AM	Helium valve closed
8/11/2011	8:56:36 AM	H2 valve closed
8/11/2011	8:56:36 AM	BCl3 valve closed
8/11/2011	8:56:36 AM	PH3 valve closed
8/11/2011	8:56:36 AM	SiCl4 pre valve closed
8/11/2011	8:56:36 AM	SiCl4 post valve closed
8/11/2011	8:56:36 AM	Bypass valve closed
8/11/2011	8:56:36 AM	Bubbler valve closed
8/11/2011	8:56:36 AM	Main Vac valve opened
8/11/2011	8:56:36 AM	Helium MFC set to  0.000000
8/11/2011	8:56:36 AM	H2 MFC set to  0.000000
8/11/2011	8:56:36 AM	BCl3 MFC set to  0.000000
8/11/2011	8:56:36 AM	PHl3 MFC set to  0.000000
8/11/2011	8:56:36 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:56:36 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:56:36 AM	Tube furnace set to 0
8/11/2011	8:57:06 AM	H2 valve closed
8/11/2011	8:57:06 AM	BCl3 valve closed
8/11/2011	8:57:06 AM	PH3 valve closed
8/11/2011	8:57:06 AM	SiCl4 pre valve closed
8/11/2011	8:57:06 AM	SiCl4 post valve closed
8/11/2011	8:57:06 AM	Bypass valve closed
8/11/2011	8:57:06 AM	Bubbler valve closed
8/11/2011	8:57:06 AM	Helium valve opened
8/11/2011	8:57:06 AM	Main Vac valve opened
8/11/2011	8:57:06 AM	Helium MFC set to  20.000000
8/11/2011	8:57:06 AM	H2 MFC set to  0.000000
8/11/2011	8:57:06 AM	BCl3 MFC set to  0.000000
8/11/2011	8:57:06 AM	PHl3 MFC set to  0.000000
8/11/2011	8:57:06 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:57:06 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:57:06 AM	Tube furnace set to 0
8/11/2011	8:57:36 AM	Helium valve closed
8/11/2011	8:57:36 AM	H2 valve closed
8/11/2011	8:57:36 AM	BCl3 valve closed
8/11/2011	8:57:36 AM	PH3 valve closed
8/11/2011	8:57:36 AM	SiCl4 pre valve closed
8/11/2011	8:57:36 AM	SiCl4 post valve closed
8/11/2011	8:57:36 AM	Bypass valve closed
8/11/2011	8:57:36 AM	Bubbler valve closed
8/11/2011	8:57:36 AM	Main Vac valve opened
8/11/2011	8:57:36 AM	Helium MFC set to  0.000000
8/11/2011	8:57:36 AM	H2 MFC set to  0.000000
8/11/2011	8:57:37 AM	BCl3 MFC set to  0.000000
8/11/2011	8:57:37 AM	PHl3 MFC set to  0.000000
8/11/2011	8:57:37 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:57:37 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:57:37 AM	Tube furnace set to 0
8/11/2011	8:58:07 AM	H2 valve closed
8/11/2011	8:58:07 AM	BCl3 valve closed
8/11/2011	8:58:07 AM	PH3 valve closed
8/11/2011	8:58:07 AM	SiCl4 pre valve closed
8/11/2011	8:58:07 AM	SiCl4 post valve closed
8/11/2011	8:58:07 AM	Bypass valve closed
8/11/2011	8:58:07 AM	Bubbler valve closed
8/11/2011	8:58:07 AM	Helium valve opened
8/11/2011	8:58:07 AM	Main Vac valve opened
8/11/2011	8:58:07 AM	Helium MFC set to  20.000000
8/11/2011	8:58:07 AM	H2 MFC set to  0.000000
8/11/2011	8:58:07 AM	BCl3 MFC set to  0.000000
8/11/2011	8:58:07 AM	PHl3 MFC set to  0.000000
8/11/2011	8:58:07 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:58:07 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:58:07 AM	Tube furnace set to 0
8/11/2011	8:58:37 AM	Helium valve closed
8/11/2011	8:58:37 AM	H2 valve closed
8/11/2011	8:58:37 AM	BCl3 valve closed
8/11/2011	8:58:37 AM	PH3 valve closed
8/11/2011	8:58:37 AM	SiCl4 pre valve closed
8/11/2011	8:58:37 AM	SiCl4 post valve closed
8/11/2011	8:58:37 AM	Bypass valve closed
8/11/2011	8:58:37 AM	Bubbler valve closed
8/11/2011	8:58:37 AM	Main Vac valve opened
8/11/2011	8:58:37 AM	Helium MFC set to  0.000000
8/11/2011	8:58:37 AM	H2 MFC set to  0.000000
8/11/2011	8:58:37 AM	BCl3 MFC set to  0.000000
8/11/2011	8:58:37 AM	PHl3 MFC set to  0.000000
8/11/2011	8:58:37 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:58:37 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:58:37 AM	Tube furnace set to 0
8/11/2011	8:59:07 AM	H2 valve closed
8/11/2011	8:59:07 AM	BCl3 valve closed
8/11/2011	8:59:07 AM	PH3 valve closed
8/11/2011	8:59:07 AM	SiCl4 pre valve closed
8/11/2011	8:59:07 AM	SiCl4 post valve closed
8/11/2011	8:59:07 AM	Bypass valve closed
8/11/2011	8:59:07 AM	Bubbler valve closed
8/11/2011	8:59:07 AM	Helium valve opened
8/11/2011	8:59:07 AM	Main Vac valve opened
8/11/2011	8:59:07 AM	Helium MFC set to  20.000000
8/11/2011	8:59:07 AM	H2 MFC set to  0.000000
8/11/2011	8:59:07 AM	BCl3 MFC set to  0.000000
8/11/2011	8:59:07 AM	PHl3 MFC set to  0.000000
8/11/2011	8:59:07 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:59:07 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:59:07 AM	Tube furnace set to 0
8/11/2011	8:59:37 AM	Helium valve closed
8/11/2011	8:59:37 AM	H2 valve closed
8/11/2011	8:59:37 AM	BCl3 valve closed
8/11/2011	8:59:37 AM	PH3 valve closed
8/11/2011	8:59:37 AM	SiCl4 pre valve closed
8/11/2011	8:59:37 AM	SiCl4 post valve closed
8/11/2011	8:59:37 AM	Bypass valve closed
8/11/2011	8:59:37 AM	Bubbler valve closed
8/11/2011	8:59:37 AM	Main Vac valve opened
8/11/2011	8:59:37 AM	Helium MFC set to  0.000000
8/11/2011	8:59:37 AM	H2 MFC set to  0.000000
8/11/2011	8:59:37 AM	BCl3 MFC set to  0.000000
8/11/2011	8:59:37 AM	PHl3 MFC set to  0.000000
8/11/2011	8:59:37 AM	SiCl4 MFC set to  0.000000
8/11/2011	8:59:37 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:59:37 AM	Tube furnace set to 0
8/11/2011	9:00:07 AM	H2 valve closed
8/11/2011	9:00:07 AM	BCl3 valve closed
8/11/2011	9:00:07 AM	PH3 valve closed
8/11/2011	9:00:07 AM	SiCl4 pre valve closed
8/11/2011	9:00:07 AM	SiCl4 post valve closed
8/11/2011	9:00:07 AM	Bypass valve closed
8/11/2011	9:00:07 AM	Bubbler valve closed
8/11/2011	9:00:07 AM	Helium valve opened
8/11/2011	9:00:07 AM	Main Vac valve opened
8/11/2011	9:00:07 AM	Helium MFC set to  20.000000
8/11/2011	9:00:07 AM	H2 MFC set to  0.000000
8/11/2011	9:00:07 AM	BCl3 MFC set to  0.000000
8/11/2011	9:00:07 AM	PHl3 MFC set to  0.000000
8/11/2011	9:00:07 AM	SiCl4 MFC set to  0.000000
8/11/2011	9:00:07 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:00:08 AM	Tube furnace set to 0
8/11/2011	9:00:38 AM	Helium valve closed
8/11/2011	9:00:38 AM	H2 valve closed
8/11/2011	9:00:38 AM	BCl3 valve closed
8/11/2011	9:00:38 AM	PH3 valve closed
8/11/2011	9:00:38 AM	SiCl4 pre valve closed
8/11/2011	9:00:38 AM	SiCl4 post valve closed
8/11/2011	9:00:38 AM	Bypass valve closed
8/11/2011	9:00:38 AM	Bubbler valve closed
8/11/2011	9:00:38 AM	Main Vac valve opened
8/11/2011	9:00:38 AM	Helium MFC set to  0.000000
8/11/2011	9:00:38 AM	H2 MFC set to  0.000000
8/11/2011	9:00:38 AM	BCl3 MFC set to  0.000000
8/11/2011	9:00:38 AM	PHl3 MFC set to  0.000000
8/11/2011	9:00:38 AM	SiCl4 MFC set to  0.000000
8/11/2011	9:00:38 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:00:38 AM	Tube furnace set to 0
8/11/2011	9:01:08 AM	H2 valve closed
8/11/2011	9:01:08 AM	BCl3 valve closed
8/11/2011	9:01:08 AM	PH3 valve closed
8/11/2011	9:01:08 AM	SiCl4 pre valve closed
8/11/2011	9:01:08 AM	SiCl4 post valve closed
8/11/2011	9:01:08 AM	Bypass valve closed
8/11/2011	9:01:08 AM	Bubbler valve closed
8/11/2011	9:01:08 AM	Helium valve opened
8/11/2011	9:01:08 AM	Main Vac valve opened
8/11/2011	9:01:08 AM	Helium MFC set to  20.000000
8/11/2011	9:01:08 AM	H2 MFC set to  0.000000
8/11/2011	9:01:08 AM	BCl3 MFC set to  0.000000
8/11/2011	9:01:08 AM	PHl3 MFC set to  0.000000
8/11/2011	9:01:08 AM	SiCl4 MFC set to  0.000000
8/11/2011	9:01:08 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:01:08 AM	Tube furnace set to 0
8/11/2011	9:01:38 AM	Helium valve closed
8/11/2011	9:01:38 AM	H2 valve closed
8/11/2011	9:01:38 AM	BCl3 valve closed
8/11/2011	9:01:38 AM	PH3 valve closed
8/11/2011	9:01:38 AM	SiCl4 pre valve closed
8/11/2011	9:01:38 AM	SiCl4 post valve closed
8/11/2011	9:01:38 AM	Bypass valve closed
8/11/2011	9:01:38 AM	Bubbler valve closed
8/11/2011	9:01:38 AM	Main Vac valve opened
8/11/2011	9:01:38 AM	Helium MFC set to  0.000000
8/11/2011	9:01:38 AM	H2 MFC set to  0.000000
8/11/2011	9:01:38 AM	BCl3 MFC set to  0.000000
8/11/2011	9:01:38 AM	PHl3 MFC set to  0.000000
8/11/2011	9:01:38 AM	SiCl4 MFC set to  0.000000
8/11/2011	9:01:38 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:01:38 AM	Tube furnace set to 0
8/11/2011	9:02:08 AM	H2 valve closed
8/11/2011	9:02:08 AM	BCl3 valve closed
8/11/2011	9:02:08 AM	PH3 valve closed
8/11/2011	9:02:08 AM	SiCl4 pre valve closed
8/11/2011	9:02:08 AM	SiCl4 post valve closed
8/11/2011	9:02:08 AM	Bypass valve closed
8/11/2011	9:02:08 AM	Bubbler valve closed
8/11/2011	9:02:08 AM	Helium valve opened
8/11/2011	9:02:08 AM	Main Vac valve opened
8/11/2011	9:02:08 AM	Helium MFC set to  20.000000
8/11/2011	9:02:08 AM	H2 MFC set to  0.000000
8/11/2011	9:02:08 AM	BCl3 MFC set to  0.000000
8/11/2011	9:02:08 AM	PHl3 MFC set to  0.000000
8/11/2011	9:02:08 AM	SiCl4 MFC set to  0.000000
8/11/2011	9:02:08 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:02:08 AM	Tube furnace set to 0
8/11/2011	9:02:39 AM	Helium valve closed
8/11/2011	9:02:39 AM	H2 valve closed
8/11/2011	9:02:39 AM	BCl3 valve closed
8/11/2011	9:02:39 AM	PH3 valve closed
8/11/2011	9:02:39 AM	SiCl4 pre valve closed
8/11/2011	9:02:39 AM	SiCl4 post valve closed
8/11/2011	9:02:39 AM	Bypass valve closed
8/11/2011	9:02:39 AM	Bubbler valve closed
8/11/2011	9:02:39 AM	Main Vac valve opened
8/11/2011	9:02:39 AM	Helium MFC set to  0.000000
8/11/2011	9:02:39 AM	H2 MFC set to  0.000000
8/11/2011	9:02:39 AM	BCl3 MFC set to  0.000000
8/11/2011	9:02:39 AM	PHl3 MFC set to  0.000000
8/11/2011	9:02:39 AM	SiCl4 MFC set to  0.000000
8/11/2011	9:02:39 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:02:39 AM	Tube furnace set to 0
8/11/2011	9:03:09 AM	H2 valve closed
8/11/2011	9:03:09 AM	BCl3 valve closed
8/11/2011	9:03:09 AM	PH3 valve closed
8/11/2011	9:03:09 AM	SiCl4 pre valve closed
8/11/2011	9:03:09 AM	SiCl4 post valve closed
8/11/2011	9:03:09 AM	Bypass valve closed
8/11/2011	9:03:09 AM	Bubbler valve closed
8/11/2011	9:03:09 AM	Helium valve opened
8/11/2011	9:03:09 AM	Main Vac valve opened
8/11/2011	9:03:09 AM	Helium MFC set to  20.000000
8/11/2011	9:03:09 AM	H2 MFC set to  0.000000
8/11/2011	9:03:09 AM	BCl3 MFC set to  0.000000
8/11/2011	9:03:09 AM	PHl3 MFC set to  0.000000
8/11/2011	9:03:09 AM	SiCl4 MFC set to  0.000000
8/11/2011	9:03:09 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:03:09 AM	Tube furnace set to 0
8/11/2011	9:03:39 AM	Helium valve closed
8/11/2011	9:03:39 AM	H2 valve closed
8/11/2011	9:03:39 AM	BCl3 valve closed
8/11/2011	9:03:39 AM	PH3 valve closed
8/11/2011	9:03:39 AM	SiCl4 pre valve closed
8/11/2011	9:03:39 AM	SiCl4 post valve closed
8/11/2011	9:03:39 AM	Bypass valve closed
8/11/2011	9:03:39 AM	Bubbler valve closed
8/11/2011	9:03:39 AM	Main Vac valve opened
8/11/2011	9:03:39 AM	Helium MFC set to  0.000000
8/11/2011	9:03:39 AM	H2 MFC set to  0.000000
8/11/2011	9:03:39 AM	BCl3 MFC set to  0.000000
8/11/2011	9:03:39 AM	PHl3 MFC set to  0.000000
8/11/2011	9:03:39 AM	SiCl4 MFC set to  0.000000
8/11/2011	9:03:39 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:03:39 AM	Tube furnace set to 0
8/11/2011	9:04:09 AM	H2 valve closed
8/11/2011	9:04:09 AM	BCl3 valve closed
8/11/2011	9:04:09 AM	PH3 valve closed
8/11/2011	9:04:09 AM	SiCl4 pre valve closed
8/11/2011	9:04:09 AM	SiCl4 post valve closed
8/11/2011	9:04:09 AM	Bypass valve closed
8/11/2011	9:04:09 AM	Bubbler valve closed
8/11/2011	9:04:09 AM	Helium valve opened
8/11/2011	9:04:09 AM	Main Vac valve opened
8/11/2011	9:04:09 AM	Helium MFC set to  20.000000
8/11/2011	9:04:09 AM	H2 MFC set to  0.000000
8/11/2011	9:04:09 AM	BCl3 MFC set to  0.000000
8/11/2011	9:04:09 AM	PHl3 MFC set to  0.000000
8/11/2011	9:04:09 AM	SiCl4 MFC set to  0.000000
8/11/2011	9:04:09 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:04:09 AM	Tube furnace set to 0
8/11/2011	9:04:39 AM	Helium valve closed
8/11/2011	9:04:39 AM	H2 valve closed
8/11/2011	9:04:39 AM	BCl3 valve closed
8/11/2011	9:04:39 AM	PH3 valve closed
8/11/2011	9:04:39 AM	SiCl4 pre valve closed
8/11/2011	9:04:39 AM	SiCl4 post valve closed
8/11/2011	9:04:39 AM	Bypass valve closed
8/11/2011	9:04:39 AM	Bubbler valve closed
8/11/2011	9:04:39 AM	Main Vac valve opened
8/11/2011	9:04:39 AM	Helium MFC set to  0.000000
8/11/2011	9:04:39 AM	H2 MFC set to  0.000000
8/11/2011	9:04:39 AM	BCl3 MFC set to  0.000000
8/11/2011	9:04:39 AM	PHl3 MFC set to  0.000000
8/11/2011	9:04:39 AM	SiCl4 MFC set to  0.000000
8/11/2011	9:04:39 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:04:40 AM	Tube furnace set to 0
8/11/2011	9:04:41 AM	Run finished at 9:04 AM
8/11/2011	9:54:42 AM	Main Vac valve closed
8/11/2011	9:54:53 AM	Main Vac valve opened
8/11/2011	9:55:26 AM	Recipe started at 9:55 AM
8/11/2011	9:55:26 AM	Helium valve closed
8/11/2011	9:55:26 AM	H2 valve closed
8/11/2011	9:55:26 AM	BCl3 valve closed
8/11/2011	9:55:26 AM	PH3 valve closed
8/11/2011	9:55:26 AM	SiCl4 pre valve closed
8/11/2011	9:55:26 AM	SiCl4 post valve closed
8/11/2011	9:55:26 AM	Main Vac valve closed
8/11/2011	9:55:26 AM	Bypass valve closed
8/11/2011	9:55:26 AM	Bubbler valve closed
8/11/2011	9:55:26 AM	Helium MFC set to  0.000000
8/11/2011	9:55:26 AM	H2 MFC set to  0.000000
8/11/2011	9:55:26 AM	BCl3 MFC set to  0.000000
8/11/2011	9:55:26 AM	PHl3 MFC set to  0.000000
8/11/2011	9:55:26 AM	SiCl4 MFC set to  0.000000
8/11/2011	9:55:26 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:55:26 AM	Tube furnace set to 0
8/11/2011	9:55:29 AM	Helium valve closed
8/11/2011	9:55:29 AM	BCl3 valve closed
8/11/2011	9:55:29 AM	PH3 valve closed
8/11/2011	9:55:29 AM	SiCl4 pre valve closed
8/11/2011	9:55:29 AM	SiCl4 post valve closed
8/11/2011	9:55:29 AM	Main Vac valve closed
8/11/2011	9:55:29 AM	Bypass valve closed
8/11/2011	9:55:29 AM	Bubbler valve closed
8/11/2011	9:55:29 AM	H2 valve opened
8/11/2011	9:55:29 AM	Helium MFC set to  0.000000
8/11/2011	9:55:29 AM	H2 MFC set to  500.000000
8/11/2011	9:55:29 AM	BCl3 MFC set to  0.000000
8/11/2011	9:55:29 AM	PHl3 MFC set to  0.000000
8/11/2011	9:55:29 AM	SiCl4 MFC set to  0.000000
8/11/2011	9:55:29 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:55:29 AM	Tube furnace set to 0
8/11/2011	9:56:35 AM	Helium valve closed
8/11/2011	9:56:35 AM	BCl3 valve closed
8/11/2011	9:56:35 AM	PH3 valve closed
8/11/2011	9:56:35 AM	SiCl4 pre valve closed
8/11/2011	9:56:35 AM	SiCl4 post valve closed
8/11/2011	9:56:35 AM	Main Vac valve closed
8/11/2011	9:56:35 AM	Bypass valve closed
8/11/2011	9:56:35 AM	H2 valve opened
8/11/2011	9:56:35 AM	Bubbler valve opened
8/11/2011	9:56:35 AM	Helium MFC set to  0.000000
8/11/2011	9:56:35 AM	H2 MFC set to  500.000000
8/11/2011	9:56:35 AM	BCl3 MFC set to  0.000000
8/11/2011	9:56:35 AM	PHl3 MFC set to  0.000000
8/11/2011	9:56:35 AM	SiCl4 MFC set to  0.000000
8/11/2011	9:56:35 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:56:35 AM	Tube furnace set to 0
8/11/2011	9:56:36 AM	Helium valve closed
8/11/2011	9:56:36 AM	BCl3 valve closed
8/11/2011	9:56:36 AM	PH3 valve closed
8/11/2011	9:56:36 AM	SiCl4 pre valve closed
8/11/2011	9:56:36 AM	SiCl4 post valve closed
8/11/2011	9:56:36 AM	Main Vac valve closed
8/11/2011	9:56:36 AM	Bypass valve closed
8/11/2011	9:56:36 AM	H2 valve opened
8/11/2011	9:56:36 AM	Bubbler valve opened
8/11/2011	9:56:36 AM	Helium MFC set to  0.000000
8/11/2011	9:56:36 AM	H2 MFC set to  500.000000
8/11/2011	9:56:36 AM	BCl3 MFC set to  0.000000
8/11/2011	9:56:36 AM	PHl3 MFC set to  0.000000
8/11/2011	9:56:36 AM	SiCl4 MFC set to  0.000000
8/11/2011	9:56:36 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:56:37 AM	Tube furnace set to 1000
8/11/2011	10:16:37 AM	Helium valve closed
8/11/2011	10:16:37 AM	PH3 valve closed
8/11/2011	10:16:37 AM	Main Vac valve closed
8/11/2011	10:16:37 AM	Bypass valve closed
8/11/2011	10:16:37 AM	H2 valve opened
8/11/2011	10:16:37 AM	BCl3 valve opened
8/11/2011	10:16:37 AM	SiCl4 pre valve opened
8/11/2011	10:16:37 AM	SiCl4 post valve opened
8/11/2011	10:16:37 AM	Bubbler valve opened
8/11/2011	10:16:37 AM	Helium MFC set to  0.000000
8/11/2011	10:16:37 AM	H2 MFC set to  500.000000
8/11/2011	10:16:37 AM	BCl3 MFC set to  2.000000
8/11/2011	10:16:37 AM	PHl3 MFC set to  0.000000
8/11/2011	10:16:37 AM	SiCl4 MFC set to  50.000000
8/11/2011	10:16:37 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	10:16:37 AM	Tube furnace set to 1000
8/11/2011	10:31:07 AM	Helium valve closed
8/11/2011	10:31:07 AM	BCl3 valve closed
8/11/2011	10:31:07 AM	PH3 valve closed
8/11/2011	10:31:07 AM	SiCl4 pre valve closed
8/11/2011	10:31:07 AM	SiCl4 post valve closed
8/11/2011	10:31:07 AM	Main Vac valve closed
8/11/2011	10:31:07 AM	Bypass valve closed
8/11/2011	10:31:07 AM	H2 valve opened
8/11/2011	10:31:07 AM	Bubbler valve opened
8/11/2011	10:31:07 AM	Helium MFC set to  0.000000
8/11/2011	10:31:07 AM	H2 MFC set to  500.000000
8/11/2011	10:31:07 AM	BCl3 MFC set to  0.000000
8/11/2011	10:31:07 AM	PHl3 MFC set to  0.000000
8/11/2011	10:31:07 AM	SiCl4 MFC set to  0.000000
8/11/2011	10:31:07 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	10:31:07 AM	Tube furnace set to 750
8/11/2011	10:36:07 AM	H2 valve closed
8/11/2011	10:36:07 AM	BCl3 valve closed
8/11/2011	10:36:07 AM	PH3 valve closed
8/11/2011	10:36:07 AM	SiCl4 pre valve closed
8/11/2011	10:36:07 AM	SiCl4 post valve closed
8/11/2011	10:36:07 AM	Main Vac valve closed
8/11/2011	10:36:07 AM	Bypass valve closed
8/11/2011	10:36:07 AM	Helium valve opened
8/11/2011	10:36:07 AM	Bubbler valve opened
8/11/2011	10:36:07 AM	Helium MFC set to  500.000000
8/11/2011	10:36:07 AM	H2 MFC set to  0.000000
8/11/2011	10:36:07 AM	BCl3 MFC set to  0.000000
8/11/2011	10:36:07 AM	PHl3 MFC set to  0.000000
8/11/2011	10:36:07 AM	SiCl4 MFC set to  0.000000
8/11/2011	10:36:07 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	10:36:07 AM	Tube furnace set to 0
8/11/2011	10:56:07 AM	Helium valve closed
8/11/2011	10:56:07 AM	H2 valve closed
8/11/2011	10:56:07 AM	BCl3 valve closed
8/11/2011	10:56:07 AM	PH3 valve closed
8/11/2011	10:56:07 AM	SiCl4 pre valve closed
8/11/2011	10:56:07 AM	SiCl4 post valve closed
8/11/2011	10:56:07 AM	Main Vac valve closed
8/11/2011	10:56:07 AM	Bypass valve closed
8/11/2011	10:56:07 AM	Bubbler valve closed
8/11/2011	10:56:07 AM	Helium MFC set to  0.000000
8/11/2011	10:56:07 AM	H2 MFC set to  0.000000
8/11/2011	10:56:07 AM	BCl3 MFC set to  0.000000
8/11/2011	10:56:07 AM	PHl3 MFC set to  0.000000
8/11/2011	10:56:07 AM	SiCl4 MFC set to  0.000000
8/11/2011	10:56:07 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	10:56:07 AM	Tube furnace set to 0
8/11/2011	10:56:08 AM	Run finished at 10:56 AM
8/11/2011	11:18:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	11:18:03 AM	Recipe started at 11:18 AM
8/11/2011	11:18:03 AM	Helium valve closed
8/11/2011	11:18:03 AM	H2 valve closed
8/11/2011	11:18:03 AM	BCl3 valve closed
8/11/2011	11:18:03 AM	PH3 valve closed
8/11/2011	11:18:03 AM	SiCl4 pre valve closed
8/11/2011	11:18:03 AM	SiCl4 post valve closed
8/11/2011	11:18:03 AM	Main Vac valve closed
8/11/2011	11:18:03 AM	Bypass valve closed
8/11/2011	11:18:03 AM	Bubbler valve closed
8/11/2011	11:18:03 AM	Helium MFC set to  0.000000
8/11/2011	11:18:03 AM	H2 MFC set to  0.000000
8/11/2011	11:18:03 AM	BCl3 MFC set to  0.000000
8/11/2011	11:18:03 AM	PHl3 MFC set to  0.000000
8/11/2011	11:18:03 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:18:03 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:18:03 AM	Tube furnace set to 0
8/11/2011	11:18:06 AM	H2 valve closed
8/11/2011	11:18:06 AM	BCl3 valve closed
8/11/2011	11:18:06 AM	PH3 valve closed
8/11/2011	11:18:06 AM	SiCl4 pre valve closed
8/11/2011	11:18:06 AM	SiCl4 post valve closed
8/11/2011	11:18:06 AM	Main Vac valve closed
8/11/2011	11:18:06 AM	Bypass valve closed
8/11/2011	11:18:06 AM	Bubbler valve closed
8/11/2011	11:18:06 AM	Helium valve opened
8/11/2011	11:18:06 AM	Helium MFC set to  500.000000
8/11/2011	11:18:06 AM	H2 MFC set to  0.000000
8/11/2011	11:18:06 AM	BCl3 MFC set to  0.000000
8/11/2011	11:18:06 AM	PHl3 MFC set to  0.000000
8/11/2011	11:18:06 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:18:06 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:18:06 AM	Tube furnace set to 0
8/11/2011	11:18:12 AM	Helium valve closed
8/11/2011	11:18:12 AM	H2 valve closed
8/11/2011	11:18:12 AM	BCl3 valve closed
8/11/2011	11:18:12 AM	PH3 valve closed
8/11/2011	11:18:12 AM	SiCl4 pre valve closed
8/11/2011	11:18:12 AM	SiCl4 post valve closed
8/11/2011	11:18:12 AM	Main Vac valve closed
8/11/2011	11:18:12 AM	Bypass valve closed
8/11/2011	11:18:12 AM	Bubbler valve closed
8/11/2011	11:18:12 AM	Helium MFC set to  0.000000
8/11/2011	11:18:12 AM	H2 MFC set to  0.000000
8/11/2011	11:18:12 AM	BCl3 MFC set to  0.000000
8/11/2011	11:18:12 AM	PHl3 MFC set to  0.000000
8/11/2011	11:18:12 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:18:12 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:18:12 AM	Tube furnace set to 0
8/11/2011	11:18:13 AM	Run finished at 11:18 AM
8/11/2011	11:18:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	11:21:43 AM	Recipe started at 11:21 AM
8/11/2011	11:21:43 AM	Helium valve closed
8/11/2011	11:21:43 AM	H2 valve closed
8/11/2011	11:21:43 AM	BCl3 valve closed
8/11/2011	11:21:43 AM	PH3 valve closed
8/11/2011	11:21:43 AM	SiCl4 pre valve closed
8/11/2011	11:21:43 AM	SiCl4 post valve closed
8/11/2011	11:21:43 AM	Main Vac valve closed
8/11/2011	11:21:43 AM	Bubbler valve closed
8/11/2011	11:21:43 AM	Bypass valve opened
8/11/2011	11:21:43 AM	Helium MFC set to  0.000000
8/11/2011	11:21:43 AM	H2 MFC set to  0.000000
8/11/2011	11:21:43 AM	BCl3 MFC set to  0.000000
8/11/2011	11:21:43 AM	PHl3 MFC set to  0.000000
8/11/2011	11:21:43 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:21:43 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:21:43 AM	Tube furnace set to 0
8/11/2011	11:22:48 AM	Helium valve closed
8/11/2011	11:22:48 AM	H2 valve closed
8/11/2011	11:22:48 AM	BCl3 valve closed
8/11/2011	11:22:48 AM	PH3 valve closed
8/11/2011	11:22:48 AM	SiCl4 pre valve closed
8/11/2011	11:22:48 AM	SiCl4 post valve closed
8/11/2011	11:22:48 AM	Main Vac valve closed
8/11/2011	11:22:48 AM	Bubbler valve closed
8/11/2011	11:22:48 AM	Bypass valve opened
8/11/2011	11:22:48 AM	Helium MFC set to  0.000000
8/11/2011	11:22:48 AM	H2 MFC set to  0.000000
8/11/2011	11:22:48 AM	BCl3 MFC set to  0.000000
8/11/2011	11:22:48 AM	PHl3 MFC set to  0.000000
8/11/2011	11:22:48 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:22:48 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:22:48 AM	Tube furnace set to 0
8/11/2011	11:23:18 AM	Helium valve closed
8/11/2011	11:23:18 AM	H2 valve closed
8/11/2011	11:23:18 AM	BCl3 valve closed
8/11/2011	11:23:18 AM	PH3 valve closed
8/11/2011	11:23:18 AM	SiCl4 pre valve closed
8/11/2011	11:23:18 AM	SiCl4 post valve closed
8/11/2011	11:23:18 AM	Bypass valve closed
8/11/2011	11:23:18 AM	Bubbler valve closed
8/11/2011	11:23:18 AM	Main Vac valve opened
8/11/2011	11:23:18 AM	Helium MFC set to  0.000000
8/11/2011	11:23:18 AM	H2 MFC set to  0.000000
8/11/2011	11:23:18 AM	BCl3 MFC set to  0.000000
8/11/2011	11:23:18 AM	PHl3 MFC set to  0.000000
8/11/2011	11:23:18 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:23:18 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:23:18 AM	Tube furnace set to 0
8/11/2011	11:31:17 AM	Run aborted at 11:31 AM
8/11/2011	11:31:17 AM	Helium valve closed
8/11/2011	11:31:17 AM	H2 valve closed
8/11/2011	11:31:17 AM	BCl3 valve closed
8/11/2011	11:31:17 AM	PH3 valve closed
8/11/2011	11:31:17 AM	SiCl4 pre valve closed
8/11/2011	11:31:17 AM	SiCl4 post valve closed
8/11/2011	11:31:17 AM	Bypass valve closed
8/11/2011	11:31:17 AM	Main Vac valve closed
8/11/2011	11:31:17 AM	Bubbler valve closed
8/11/2011	11:31:17 AM	Helium MFC set to  0.000000
8/11/2011	11:31:17 AM	H2 MFC set to  0.000000
8/11/2011	11:31:17 AM	BCl3 MFC set to  0.000000
8/11/2011	11:31:17 AM	PHl3 MFC set to  0.000000
8/11/2011	11:31:17 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:31:17 AM	Tube furnace set to 0
8/11/2011	11:33:52 AM	Main Vac valve opened
8/11/2011	11:33:53 AM	Main Vac valve closed
8/11/2011	11:34:01 AM	Helium MFC set to  0.000000
8/11/2011	11:34:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	11:34:04 AM	Recipe started at 11:34 AM
8/11/2011	11:34:04 AM	Helium valve closed
8/11/2011	11:34:04 AM	H2 valve closed
8/11/2011	11:34:04 AM	BCl3 valve closed
8/11/2011	11:34:04 AM	PH3 valve closed
8/11/2011	11:34:04 AM	SiCl4 pre valve closed
8/11/2011	11:34:04 AM	SiCl4 post valve closed
8/11/2011	11:34:04 AM	Main Vac valve closed
8/11/2011	11:34:04 AM	Bypass valve closed
8/11/2011	11:34:04 AM	Bubbler valve closed
8/11/2011	11:34:04 AM	Helium MFC set to  0.000000
8/11/2011	11:34:04 AM	H2 MFC set to  0.000000
8/11/2011	11:34:04 AM	BCl3 MFC set to  0.000000
8/11/2011	11:34:04 AM	PHl3 MFC set to  0.000000
8/11/2011	11:34:04 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:34:04 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:34:04 AM	Tube furnace set to 0
8/11/2011	11:34:07 AM	H2 valve closed
8/11/2011	11:34:07 AM	BCl3 valve closed
8/11/2011	11:34:07 AM	PH3 valve closed
8/11/2011	11:34:07 AM	SiCl4 pre valve closed
8/11/2011	11:34:07 AM	SiCl4 post valve closed
8/11/2011	11:34:07 AM	Main Vac valve closed
8/11/2011	11:34:07 AM	Bypass valve closed
8/11/2011	11:34:07 AM	Bubbler valve closed
8/11/2011	11:34:07 AM	Helium valve opened
8/11/2011	11:34:07 AM	Helium MFC set to  500.000000
8/11/2011	11:34:07 AM	H2 MFC set to  0.000000
8/11/2011	11:34:07 AM	BCl3 MFC set to  0.000000
8/11/2011	11:34:07 AM	PHl3 MFC set to  0.000000
8/11/2011	11:34:07 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:34:07 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:34:07 AM	Tube furnace set to 0
8/11/2011	11:34:14 AM	Run aborted at 11:34 AM
8/11/2011	11:34:14 AM	Helium valve closed
8/11/2011	11:34:14 AM	H2 valve closed
8/11/2011	11:34:14 AM	BCl3 valve closed
8/11/2011	11:34:14 AM	PH3 valve closed
8/11/2011	11:34:14 AM	SiCl4 pre valve closed
8/11/2011	11:34:14 AM	SiCl4 post valve closed
8/11/2011	11:34:14 AM	Bypass valve closed
8/11/2011	11:34:14 AM	Main Vac valve closed
8/11/2011	11:34:14 AM	Bubbler valve closed
8/11/2011	11:34:14 AM	Helium MFC set to  0.000000
8/11/2011	11:34:14 AM	H2 MFC set to  0.000000
8/11/2011	11:34:14 AM	BCl3 MFC set to  0.000000
8/11/2011	11:34:14 AM	PHl3 MFC set to  0.000000
8/11/2011	11:34:14 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:34:14 AM	Tube furnace set to 0
8/11/2011	11:34:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	11:34:25 AM	Bypass valve opened
8/11/2011	11:35:47 AM	Bypass valve closed
8/11/2011	11:35:48 AM	Main Vac valve opened
8/11/2011	11:36:08 AM	Recipe started at 11:36 AM
8/11/2011	11:36:08 AM	Helium valve closed
8/11/2011	11:36:08 AM	H2 valve closed
8/11/2011	11:36:08 AM	BCl3 valve closed
8/11/2011	11:36:08 AM	PH3 valve closed
8/11/2011	11:36:08 AM	SiCl4 pre valve closed
8/11/2011	11:36:08 AM	SiCl4 post valve closed
8/11/2011	11:36:08 AM	Main Vac valve closed
8/11/2011	11:36:08 AM	Bubbler valve closed
8/11/2011	11:36:08 AM	Bypass valve opened
8/11/2011	11:36:08 AM	Helium MFC set to  0.000000
8/11/2011	11:36:08 AM	H2 MFC set to  0.000000
8/11/2011	11:36:08 AM	BCl3 MFC set to  0.000000
8/11/2011	11:36:08 AM	PHl3 MFC set to  0.000000
8/11/2011	11:36:08 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:36:08 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:36:08 AM	Tube furnace set to 0
8/11/2011	11:36:08 AM	Helium valve closed
8/11/2011	11:36:08 AM	H2 valve closed
8/11/2011	11:36:08 AM	BCl3 valve closed
8/11/2011	11:36:08 AM	PH3 valve closed
8/11/2011	11:36:08 AM	SiCl4 pre valve closed
8/11/2011	11:36:08 AM	SiCl4 post valve closed
8/11/2011	11:36:08 AM	Main Vac valve closed
8/11/2011	11:36:08 AM	Bubbler valve closed
8/11/2011	11:36:08 AM	Bypass valve opened
8/11/2011	11:36:08 AM	Helium MFC set to  0.000000
8/11/2011	11:36:08 AM	H2 MFC set to  0.000000
8/11/2011	11:36:08 AM	BCl3 MFC set to  0.000000
8/11/2011	11:36:08 AM	PHl3 MFC set to  0.000000
8/11/2011	11:36:08 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:36:08 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:36:08 AM	Tube furnace set to 0
8/11/2011	11:36:38 AM	Helium valve closed
8/11/2011	11:36:38 AM	H2 valve closed
8/11/2011	11:36:38 AM	BCl3 valve closed
8/11/2011	11:36:38 AM	PH3 valve closed
8/11/2011	11:36:38 AM	SiCl4 pre valve closed
8/11/2011	11:36:38 AM	SiCl4 post valve closed
8/11/2011	11:36:38 AM	Bypass valve closed
8/11/2011	11:36:38 AM	Bubbler valve closed
8/11/2011	11:36:38 AM	Main Vac valve opened
8/11/2011	11:36:38 AM	Helium MFC set to  0.000000
8/11/2011	11:36:38 AM	H2 MFC set to  0.000000
8/11/2011	11:36:38 AM	BCl3 MFC set to  0.000000
8/11/2011	11:36:39 AM	PHl3 MFC set to  0.000000
8/11/2011	11:36:39 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:36:39 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:36:39 AM	Tube furnace set to 0
8/11/2011	11:36:55 AM	Run aborted at 11:36 AM
8/11/2011	11:36:55 AM	Helium valve closed
8/11/2011	11:36:55 AM	H2 valve closed
8/11/2011	11:36:55 AM	BCl3 valve closed
8/11/2011	11:36:55 AM	PH3 valve closed
8/11/2011	11:36:55 AM	SiCl4 pre valve closed
8/11/2011	11:36:55 AM	SiCl4 post valve closed
8/11/2011	11:36:55 AM	Bypass valve closed
8/11/2011	11:36:55 AM	Main Vac valve closed
8/11/2011	11:36:55 AM	Bubbler valve closed
8/11/2011	11:36:55 AM	Helium MFC set to  0.000000
8/11/2011	11:36:55 AM	H2 MFC set to  0.000000
8/11/2011	11:36:55 AM	BCl3 MFC set to  0.000000
8/11/2011	11:36:55 AM	PHl3 MFC set to  0.000000
8/11/2011	11:36:55 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:36:55 AM	Tube furnace set to 0
8/11/2011	11:37:18 AM	Recipe started at 11:37 AM
8/11/2011	11:37:18 AM	Helium valve closed
8/11/2011	11:37:18 AM	H2 valve closed
8/11/2011	11:37:18 AM	BCl3 valve closed
8/11/2011	11:37:18 AM	PH3 valve closed
8/11/2011	11:37:18 AM	SiCl4 pre valve closed
8/11/2011	11:37:18 AM	SiCl4 post valve closed
8/11/2011	11:37:18 AM	Main Vac valve closed
8/11/2011	11:37:18 AM	Bubbler valve closed
8/11/2011	11:37:18 AM	Bypass valve opened
8/11/2011	11:37:18 AM	Helium MFC set to  0.000000
8/11/2011	11:37:18 AM	H2 MFC set to  0.000000
8/11/2011	11:37:18 AM	BCl3 MFC set to  0.000000
8/11/2011	11:37:18 AM	PHl3 MFC set to  0.000000
8/11/2011	11:37:18 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:37:18 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:37:19 AM	Tube furnace set to 0
8/11/2011	11:37:19 AM	Helium valve closed
8/11/2011	11:37:19 AM	H2 valve closed
8/11/2011	11:37:19 AM	BCl3 valve closed
8/11/2011	11:37:19 AM	PH3 valve closed
8/11/2011	11:37:19 AM	SiCl4 pre valve closed
8/11/2011	11:37:19 AM	SiCl4 post valve closed
8/11/2011	11:37:19 AM	Main Vac valve closed
8/11/2011	11:37:19 AM	Bubbler valve closed
8/11/2011	11:37:19 AM	Bypass valve opened
8/11/2011	11:37:19 AM	Helium MFC set to  0.000000
8/11/2011	11:37:19 AM	H2 MFC set to  0.000000
8/11/2011	11:37:19 AM	BCl3 MFC set to  0.000000
8/11/2011	11:37:19 AM	PHl3 MFC set to  0.000000
8/11/2011	11:37:19 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:37:19 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:37:19 AM	Tube furnace set to 0
8/11/2011	11:37:20 AM	Helium valve closed
8/11/2011	11:37:20 AM	H2 valve closed
8/11/2011	11:37:20 AM	BCl3 valve closed
8/11/2011	11:37:20 AM	PH3 valve closed
8/11/2011	11:37:20 AM	SiCl4 pre valve closed
8/11/2011	11:37:20 AM	SiCl4 post valve closed
8/11/2011	11:37:20 AM	Bypass valve closed
8/11/2011	11:37:20 AM	Bubbler valve closed
8/11/2011	11:37:20 AM	Main Vac valve opened
8/11/2011	11:37:20 AM	Helium MFC set to  0.000000
8/11/2011	11:37:20 AM	H2 MFC set to  0.000000
8/11/2011	11:37:20 AM	BCl3 MFC set to  0.000000
8/11/2011	11:37:20 AM	PHl3 MFC set to  0.000000
8/11/2011	11:37:20 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:37:20 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:37:20 AM	Tube furnace set to 0
8/11/2011	11:37:23 AM	H2 valve closed
8/11/2011	11:37:23 AM	BCl3 valve closed
8/11/2011	11:37:23 AM	PH3 valve closed
8/11/2011	11:37:23 AM	SiCl4 pre valve closed
8/11/2011	11:37:23 AM	SiCl4 post valve closed
8/11/2011	11:37:23 AM	Bypass valve closed
8/11/2011	11:37:23 AM	Bubbler valve closed
8/11/2011	11:37:23 AM	Helium valve opened
8/11/2011	11:37:23 AM	Main Vac valve opened
8/11/2011	11:37:23 AM	Helium MFC set to  20.000000
8/11/2011	11:37:23 AM	H2 MFC set to  0.000000
8/11/2011	11:37:23 AM	BCl3 MFC set to  0.000000
8/11/2011	11:37:23 AM	PHl3 MFC set to  0.000000
8/11/2011	11:37:23 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:37:23 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:37:23 AM	Tube furnace set to 0
8/11/2011	11:37:53 AM	Helium valve closed
8/11/2011	11:37:53 AM	H2 valve closed
8/11/2011	11:37:53 AM	BCl3 valve closed
8/11/2011	11:37:53 AM	PH3 valve closed
8/11/2011	11:37:53 AM	SiCl4 pre valve closed
8/11/2011	11:37:53 AM	SiCl4 post valve closed
8/11/2011	11:37:53 AM	Bypass valve closed
8/11/2011	11:37:53 AM	Bubbler valve closed
8/11/2011	11:37:53 AM	Main Vac valve opened
8/11/2011	11:37:53 AM	Helium MFC set to  0.000000
8/11/2011	11:37:53 AM	H2 MFC set to  0.000000
8/11/2011	11:37:53 AM	BCl3 MFC set to  0.000000
8/11/2011	11:37:53 AM	PHl3 MFC set to  0.000000
8/11/2011	11:37:53 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:37:53 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:37:53 AM	Tube furnace set to 0
8/11/2011	11:38:23 AM	H2 valve closed
8/11/2011	11:38:23 AM	BCl3 valve closed
8/11/2011	11:38:23 AM	PH3 valve closed
8/11/2011	11:38:23 AM	SiCl4 pre valve closed
8/11/2011	11:38:23 AM	SiCl4 post valve closed
8/11/2011	11:38:23 AM	Bypass valve closed
8/11/2011	11:38:23 AM	Bubbler valve closed
8/11/2011	11:38:23 AM	Helium valve opened
8/11/2011	11:38:23 AM	Main Vac valve opened
8/11/2011	11:38:23 AM	Helium MFC set to  20.000000
8/11/2011	11:38:23 AM	H2 MFC set to  0.000000
8/11/2011	11:38:23 AM	BCl3 MFC set to  0.000000
8/11/2011	11:38:23 AM	PHl3 MFC set to  0.000000
8/11/2011	11:38:23 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:38:23 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:38:24 AM	Tube furnace set to 0
8/11/2011	11:38:54 AM	Helium valve closed
8/11/2011	11:38:54 AM	H2 valve closed
8/11/2011	11:38:54 AM	BCl3 valve closed
8/11/2011	11:38:54 AM	PH3 valve closed
8/11/2011	11:38:54 AM	SiCl4 pre valve closed
8/11/2011	11:38:54 AM	SiCl4 post valve closed
8/11/2011	11:38:54 AM	Bypass valve closed
8/11/2011	11:38:54 AM	Bubbler valve closed
8/11/2011	11:38:54 AM	Main Vac valve opened
8/11/2011	11:38:54 AM	Helium MFC set to  0.000000
8/11/2011	11:38:54 AM	H2 MFC set to  0.000000
8/11/2011	11:38:54 AM	BCl3 MFC set to  0.000000
8/11/2011	11:38:54 AM	PHl3 MFC set to  0.000000
8/11/2011	11:38:54 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:38:54 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:38:54 AM	Tube furnace set to 0
8/11/2011	11:39:24 AM	H2 valve closed
8/11/2011	11:39:24 AM	BCl3 valve closed
8/11/2011	11:39:24 AM	PH3 valve closed
8/11/2011	11:39:24 AM	SiCl4 pre valve closed
8/11/2011	11:39:24 AM	SiCl4 post valve closed
8/11/2011	11:39:24 AM	Bypass valve closed
8/11/2011	11:39:24 AM	Bubbler valve closed
8/11/2011	11:39:24 AM	Helium valve opened
8/11/2011	11:39:24 AM	Main Vac valve opened
8/11/2011	11:39:24 AM	Helium MFC set to  20.000000
8/11/2011	11:39:24 AM	H2 MFC set to  0.000000
8/11/2011	11:39:24 AM	BCl3 MFC set to  0.000000
8/11/2011	11:39:24 AM	PHl3 MFC set to  0.000000
8/11/2011	11:39:24 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:39:24 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:39:24 AM	Tube furnace set to 0
8/11/2011	11:39:54 AM	Helium valve closed
8/11/2011	11:39:54 AM	H2 valve closed
8/11/2011	11:39:54 AM	BCl3 valve closed
8/11/2011	11:39:54 AM	PH3 valve closed
8/11/2011	11:39:54 AM	SiCl4 pre valve closed
8/11/2011	11:39:54 AM	SiCl4 post valve closed
8/11/2011	11:39:54 AM	Bypass valve closed
8/11/2011	11:39:54 AM	Bubbler valve closed
8/11/2011	11:39:54 AM	Main Vac valve opened
8/11/2011	11:39:54 AM	Helium MFC set to  0.000000
8/11/2011	11:39:54 AM	H2 MFC set to  0.000000
8/11/2011	11:39:54 AM	BCl3 MFC set to  0.000000
8/11/2011	11:39:54 AM	PHl3 MFC set to  0.000000
8/11/2011	11:39:54 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:39:54 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:39:54 AM	Tube furnace set to 0
8/11/2011	11:40:24 AM	H2 valve closed
8/11/2011	11:40:24 AM	BCl3 valve closed
8/11/2011	11:40:24 AM	PH3 valve closed
8/11/2011	11:40:24 AM	SiCl4 pre valve closed
8/11/2011	11:40:24 AM	SiCl4 post valve closed
8/11/2011	11:40:24 AM	Bypass valve closed
8/11/2011	11:40:24 AM	Bubbler valve closed
8/11/2011	11:40:24 AM	Helium valve opened
8/11/2011	11:40:24 AM	Main Vac valve opened
8/11/2011	11:40:24 AM	Helium MFC set to  20.000000
8/11/2011	11:40:24 AM	H2 MFC set to  0.000000
8/11/2011	11:40:24 AM	BCl3 MFC set to  0.000000
8/11/2011	11:40:24 AM	PHl3 MFC set to  0.000000
8/11/2011	11:40:24 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:40:24 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:40:24 AM	Tube furnace set to 0
8/11/2011	11:40:54 AM	Helium valve closed
8/11/2011	11:40:54 AM	H2 valve closed
8/11/2011	11:40:54 AM	BCl3 valve closed
8/11/2011	11:40:54 AM	PH3 valve closed
8/11/2011	11:40:54 AM	SiCl4 pre valve closed
8/11/2011	11:40:54 AM	SiCl4 post valve closed
8/11/2011	11:40:54 AM	Bypass valve closed
8/11/2011	11:40:54 AM	Bubbler valve closed
8/11/2011	11:40:54 AM	Main Vac valve opened
8/11/2011	11:40:54 AM	Helium MFC set to  0.000000
8/11/2011	11:40:54 AM	H2 MFC set to  0.000000
8/11/2011	11:40:54 AM	BCl3 MFC set to  0.000000
8/11/2011	11:40:54 AM	PHl3 MFC set to  0.000000
8/11/2011	11:40:54 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:40:54 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:40:55 AM	Tube furnace set to 0
8/11/2011	11:41:25 AM	H2 valve closed
8/11/2011	11:41:25 AM	BCl3 valve closed
8/11/2011	11:41:25 AM	PH3 valve closed
8/11/2011	11:41:25 AM	SiCl4 pre valve closed
8/11/2011	11:41:25 AM	SiCl4 post valve closed
8/11/2011	11:41:25 AM	Bypass valve closed
8/11/2011	11:41:25 AM	Bubbler valve closed
8/11/2011	11:41:25 AM	Helium valve opened
8/11/2011	11:41:25 AM	Main Vac valve opened
8/11/2011	11:41:25 AM	Helium MFC set to  20.000000
8/11/2011	11:41:25 AM	H2 MFC set to  0.000000
8/11/2011	11:41:25 AM	BCl3 MFC set to  0.000000
8/11/2011	11:41:25 AM	PHl3 MFC set to  0.000000
8/11/2011	11:41:25 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:41:25 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:41:25 AM	Tube furnace set to 0
8/11/2011	11:41:55 AM	Helium valve closed
8/11/2011	11:41:55 AM	H2 valve closed
8/11/2011	11:41:55 AM	BCl3 valve closed
8/11/2011	11:41:55 AM	PH3 valve closed
8/11/2011	11:41:55 AM	SiCl4 pre valve closed
8/11/2011	11:41:55 AM	SiCl4 post valve closed
8/11/2011	11:41:55 AM	Bypass valve closed
8/11/2011	11:41:55 AM	Bubbler valve closed
8/11/2011	11:41:55 AM	Main Vac valve opened
8/11/2011	11:41:55 AM	Helium MFC set to  0.000000
8/11/2011	11:41:55 AM	H2 MFC set to  0.000000
8/11/2011	11:41:55 AM	BCl3 MFC set to  0.000000
8/11/2011	11:41:55 AM	PHl3 MFC set to  0.000000
8/11/2011	11:41:55 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:41:55 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:41:55 AM	Tube furnace set to 0
8/11/2011	11:42:25 AM	H2 valve closed
8/11/2011	11:42:25 AM	BCl3 valve closed
8/11/2011	11:42:25 AM	PH3 valve closed
8/11/2011	11:42:25 AM	SiCl4 pre valve closed
8/11/2011	11:42:25 AM	SiCl4 post valve closed
8/11/2011	11:42:25 AM	Bypass valve closed
8/11/2011	11:42:25 AM	Bubbler valve closed
8/11/2011	11:42:25 AM	Helium valve opened
8/11/2011	11:42:25 AM	Main Vac valve opened
8/11/2011	11:42:25 AM	Helium MFC set to  20.000000
8/11/2011	11:42:25 AM	H2 MFC set to  0.000000
8/11/2011	11:42:25 AM	BCl3 MFC set to  0.000000
8/11/2011	11:42:25 AM	PHl3 MFC set to  0.000000
8/11/2011	11:42:25 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:42:25 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:42:25 AM	Tube furnace set to 0
8/11/2011	11:42:55 AM	Helium valve closed
8/11/2011	11:42:55 AM	H2 valve closed
8/11/2011	11:42:55 AM	BCl3 valve closed
8/11/2011	11:42:55 AM	PH3 valve closed
8/11/2011	11:42:55 AM	SiCl4 pre valve closed
8/11/2011	11:42:55 AM	SiCl4 post valve closed
8/11/2011	11:42:55 AM	Bypass valve closed
8/11/2011	11:42:55 AM	Bubbler valve closed
8/11/2011	11:42:55 AM	Main Vac valve opened
8/11/2011	11:42:55 AM	Helium MFC set to  0.000000
8/11/2011	11:42:55 AM	H2 MFC set to  0.000000
8/11/2011	11:42:55 AM	BCl3 MFC set to  0.000000
8/11/2011	11:42:55 AM	PHl3 MFC set to  0.000000
8/11/2011	11:42:55 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:42:55 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:42:55 AM	Tube furnace set to 0
8/11/2011	11:43:25 AM	H2 valve closed
8/11/2011	11:43:25 AM	BCl3 valve closed
8/11/2011	11:43:25 AM	PH3 valve closed
8/11/2011	11:43:25 AM	SiCl4 pre valve closed
8/11/2011	11:43:25 AM	SiCl4 post valve closed
8/11/2011	11:43:25 AM	Bypass valve closed
8/11/2011	11:43:25 AM	Bubbler valve closed
8/11/2011	11:43:25 AM	Helium valve opened
8/11/2011	11:43:25 AM	Main Vac valve opened
8/11/2011	11:43:25 AM	Helium MFC set to  20.000000
8/11/2011	11:43:25 AM	H2 MFC set to  0.000000
8/11/2011	11:43:25 AM	BCl3 MFC set to  0.000000
8/11/2011	11:43:25 AM	PHl3 MFC set to  0.000000
8/11/2011	11:43:25 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:43:25 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:43:26 AM	Tube furnace set to 0
8/11/2011	11:43:56 AM	Helium valve closed
8/11/2011	11:43:56 AM	H2 valve closed
8/11/2011	11:43:56 AM	BCl3 valve closed
8/11/2011	11:43:56 AM	PH3 valve closed
8/11/2011	11:43:56 AM	SiCl4 pre valve closed
8/11/2011	11:43:56 AM	SiCl4 post valve closed
8/11/2011	11:43:56 AM	Bypass valve closed
8/11/2011	11:43:56 AM	Bubbler valve closed
8/11/2011	11:43:56 AM	Main Vac valve opened
8/11/2011	11:43:56 AM	Helium MFC set to  0.000000
8/11/2011	11:43:56 AM	H2 MFC set to  0.000000
8/11/2011	11:43:56 AM	BCl3 MFC set to  0.000000
8/11/2011	11:43:56 AM	PHl3 MFC set to  0.000000
8/11/2011	11:43:56 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:43:56 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:43:56 AM	Tube furnace set to 0
8/11/2011	11:44:26 AM	H2 valve closed
8/11/2011	11:44:26 AM	BCl3 valve closed
8/11/2011	11:44:26 AM	PH3 valve closed
8/11/2011	11:44:26 AM	SiCl4 pre valve closed
8/11/2011	11:44:26 AM	SiCl4 post valve closed
8/11/2011	11:44:26 AM	Bypass valve closed
8/11/2011	11:44:26 AM	Bubbler valve closed
8/11/2011	11:44:26 AM	Helium valve opened
8/11/2011	11:44:26 AM	Main Vac valve opened
8/11/2011	11:44:26 AM	Helium MFC set to  20.000000
8/11/2011	11:44:26 AM	H2 MFC set to  0.000000
8/11/2011	11:44:26 AM	BCl3 MFC set to  0.000000
8/11/2011	11:44:26 AM	PHl3 MFC set to  0.000000
8/11/2011	11:44:26 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:44:26 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:44:26 AM	Tube furnace set to 0
8/11/2011	11:44:56 AM	Helium valve closed
8/11/2011	11:44:56 AM	H2 valve closed
8/11/2011	11:44:56 AM	BCl3 valve closed
8/11/2011	11:44:56 AM	PH3 valve closed
8/11/2011	11:44:56 AM	SiCl4 pre valve closed
8/11/2011	11:44:56 AM	SiCl4 post valve closed
8/11/2011	11:44:56 AM	Bypass valve closed
8/11/2011	11:44:56 AM	Bubbler valve closed
8/11/2011	11:44:56 AM	Main Vac valve opened
8/11/2011	11:44:56 AM	Helium MFC set to  0.000000
8/11/2011	11:44:56 AM	H2 MFC set to  0.000000
8/11/2011	11:44:56 AM	BCl3 MFC set to  0.000000
8/11/2011	11:44:56 AM	PHl3 MFC set to  0.000000
8/11/2011	11:44:56 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:44:56 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:44:56 AM	Tube furnace set to 0
8/11/2011	11:45:26 AM	H2 valve closed
8/11/2011	11:45:26 AM	BCl3 valve closed
8/11/2011	11:45:26 AM	PH3 valve closed
8/11/2011	11:45:26 AM	SiCl4 pre valve closed
8/11/2011	11:45:26 AM	SiCl4 post valve closed
8/11/2011	11:45:26 AM	Bypass valve closed
8/11/2011	11:45:26 AM	Bubbler valve closed
8/11/2011	11:45:26 AM	Helium valve opened
8/11/2011	11:45:26 AM	Main Vac valve opened
8/11/2011	11:45:26 AM	Helium MFC set to  20.000000
8/11/2011	11:45:26 AM	H2 MFC set to  0.000000
8/11/2011	11:45:26 AM	BCl3 MFC set to  0.000000
8/11/2011	11:45:26 AM	PHl3 MFC set to  0.000000
8/11/2011	11:45:26 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:45:26 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:45:26 AM	Tube furnace set to 0
8/11/2011	11:45:56 AM	Helium valve closed
8/11/2011	11:45:56 AM	H2 valve closed
8/11/2011	11:45:56 AM	BCl3 valve closed
8/11/2011	11:45:56 AM	PH3 valve closed
8/11/2011	11:45:56 AM	SiCl4 pre valve closed
8/11/2011	11:45:56 AM	SiCl4 post valve closed
8/11/2011	11:45:56 AM	Bypass valve closed
8/11/2011	11:45:56 AM	Bubbler valve closed
8/11/2011	11:45:56 AM	Main Vac valve opened
8/11/2011	11:45:56 AM	Helium MFC set to  0.000000
8/11/2011	11:45:56 AM	H2 MFC set to  0.000000
8/11/2011	11:45:56 AM	BCl3 MFC set to  0.000000
8/11/2011	11:45:56 AM	PHl3 MFC set to  0.000000
8/11/2011	11:45:56 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:45:56 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:45:57 AM	Tube furnace set to 0
8/11/2011	11:46:27 AM	H2 valve closed
8/11/2011	11:46:27 AM	BCl3 valve closed
8/11/2011	11:46:27 AM	PH3 valve closed
8/11/2011	11:46:27 AM	SiCl4 pre valve closed
8/11/2011	11:46:27 AM	SiCl4 post valve closed
8/11/2011	11:46:27 AM	Bypass valve closed
8/11/2011	11:46:27 AM	Bubbler valve closed
8/11/2011	11:46:27 AM	Helium valve opened
8/11/2011	11:46:27 AM	Main Vac valve opened
8/11/2011	11:46:27 AM	Helium MFC set to  20.000000
8/11/2011	11:46:27 AM	H2 MFC set to  0.000000
8/11/2011	11:46:27 AM	BCl3 MFC set to  0.000000
8/11/2011	11:46:27 AM	PHl3 MFC set to  0.000000
8/11/2011	11:46:27 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:46:27 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:46:27 AM	Tube furnace set to 0
8/11/2011	11:46:57 AM	Helium valve closed
8/11/2011	11:46:57 AM	H2 valve closed
8/11/2011	11:46:57 AM	BCl3 valve closed
8/11/2011	11:46:57 AM	PH3 valve closed
8/11/2011	11:46:57 AM	SiCl4 pre valve closed
8/11/2011	11:46:57 AM	SiCl4 post valve closed
8/11/2011	11:46:57 AM	Bypass valve closed
8/11/2011	11:46:57 AM	Bubbler valve closed
8/11/2011	11:46:57 AM	Main Vac valve opened
8/11/2011	11:46:57 AM	Helium MFC set to  0.000000
8/11/2011	11:46:57 AM	H2 MFC set to  0.000000
8/11/2011	11:46:57 AM	BCl3 MFC set to  0.000000
8/11/2011	11:46:57 AM	PHl3 MFC set to  0.000000
8/11/2011	11:46:57 AM	SiCl4 MFC set to  0.000000
8/11/2011	11:46:57 AM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:46:57 AM	Tube furnace set to 0
8/11/2011	11:46:58 AM	Run finished at 11:46 AM
8/11/2011	11:59:18 AM	Main Vac valve closed
8/11/2011	11:59:29 AM	Main Vac valve opened
8/11/2011	11:59:29 AM	Main Vac valve closed
8/11/2011	11:59:30 AM	Main Vac valve opened
8/11/2011	12:00:21 PM	Recipe started at 12:00 PM
8/11/2011	12:00:21 PM	Helium valve closed
8/11/2011	12:00:21 PM	H2 valve closed
8/11/2011	12:00:21 PM	BCl3 valve closed
8/11/2011	12:00:21 PM	PH3 valve closed
8/11/2011	12:00:21 PM	SiCl4 pre valve closed
8/11/2011	12:00:21 PM	SiCl4 post valve closed
8/11/2011	12:00:21 PM	Main Vac valve closed
8/11/2011	12:00:21 PM	Bypass valve closed
8/11/2011	12:00:21 PM	Bubbler valve closed
8/11/2011	12:00:21 PM	Helium MFC set to  0.000000
8/11/2011	12:00:21 PM	H2 MFC set to  0.000000
8/11/2011	12:00:21 PM	BCl3 MFC set to  0.000000
8/11/2011	12:00:21 PM	PHl3 MFC set to  0.000000
8/11/2011	12:00:21 PM	SiCl4 MFC set to  0.000000
8/11/2011	12:00:21 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:00:21 PM	Tube furnace set to 0
8/11/2011	12:00:24 PM	Helium valve closed
8/11/2011	12:00:24 PM	BCl3 valve closed
8/11/2011	12:00:24 PM	PH3 valve closed
8/11/2011	12:00:24 PM	SiCl4 pre valve closed
8/11/2011	12:00:24 PM	SiCl4 post valve closed
8/11/2011	12:00:24 PM	Main Vac valve closed
8/11/2011	12:00:24 PM	Bypass valve closed
8/11/2011	12:00:24 PM	Bubbler valve closed
8/11/2011	12:00:24 PM	H2 valve opened
8/11/2011	12:00:24 PM	Helium MFC set to  0.000000
8/11/2011	12:00:24 PM	H2 MFC set to  500.000000
8/11/2011	12:00:24 PM	BCl3 MFC set to  0.000000
8/11/2011	12:00:24 PM	PHl3 MFC set to  0.000000
8/11/2011	12:00:24 PM	SiCl4 MFC set to  0.000000
8/11/2011	12:00:24 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:00:24 PM	Tube furnace set to 0
8/11/2011	12:01:29 PM	Helium valve closed
8/11/2011	12:01:29 PM	BCl3 valve closed
8/11/2011	12:01:29 PM	PH3 valve closed
8/11/2011	12:01:29 PM	SiCl4 pre valve closed
8/11/2011	12:01:29 PM	SiCl4 post valve closed
8/11/2011	12:01:29 PM	Main Vac valve closed
8/11/2011	12:01:29 PM	Bypass valve closed
8/11/2011	12:01:29 PM	H2 valve opened
8/11/2011	12:01:29 PM	Bubbler valve opened
8/11/2011	12:01:29 PM	Helium MFC set to  0.000000
8/11/2011	12:01:29 PM	H2 MFC set to  500.000000
8/11/2011	12:01:29 PM	BCl3 MFC set to  0.000000
8/11/2011	12:01:29 PM	PHl3 MFC set to  0.000000
8/11/2011	12:01:29 PM	SiCl4 MFC set to  0.000000
8/11/2011	12:01:29 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:01:29 PM	Tube furnace set to 0
8/11/2011	12:01:30 PM	Helium valve closed
8/11/2011	12:01:30 PM	BCl3 valve closed
8/11/2011	12:01:30 PM	PH3 valve closed
8/11/2011	12:01:30 PM	SiCl4 pre valve closed
8/11/2011	12:01:30 PM	SiCl4 post valve closed
8/11/2011	12:01:30 PM	Main Vac valve closed
8/11/2011	12:01:30 PM	Bypass valve closed
8/11/2011	12:01:30 PM	H2 valve opened
8/11/2011	12:01:30 PM	Bubbler valve opened
8/11/2011	12:01:30 PM	Helium MFC set to  0.000000
8/11/2011	12:01:30 PM	H2 MFC set to  500.000000
8/11/2011	12:01:30 PM	BCl3 MFC set to  0.000000
8/11/2011	12:01:30 PM	PHl3 MFC set to  0.000000
8/11/2011	12:01:30 PM	SiCl4 MFC set to  0.000000
8/11/2011	12:01:30 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:01:30 PM	Tube furnace set to 1000
8/11/2011	12:21:30 PM	Helium valve closed
8/11/2011	12:21:30 PM	BCl3 valve closed
8/11/2011	12:21:30 PM	PH3 valve closed
8/11/2011	12:21:30 PM	SiCl4 pre valve closed
8/11/2011	12:21:30 PM	SiCl4 post valve closed
8/11/2011	12:21:30 PM	Main Vac valve closed
8/11/2011	12:21:30 PM	Bypass valve closed
8/11/2011	12:21:30 PM	H2 valve opened
8/11/2011	12:21:30 PM	Bubbler valve opened
8/11/2011	12:21:30 PM	Helium MFC set to  0.000000
8/11/2011	12:21:30 PM	H2 MFC set to  500.000000
8/11/2011	12:21:30 PM	BCl3 MFC set to  0.000000
8/11/2011	12:21:30 PM	PHl3 MFC set to  0.000000
8/11/2011	12:21:30 PM	SiCl4 MFC set to  0.000000
8/11/2011	12:21:30 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:21:30 PM	Tube furnace set to 1000
8/11/2011	12:31:30 PM	Helium valve closed
8/11/2011	12:31:30 PM	PH3 valve closed
8/11/2011	12:31:30 PM	Main Vac valve closed
8/11/2011	12:31:30 PM	Bypass valve closed
8/11/2011	12:31:30 PM	H2 valve opened
8/11/2011	12:31:30 PM	BCl3 valve opened
8/11/2011	12:31:30 PM	SiCl4 pre valve opened
8/11/2011	12:31:30 PM	SiCl4 post valve opened
8/11/2011	12:31:30 PM	Bubbler valve opened
8/11/2011	12:31:30 PM	Helium MFC set to  0.000000
8/11/2011	12:31:30 PM	H2 MFC set to  500.000000
8/11/2011	12:31:30 PM	BCl3 MFC set to  2.500000
8/11/2011	12:31:30 PM	PHl3 MFC set to  0.000000
8/11/2011	12:31:30 PM	SiCl4 MFC set to  50.000000
8/11/2011	12:31:30 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:31:31 PM	Tube furnace set to 1000
8/11/2011	12:44:00 PM	Helium valve closed
8/11/2011	12:44:00 PM	BCl3 valve closed
8/11/2011	12:44:00 PM	PH3 valve closed
8/11/2011	12:44:01 PM	SiCl4 pre valve closed
8/11/2011	12:44:01 PM	SiCl4 post valve closed
8/11/2011	12:44:01 PM	Main Vac valve closed
8/11/2011	12:44:01 PM	Bypass valve closed
8/11/2011	12:44:01 PM	H2 valve opened
8/11/2011	12:44:01 PM	Bubbler valve opened
8/11/2011	12:44:01 PM	Helium MFC set to  0.000000
8/11/2011	12:44:01 PM	H2 MFC set to  500.000000
8/11/2011	12:44:01 PM	BCl3 MFC set to  0.000000
8/11/2011	12:44:01 PM	PHl3 MFC set to  0.000000
8/11/2011	12:44:01 PM	SiCl4 MFC set to  0.000000
8/11/2011	12:44:01 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:44:01 PM	Tube furnace set to 750
8/11/2011	12:49:01 PM	H2 valve closed
8/11/2011	12:49:01 PM	BCl3 valve closed
8/11/2011	12:49:01 PM	PH3 valve closed
8/11/2011	12:49:01 PM	SiCl4 pre valve closed
8/11/2011	12:49:01 PM	SiCl4 post valve closed
8/11/2011	12:49:01 PM	Main Vac valve closed
8/11/2011	12:49:01 PM	Bypass valve closed
8/11/2011	12:49:01 PM	Helium valve opened
8/11/2011	12:49:01 PM	Bubbler valve opened
8/11/2011	12:49:01 PM	Helium MFC set to  500.000000
8/11/2011	12:49:01 PM	H2 MFC set to  0.000000
8/11/2011	12:49:01 PM	BCl3 MFC set to  0.000000
8/11/2011	12:49:01 PM	PHl3 MFC set to  0.000000
8/11/2011	12:49:01 PM	SiCl4 MFC set to  0.000000
8/11/2011	12:49:01 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	12:49:01 PM	Tube furnace set to 0
8/11/2011	1:09:01 PM	Helium valve closed
8/11/2011	1:09:01 PM	H2 valve closed
8/11/2011	1:09:01 PM	BCl3 valve closed
8/11/2011	1:09:01 PM	PH3 valve closed
8/11/2011	1:09:01 PM	SiCl4 pre valve closed
8/11/2011	1:09:01 PM	SiCl4 post valve closed
8/11/2011	1:09:01 PM	Main Vac valve closed
8/11/2011	1:09:01 PM	Bypass valve closed
8/11/2011	1:09:01 PM	Bubbler valve closed
8/11/2011	1:09:01 PM	Helium MFC set to  0.000000
8/11/2011	1:09:01 PM	H2 MFC set to  0.000000
8/11/2011	1:09:01 PM	BCl3 MFC set to  0.000000
8/11/2011	1:09:01 PM	PHl3 MFC set to  0.000000
8/11/2011	1:09:01 PM	SiCl4 MFC set to  0.000000
8/11/2011	1:09:01 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	1:09:01 PM	Tube furnace set to 0
8/11/2011	1:09:02 PM	Run finished at 1:09 PM
8/11/2011	1:33:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	1:33:01 PM	Recipe started at 1:33 PM
8/11/2011	1:33:01 PM	Helium valve closed
8/11/2011	1:33:01 PM	H2 valve closed
8/11/2011	1:33:01 PM	BCl3 valve closed
8/11/2011	1:33:01 PM	PH3 valve closed
8/11/2011	1:33:01 PM	SiCl4 pre valve closed
8/11/2011	1:33:01 PM	SiCl4 post valve closed
8/11/2011	1:33:01 PM	Main Vac valve closed
8/11/2011	1:33:01 PM	Bypass valve closed
8/11/2011	1:33:01 PM	Bubbler valve closed
8/11/2011	1:33:01 PM	Helium MFC set to  0.000000
8/11/2011	1:33:01 PM	H2 MFC set to  0.000000
8/11/2011	1:33:01 PM	BCl3 MFC set to  0.000000
8/11/2011	1:33:01 PM	PHl3 MFC set to  0.000000
8/11/2011	1:33:01 PM	SiCl4 MFC set to  0.000000
8/11/2011	1:33:01 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	1:33:02 PM	Tube furnace set to 0
8/11/2011	1:33:05 PM	H2 valve closed
8/11/2011	1:33:05 PM	BCl3 valve closed
8/11/2011	1:33:05 PM	PH3 valve closed
8/11/2011	1:33:05 PM	SiCl4 pre valve closed
8/11/2011	1:33:05 PM	SiCl4 post valve closed
8/11/2011	1:33:05 PM	Main Vac valve closed
8/11/2011	1:33:05 PM	Bypass valve closed
8/11/2011	1:33:05 PM	Bubbler valve closed
8/11/2011	1:33:05 PM	Helium valve opened
8/11/2011	1:33:05 PM	Helium MFC set to  500.000000
8/11/2011	1:33:05 PM	H2 MFC set to  0.000000
8/11/2011	1:33:05 PM	BCl3 MFC set to  0.000000
8/11/2011	1:33:05 PM	PHl3 MFC set to  0.000000
8/11/2011	1:33:05 PM	SiCl4 MFC set to  0.000000
8/11/2011	1:33:05 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	1:33:05 PM	Tube furnace set to 0
8/11/2011	1:33:11 PM	Helium valve closed
8/11/2011	1:33:11 PM	H2 valve closed
8/11/2011	1:33:11 PM	BCl3 valve closed
8/11/2011	1:33:11 PM	PH3 valve closed
8/11/2011	1:33:11 PM	SiCl4 pre valve closed
8/11/2011	1:33:11 PM	SiCl4 post valve closed
8/11/2011	1:33:11 PM	Main Vac valve closed
8/11/2011	1:33:11 PM	Bypass valve closed
8/11/2011	1:33:11 PM	Bubbler valve closed
8/11/2011	1:33:11 PM	Helium MFC set to  0.000000
8/11/2011	1:33:11 PM	H2 MFC set to  0.000000
8/11/2011	1:33:11 PM	BCl3 MFC set to  0.000000
8/11/2011	1:33:11 PM	PHl3 MFC set to  0.000000
8/11/2011	1:33:11 PM	SiCl4 MFC set to  0.000000
8/11/2011	1:33:11 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	1:33:11 PM	Tube furnace set to 0
8/11/2011	1:33:12 PM	Run finished at 1:33 PM
8/11/2011	1:33:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	1:36:57 PM	Recipe started at 1:36 PM
8/11/2011	1:36:57 PM	Helium valve closed
8/11/2011	1:36:57 PM	H2 valve closed
8/11/2011	1:36:57 PM	BCl3 valve closed
8/11/2011	1:36:57 PM	PH3 valve closed
8/11/2011	1:36:57 PM	SiCl4 pre valve closed
8/11/2011	1:36:57 PM	SiCl4 post valve closed
8/11/2011	1:36:57 PM	Main Vac valve closed
8/11/2011	1:36:57 PM	Bubbler valve closed
8/11/2011	1:36:57 PM	Bypass valve opened
8/11/2011	1:36:57 PM	Helium MFC set to  0.000000
8/11/2011	1:36:57 PM	H2 MFC set to  0.000000
8/11/2011	1:36:57 PM	BCl3 MFC set to  0.000000
8/11/2011	1:36:57 PM	PHl3 MFC set to  0.000000
8/11/2011	1:36:57 PM	SiCl4 MFC set to  0.000000
8/11/2011	1:36:57 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	1:36:58 PM	Tube furnace set to 0
8/11/2011	1:38:02 PM	Helium valve closed
8/11/2011	1:38:02 PM	H2 valve closed
8/11/2011	1:38:02 PM	BCl3 valve closed
8/11/2011	1:38:02 PM	PH3 valve closed
8/11/2011	1:38:02 PM	SiCl4 pre valve closed
8/11/2011	1:38:02 PM	SiCl4 post valve closed
8/11/2011	1:38:02 PM	Main Vac valve closed
8/11/2011	1:38:02 PM	Bubbler valve closed
8/11/2011	1:38:02 PM	Bypass valve opened
8/11/2011	1:38:02 PM	Helium MFC set to  0.000000
8/11/2011	1:38:02 PM	H2 MFC set to  0.000000
8/11/2011	1:38:02 PM	BCl3 MFC set to  0.000000
8/11/2011	1:38:02 PM	PHl3 MFC set to  0.000000
8/11/2011	1:38:02 PM	SiCl4 MFC set to  0.000000
8/11/2011	1:38:02 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	1:38:02 PM	Tube furnace set to 0
8/11/2011	1:38:32 PM	Helium valve closed
8/11/2011	1:38:32 PM	H2 valve closed
8/11/2011	1:38:32 PM	BCl3 valve closed
8/11/2011	1:38:32 PM	PH3 valve closed
8/11/2011	1:38:32 PM	SiCl4 pre valve closed
8/11/2011	1:38:32 PM	SiCl4 post valve closed
8/11/2011	1:38:32 PM	Bypass valve closed
8/11/2011	1:38:32 PM	Bubbler valve closed
8/11/2011	1:38:32 PM	Main Vac valve opened
8/11/2011	1:38:32 PM	Helium MFC set to  0.000000
8/11/2011	1:38:32 PM	H2 MFC set to  0.000000
8/11/2011	1:38:32 PM	BCl3 MFC set to  0.000000
8/11/2011	1:38:32 PM	PHl3 MFC set to  0.000000
8/11/2011	1:38:32 PM	SiCl4 MFC set to  0.000000
8/11/2011	1:38:32 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	1:38:32 PM	Tube furnace set to 0
8/11/2011	2:08:33 PM	H2 valve closed
8/11/2011	2:08:33 PM	BCl3 valve closed
8/11/2011	2:08:33 PM	PH3 valve closed
8/11/2011	2:08:33 PM	SiCl4 pre valve closed
8/11/2011	2:08:33 PM	SiCl4 post valve closed
8/11/2011	2:08:33 PM	Bypass valve closed
8/11/2011	2:08:33 PM	Bubbler valve closed
8/11/2011	2:08:33 PM	Helium valve opened
8/11/2011	2:08:33 PM	Main Vac valve opened
8/11/2011	2:08:33 PM	Helium MFC set to  20.000000
8/11/2011	2:08:33 PM	H2 MFC set to  0.000000
8/11/2011	2:08:33 PM	BCl3 MFC set to  0.000000
8/11/2011	2:08:33 PM	PHl3 MFC set to  0.000000
8/11/2011	2:08:33 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:08:33 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:08:33 PM	Tube furnace set to 0
8/11/2011	2:09:03 PM	Helium valve closed
8/11/2011	2:09:03 PM	H2 valve closed
8/11/2011	2:09:03 PM	BCl3 valve closed
8/11/2011	2:09:03 PM	PH3 valve closed
8/11/2011	2:09:03 PM	SiCl4 pre valve closed
8/11/2011	2:09:03 PM	SiCl4 post valve closed
8/11/2011	2:09:03 PM	Bypass valve closed
8/11/2011	2:09:03 PM	Bubbler valve closed
8/11/2011	2:09:03 PM	Main Vac valve opened
8/11/2011	2:09:03 PM	Helium MFC set to  0.000000
8/11/2011	2:09:03 PM	H2 MFC set to  0.000000
8/11/2011	2:09:03 PM	BCl3 MFC set to  0.000000
8/11/2011	2:09:03 PM	PHl3 MFC set to  0.000000
8/11/2011	2:09:03 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:09:03 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:09:03 PM	Tube furnace set to 0
8/11/2011	2:09:33 PM	H2 valve closed
8/11/2011	2:09:33 PM	BCl3 valve closed
8/11/2011	2:09:33 PM	PH3 valve closed
8/11/2011	2:09:33 PM	SiCl4 pre valve closed
8/11/2011	2:09:33 PM	SiCl4 post valve closed
8/11/2011	2:09:33 PM	Bypass valve closed
8/11/2011	2:09:33 PM	Bubbler valve closed
8/11/2011	2:09:33 PM	Helium valve opened
8/11/2011	2:09:33 PM	Main Vac valve opened
8/11/2011	2:09:33 PM	Helium MFC set to  20.000000
8/11/2011	2:09:33 PM	H2 MFC set to  0.000000
8/11/2011	2:09:33 PM	BCl3 MFC set to  0.000000
8/11/2011	2:09:33 PM	PHl3 MFC set to  0.000000
8/11/2011	2:09:33 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:09:33 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:09:33 PM	Tube furnace set to 0
8/11/2011	2:10:03 PM	Helium valve closed
8/11/2011	2:10:03 PM	H2 valve closed
8/11/2011	2:10:03 PM	BCl3 valve closed
8/11/2011	2:10:03 PM	PH3 valve closed
8/11/2011	2:10:03 PM	SiCl4 pre valve closed
8/11/2011	2:10:03 PM	SiCl4 post valve closed
8/11/2011	2:10:03 PM	Bypass valve closed
8/11/2011	2:10:03 PM	Bubbler valve closed
8/11/2011	2:10:03 PM	Main Vac valve opened
8/11/2011	2:10:03 PM	Helium MFC set to  0.000000
8/11/2011	2:10:03 PM	H2 MFC set to  0.000000
8/11/2011	2:10:03 PM	BCl3 MFC set to  0.000000
8/11/2011	2:10:03 PM	PHl3 MFC set to  0.000000
8/11/2011	2:10:03 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:10:03 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:10:03 PM	Tube furnace set to 0
8/11/2011	2:10:33 PM	H2 valve closed
8/11/2011	2:10:33 PM	BCl3 valve closed
8/11/2011	2:10:33 PM	PH3 valve closed
8/11/2011	2:10:33 PM	SiCl4 pre valve closed
8/11/2011	2:10:33 PM	SiCl4 post valve closed
8/11/2011	2:10:33 PM	Bypass valve closed
8/11/2011	2:10:33 PM	Bubbler valve closed
8/11/2011	2:10:33 PM	Helium valve opened
8/11/2011	2:10:33 PM	Main Vac valve opened
8/11/2011	2:10:33 PM	Helium MFC set to  20.000000
8/11/2011	2:10:33 PM	H2 MFC set to  0.000000
8/11/2011	2:10:33 PM	BCl3 MFC set to  0.000000
8/11/2011	2:10:33 PM	PHl3 MFC set to  0.000000
8/11/2011	2:10:33 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:10:33 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:10:34 PM	Tube furnace set to 0
8/11/2011	2:11:04 PM	Helium valve closed
8/11/2011	2:11:04 PM	H2 valve closed
8/11/2011	2:11:04 PM	BCl3 valve closed
8/11/2011	2:11:04 PM	PH3 valve closed
8/11/2011	2:11:04 PM	SiCl4 pre valve closed
8/11/2011	2:11:04 PM	SiCl4 post valve closed
8/11/2011	2:11:04 PM	Bypass valve closed
8/11/2011	2:11:04 PM	Bubbler valve closed
8/11/2011	2:11:04 PM	Main Vac valve opened
8/11/2011	2:11:04 PM	Helium MFC set to  0.000000
8/11/2011	2:11:04 PM	H2 MFC set to  0.000000
8/11/2011	2:11:04 PM	BCl3 MFC set to  0.000000
8/11/2011	2:11:04 PM	PHl3 MFC set to  0.000000
8/11/2011	2:11:04 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:11:04 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:11:04 PM	Tube furnace set to 0
8/11/2011	2:11:34 PM	H2 valve closed
8/11/2011	2:11:34 PM	BCl3 valve closed
8/11/2011	2:11:34 PM	PH3 valve closed
8/11/2011	2:11:34 PM	SiCl4 pre valve closed
8/11/2011	2:11:34 PM	SiCl4 post valve closed
8/11/2011	2:11:34 PM	Bypass valve closed
8/11/2011	2:11:34 PM	Bubbler valve closed
8/11/2011	2:11:34 PM	Helium valve opened
8/11/2011	2:11:34 PM	Main Vac valve opened
8/11/2011	2:11:34 PM	Helium MFC set to  20.000000
8/11/2011	2:11:34 PM	H2 MFC set to  0.000000
8/11/2011	2:11:34 PM	BCl3 MFC set to  0.000000
8/11/2011	2:11:34 PM	PHl3 MFC set to  0.000000
8/11/2011	2:11:34 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:11:34 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:11:34 PM	Tube furnace set to 0
8/11/2011	2:12:04 PM	Helium valve closed
8/11/2011	2:12:04 PM	H2 valve closed
8/11/2011	2:12:04 PM	BCl3 valve closed
8/11/2011	2:12:04 PM	PH3 valve closed
8/11/2011	2:12:04 PM	SiCl4 pre valve closed
8/11/2011	2:12:04 PM	SiCl4 post valve closed
8/11/2011	2:12:04 PM	Bypass valve closed
8/11/2011	2:12:04 PM	Bubbler valve closed
8/11/2011	2:12:04 PM	Main Vac valve opened
8/11/2011	2:12:04 PM	Helium MFC set to  0.000000
8/11/2011	2:12:04 PM	H2 MFC set to  0.000000
8/11/2011	2:12:04 PM	BCl3 MFC set to  0.000000
8/11/2011	2:12:04 PM	PHl3 MFC set to  0.000000
8/11/2011	2:12:04 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:12:04 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:12:04 PM	Tube furnace set to 0
8/11/2011	2:12:34 PM	H2 valve closed
8/11/2011	2:12:34 PM	BCl3 valve closed
8/11/2011	2:12:34 PM	PH3 valve closed
8/11/2011	2:12:34 PM	SiCl4 pre valve closed
8/11/2011	2:12:34 PM	SiCl4 post valve closed
8/11/2011	2:12:34 PM	Bypass valve closed
8/11/2011	2:12:34 PM	Bubbler valve closed
8/11/2011	2:12:34 PM	Helium valve opened
8/11/2011	2:12:34 PM	Main Vac valve opened
8/11/2011	2:12:34 PM	Helium MFC set to  20.000000
8/11/2011	2:12:34 PM	H2 MFC set to  0.000000
8/11/2011	2:12:34 PM	BCl3 MFC set to  0.000000
8/11/2011	2:12:34 PM	PHl3 MFC set to  0.000000
8/11/2011	2:12:34 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:12:34 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:12:34 PM	Tube furnace set to 0
8/11/2011	2:13:04 PM	Helium valve closed
8/11/2011	2:13:04 PM	H2 valve closed
8/11/2011	2:13:04 PM	BCl3 valve closed
8/11/2011	2:13:04 PM	PH3 valve closed
8/11/2011	2:13:04 PM	SiCl4 pre valve closed
8/11/2011	2:13:04 PM	SiCl4 post valve closed
8/11/2011	2:13:04 PM	Bypass valve closed
8/11/2011	2:13:04 PM	Bubbler valve closed
8/11/2011	2:13:04 PM	Main Vac valve opened
8/11/2011	2:13:04 PM	Helium MFC set to  0.000000
8/11/2011	2:13:04 PM	H2 MFC set to  0.000000
8/11/2011	2:13:04 PM	BCl3 MFC set to  0.000000
8/11/2011	2:13:04 PM	PHl3 MFC set to  0.000000
8/11/2011	2:13:04 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:13:04 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:13:05 PM	Tube furnace set to 0
8/11/2011	2:13:35 PM	H2 valve closed
8/11/2011	2:13:35 PM	BCl3 valve closed
8/11/2011	2:13:35 PM	PH3 valve closed
8/11/2011	2:13:35 PM	SiCl4 pre valve closed
8/11/2011	2:13:35 PM	SiCl4 post valve closed
8/11/2011	2:13:35 PM	Bypass valve closed
8/11/2011	2:13:35 PM	Bubbler valve closed
8/11/2011	2:13:35 PM	Helium valve opened
8/11/2011	2:13:35 PM	Main Vac valve opened
8/11/2011	2:13:35 PM	Helium MFC set to  20.000000
8/11/2011	2:13:35 PM	H2 MFC set to  0.000000
8/11/2011	2:13:35 PM	BCl3 MFC set to  0.000000
8/11/2011	2:13:35 PM	PHl3 MFC set to  0.000000
8/11/2011	2:13:35 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:13:35 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:13:35 PM	Tube furnace set to 0
8/11/2011	2:14:05 PM	Helium valve closed
8/11/2011	2:14:05 PM	H2 valve closed
8/11/2011	2:14:05 PM	BCl3 valve closed
8/11/2011	2:14:05 PM	PH3 valve closed
8/11/2011	2:14:05 PM	SiCl4 pre valve closed
8/11/2011	2:14:05 PM	SiCl4 post valve closed
8/11/2011	2:14:05 PM	Bypass valve closed
8/11/2011	2:14:05 PM	Bubbler valve closed
8/11/2011	2:14:05 PM	Main Vac valve opened
8/11/2011	2:14:05 PM	Helium MFC set to  0.000000
8/11/2011	2:14:05 PM	H2 MFC set to  0.000000
8/11/2011	2:14:05 PM	BCl3 MFC set to  0.000000
8/11/2011	2:14:05 PM	PHl3 MFC set to  0.000000
8/11/2011	2:14:05 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:14:05 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:14:05 PM	Tube furnace set to 0
8/11/2011	2:14:35 PM	H2 valve closed
8/11/2011	2:14:35 PM	BCl3 valve closed
8/11/2011	2:14:35 PM	PH3 valve closed
8/11/2011	2:14:35 PM	SiCl4 pre valve closed
8/11/2011	2:14:35 PM	SiCl4 post valve closed
8/11/2011	2:14:35 PM	Bypass valve closed
8/11/2011	2:14:35 PM	Bubbler valve closed
8/11/2011	2:14:35 PM	Helium valve opened
8/11/2011	2:14:35 PM	Main Vac valve opened
8/11/2011	2:14:35 PM	Helium MFC set to  20.000000
8/11/2011	2:14:35 PM	H2 MFC set to  0.000000
8/11/2011	2:14:35 PM	BCl3 MFC set to  0.000000
8/11/2011	2:14:35 PM	PHl3 MFC set to  0.000000
8/11/2011	2:14:35 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:14:35 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:14:35 PM	Tube furnace set to 0
8/11/2011	2:15:05 PM	Helium valve closed
8/11/2011	2:15:05 PM	H2 valve closed
8/11/2011	2:15:05 PM	BCl3 valve closed
8/11/2011	2:15:05 PM	PH3 valve closed
8/11/2011	2:15:05 PM	SiCl4 pre valve closed
8/11/2011	2:15:05 PM	SiCl4 post valve closed
8/11/2011	2:15:05 PM	Bypass valve closed
8/11/2011	2:15:05 PM	Bubbler valve closed
8/11/2011	2:15:05 PM	Main Vac valve opened
8/11/2011	2:15:05 PM	Helium MFC set to  0.000000
8/11/2011	2:15:05 PM	H2 MFC set to  0.000000
8/11/2011	2:15:05 PM	BCl3 MFC set to  0.000000
8/11/2011	2:15:05 PM	PHl3 MFC set to  0.000000
8/11/2011	2:15:05 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:15:05 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:15:06 PM	Tube furnace set to 0
8/11/2011	2:15:36 PM	H2 valve closed
8/11/2011	2:15:36 PM	BCl3 valve closed
8/11/2011	2:15:36 PM	PH3 valve closed
8/11/2011	2:15:36 PM	SiCl4 pre valve closed
8/11/2011	2:15:36 PM	SiCl4 post valve closed
8/11/2011	2:15:36 PM	Bypass valve closed
8/11/2011	2:15:36 PM	Bubbler valve closed
8/11/2011	2:15:36 PM	Helium valve opened
8/11/2011	2:15:36 PM	Main Vac valve opened
8/11/2011	2:15:36 PM	Helium MFC set to  20.000000
8/11/2011	2:15:36 PM	H2 MFC set to  0.000000
8/11/2011	2:15:36 PM	BCl3 MFC set to  0.000000
8/11/2011	2:15:36 PM	PHl3 MFC set to  0.000000
8/11/2011	2:15:36 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:15:36 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:15:36 PM	Tube furnace set to 0
8/11/2011	2:16:06 PM	Helium valve closed
8/11/2011	2:16:06 PM	H2 valve closed
8/11/2011	2:16:06 PM	BCl3 valve closed
8/11/2011	2:16:06 PM	PH3 valve closed
8/11/2011	2:16:06 PM	SiCl4 pre valve closed
8/11/2011	2:16:06 PM	SiCl4 post valve closed
8/11/2011	2:16:06 PM	Bypass valve closed
8/11/2011	2:16:06 PM	Bubbler valve closed
8/11/2011	2:16:06 PM	Main Vac valve opened
8/11/2011	2:16:06 PM	Helium MFC set to  0.000000
8/11/2011	2:16:06 PM	H2 MFC set to  0.000000
8/11/2011	2:16:06 PM	BCl3 MFC set to  0.000000
8/11/2011	2:16:06 PM	PHl3 MFC set to  0.000000
8/11/2011	2:16:06 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:16:06 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:16:06 PM	Tube furnace set to 0
8/11/2011	2:16:36 PM	H2 valve closed
8/11/2011	2:16:36 PM	BCl3 valve closed
8/11/2011	2:16:36 PM	PH3 valve closed
8/11/2011	2:16:36 PM	SiCl4 pre valve closed
8/11/2011	2:16:36 PM	SiCl4 post valve closed
8/11/2011	2:16:36 PM	Bypass valve closed
8/11/2011	2:16:36 PM	Bubbler valve closed
8/11/2011	2:16:36 PM	Helium valve opened
8/11/2011	2:16:36 PM	Main Vac valve opened
8/11/2011	2:16:36 PM	Helium MFC set to  20.000000
8/11/2011	2:16:36 PM	H2 MFC set to  0.000000
8/11/2011	2:16:36 PM	BCl3 MFC set to  0.000000
8/11/2011	2:16:36 PM	PHl3 MFC set to  0.000000
8/11/2011	2:16:36 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:16:36 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:16:36 PM	Tube furnace set to 0
8/11/2011	2:17:06 PM	Helium valve closed
8/11/2011	2:17:06 PM	H2 valve closed
8/11/2011	2:17:06 PM	BCl3 valve closed
8/11/2011	2:17:06 PM	PH3 valve closed
8/11/2011	2:17:06 PM	SiCl4 pre valve closed
8/11/2011	2:17:06 PM	SiCl4 post valve closed
8/11/2011	2:17:06 PM	Bypass valve closed
8/11/2011	2:17:06 PM	Bubbler valve closed
8/11/2011	2:17:06 PM	Main Vac valve opened
8/11/2011	2:17:06 PM	Helium MFC set to  0.000000
8/11/2011	2:17:06 PM	H2 MFC set to  0.000000
8/11/2011	2:17:06 PM	BCl3 MFC set to  0.000000
8/11/2011	2:17:06 PM	PHl3 MFC set to  0.000000
8/11/2011	2:17:06 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:17:06 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:17:06 PM	Tube furnace set to 0
8/11/2011	2:17:36 PM	H2 valve closed
8/11/2011	2:17:36 PM	BCl3 valve closed
8/11/2011	2:17:36 PM	PH3 valve closed
8/11/2011	2:17:36 PM	SiCl4 pre valve closed
8/11/2011	2:17:36 PM	SiCl4 post valve closed
8/11/2011	2:17:36 PM	Bypass valve closed
8/11/2011	2:17:36 PM	Bubbler valve closed
8/11/2011	2:17:36 PM	Helium valve opened
8/11/2011	2:17:36 PM	Main Vac valve opened
8/11/2011	2:17:36 PM	Helium MFC set to  20.000000
8/11/2011	2:17:36 PM	H2 MFC set to  0.000000
8/11/2011	2:17:36 PM	BCl3 MFC set to  0.000000
8/11/2011	2:17:36 PM	PHl3 MFC set to  0.000000
8/11/2011	2:17:36 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:17:36 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:17:37 PM	Tube furnace set to 0
8/11/2011	2:18:07 PM	Helium valve closed
8/11/2011	2:18:07 PM	H2 valve closed
8/11/2011	2:18:07 PM	BCl3 valve closed
8/11/2011	2:18:07 PM	PH3 valve closed
8/11/2011	2:18:07 PM	SiCl4 pre valve closed
8/11/2011	2:18:07 PM	SiCl4 post valve closed
8/11/2011	2:18:07 PM	Bypass valve closed
8/11/2011	2:18:07 PM	Bubbler valve closed
8/11/2011	2:18:07 PM	Main Vac valve opened
8/11/2011	2:18:07 PM	Helium MFC set to  0.000000
8/11/2011	2:18:07 PM	H2 MFC set to  0.000000
8/11/2011	2:18:07 PM	BCl3 MFC set to  0.000000
8/11/2011	2:18:07 PM	PHl3 MFC set to  0.000000
8/11/2011	2:18:07 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:18:07 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:18:07 PM	Tube furnace set to 0
8/11/2011	2:18:08 PM	Run finished at 2:18 PM
8/11/2011	2:21:53 PM	Main Vac valve closed
8/11/2011	2:22:04 PM	Main Vac valve opened
8/11/2011	2:23:59 PM	Recipe started at 2:23 PM
8/11/2011	2:23:59 PM	Helium valve closed
8/11/2011	2:23:59 PM	H2 valve closed
8/11/2011	2:23:59 PM	BCl3 valve closed
8/11/2011	2:23:59 PM	PH3 valve closed
8/11/2011	2:23:59 PM	SiCl4 pre valve closed
8/11/2011	2:23:59 PM	SiCl4 post valve closed
8/11/2011	2:23:59 PM	Main Vac valve closed
8/11/2011	2:23:59 PM	Bypass valve closed
8/11/2011	2:23:59 PM	Bubbler valve closed
8/11/2011	2:23:59 PM	Helium MFC set to  0.000000
8/11/2011	2:24:00 PM	H2 MFC set to  0.000000
8/11/2011	2:24:00 PM	BCl3 MFC set to  0.000000
8/11/2011	2:24:00 PM	PHl3 MFC set to  0.000000
8/11/2011	2:24:00 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:24:00 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:24:00 PM	Tube furnace set to 0
8/11/2011	2:24:03 PM	Helium valve closed
8/11/2011	2:24:03 PM	BCl3 valve closed
8/11/2011	2:24:03 PM	PH3 valve closed
8/11/2011	2:24:03 PM	SiCl4 pre valve closed
8/11/2011	2:24:03 PM	SiCl4 post valve closed
8/11/2011	2:24:03 PM	Main Vac valve closed
8/11/2011	2:24:03 PM	Bypass valve closed
8/11/2011	2:24:03 PM	Bubbler valve closed
8/11/2011	2:24:03 PM	H2 valve opened
8/11/2011	2:24:03 PM	Helium MFC set to  0.000000
8/11/2011	2:24:03 PM	H2 MFC set to  500.000000
8/11/2011	2:24:03 PM	BCl3 MFC set to  0.000000
8/11/2011	2:24:03 PM	PHl3 MFC set to  0.000000
8/11/2011	2:24:03 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:24:03 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:24:03 PM	Tube furnace set to 0
8/11/2011	2:25:07 PM	Helium valve closed
8/11/2011	2:25:07 PM	BCl3 valve closed
8/11/2011	2:25:07 PM	PH3 valve closed
8/11/2011	2:25:07 PM	SiCl4 pre valve closed
8/11/2011	2:25:07 PM	SiCl4 post valve closed
8/11/2011	2:25:07 PM	Main Vac valve closed
8/11/2011	2:25:07 PM	Bypass valve closed
8/11/2011	2:25:07 PM	H2 valve opened
8/11/2011	2:25:07 PM	Bubbler valve opened
8/11/2011	2:25:07 PM	Helium MFC set to  0.000000
8/11/2011	2:25:07 PM	H2 MFC set to  500.000000
8/11/2011	2:25:07 PM	BCl3 MFC set to  0.000000
8/11/2011	2:25:07 PM	PHl3 MFC set to  0.000000
8/11/2011	2:25:07 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:25:07 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:25:08 PM	Tube furnace set to 0
8/11/2011	2:25:09 PM	Helium valve closed
8/11/2011	2:25:09 PM	BCl3 valve closed
8/11/2011	2:25:09 PM	PH3 valve closed
8/11/2011	2:25:09 PM	SiCl4 pre valve closed
8/11/2011	2:25:09 PM	SiCl4 post valve closed
8/11/2011	2:25:09 PM	Main Vac valve closed
8/11/2011	2:25:09 PM	Bypass valve closed
8/11/2011	2:25:09 PM	H2 valve opened
8/11/2011	2:25:09 PM	Bubbler valve opened
8/11/2011	2:25:09 PM	Helium MFC set to  0.000000
8/11/2011	2:25:09 PM	H2 MFC set to  500.000000
8/11/2011	2:25:09 PM	BCl3 MFC set to  0.000000
8/11/2011	2:25:09 PM	PHl3 MFC set to  0.000000
8/11/2011	2:25:09 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:25:09 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:25:09 PM	Tube furnace set to 1000
8/11/2011	2:45:09 PM	Helium valve closed
8/11/2011	2:45:09 PM	BCl3 valve closed
8/11/2011	2:45:09 PM	PH3 valve closed
8/11/2011	2:45:09 PM	SiCl4 pre valve closed
8/11/2011	2:45:09 PM	SiCl4 post valve closed
8/11/2011	2:45:09 PM	Main Vac valve closed
8/11/2011	2:45:09 PM	Bypass valve closed
8/11/2011	2:45:09 PM	H2 valve opened
8/11/2011	2:45:09 PM	Bubbler valve opened
8/11/2011	2:45:09 PM	Helium MFC set to  0.000000
8/11/2011	2:45:09 PM	H2 MFC set to  500.000000
8/11/2011	2:45:09 PM	BCl3 MFC set to  0.000000
8/11/2011	2:45:09 PM	PHl3 MFC set to  0.000000
8/11/2011	2:45:09 PM	SiCl4 MFC set to  0.000000
8/11/2011	2:45:09 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:45:09 PM	Tube furnace set to 1000
8/11/2011	2:55:09 PM	Helium valve closed
8/11/2011	2:55:09 PM	PH3 valve closed
8/11/2011	2:55:09 PM	Main Vac valve closed
8/11/2011	2:55:09 PM	Bypass valve closed
8/11/2011	2:55:09 PM	H2 valve opened
8/11/2011	2:55:09 PM	BCl3 valve opened
8/11/2011	2:55:09 PM	SiCl4 pre valve opened
8/11/2011	2:55:09 PM	SiCl4 post valve opened
8/11/2011	2:55:09 PM	Bubbler valve opened
8/11/2011	2:55:09 PM	Helium MFC set to  0.000000
8/11/2011	2:55:09 PM	H2 MFC set to  500.000000
8/11/2011	2:55:09 PM	BCl3 MFC set to  2.500000
8/11/2011	2:55:09 PM	PHl3 MFC set to  0.000000
8/11/2011	2:55:09 PM	SiCl4 MFC set to  50.000000
8/11/2011	2:55:09 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	2:55:09 PM	Tube furnace set to 1000
8/11/2011	3:08:39 PM	Helium valve closed
8/11/2011	3:08:39 PM	BCl3 valve closed
8/11/2011	3:08:39 PM	PH3 valve closed
8/11/2011	3:08:39 PM	SiCl4 pre valve closed
8/11/2011	3:08:39 PM	SiCl4 post valve closed
8/11/2011	3:08:39 PM	Main Vac valve closed
8/11/2011	3:08:39 PM	Bypass valve closed
8/11/2011	3:08:39 PM	H2 valve opened
8/11/2011	3:08:39 PM	Bubbler valve opened
8/11/2011	3:08:39 PM	Helium MFC set to  0.000000
8/11/2011	3:08:39 PM	H2 MFC set to  500.000000
8/11/2011	3:08:39 PM	BCl3 MFC set to  0.000000
8/11/2011	3:08:39 PM	PHl3 MFC set to  0.000000
8/11/2011	3:08:39 PM	SiCl4 MFC set to  0.000000
8/11/2011	3:08:39 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:08:39 PM	Tube furnace set to 750
8/11/2011	3:13:39 PM	H2 valve closed
8/11/2011	3:13:39 PM	BCl3 valve closed
8/11/2011	3:13:39 PM	PH3 valve closed
8/11/2011	3:13:39 PM	SiCl4 pre valve closed
8/11/2011	3:13:39 PM	SiCl4 post valve closed
8/11/2011	3:13:39 PM	Main Vac valve closed
8/11/2011	3:13:39 PM	Bypass valve closed
8/11/2011	3:13:39 PM	Helium valve opened
8/11/2011	3:13:39 PM	Bubbler valve opened
8/11/2011	3:13:39 PM	Helium MFC set to  500.000000
8/11/2011	3:13:39 PM	H2 MFC set to  0.000000
8/11/2011	3:13:39 PM	BCl3 MFC set to  0.000000
8/11/2011	3:13:39 PM	PHl3 MFC set to  0.000000
8/11/2011	3:13:39 PM	SiCl4 MFC set to  0.000000
8/11/2011	3:13:39 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:13:39 PM	Tube furnace set to 0
8/11/2011	3:33:39 PM	Helium valve closed
8/11/2011	3:33:39 PM	H2 valve closed
8/11/2011	3:33:39 PM	BCl3 valve closed
8/11/2011	3:33:39 PM	PH3 valve closed
8/11/2011	3:33:39 PM	SiCl4 pre valve closed
8/11/2011	3:33:39 PM	SiCl4 post valve closed
8/11/2011	3:33:39 PM	Main Vac valve closed
8/11/2011	3:33:39 PM	Bypass valve closed
8/11/2011	3:33:39 PM	Bubbler valve closed
8/11/2011	3:33:39 PM	Helium MFC set to  0.000000
8/11/2011	3:33:39 PM	H2 MFC set to  0.000000
8/11/2011	3:33:39 PM	BCl3 MFC set to  0.000000
8/11/2011	3:33:39 PM	PHl3 MFC set to  0.000000
8/11/2011	3:33:39 PM	SiCl4 MFC set to  0.000000
8/11/2011	3:33:39 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	3:33:40 PM	Tube furnace set to 0
8/11/2011	3:33:41 PM	Run finished at 3:33 PM
8/11/2011	4:01:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	4:01:25 PM	Recipe started at 4:01 PM
8/11/2011	4:01:25 PM	Helium valve closed
8/11/2011	4:01:25 PM	H2 valve closed
8/11/2011	4:01:25 PM	BCl3 valve closed
8/11/2011	4:01:25 PM	PH3 valve closed
8/11/2011	4:01:25 PM	SiCl4 pre valve closed
8/11/2011	4:01:25 PM	SiCl4 post valve closed
8/11/2011	4:01:25 PM	Main Vac valve closed
8/11/2011	4:01:25 PM	Bypass valve closed
8/11/2011	4:01:25 PM	Bubbler valve closed
8/11/2011	4:01:25 PM	Helium MFC set to  0.000000
8/11/2011	4:01:25 PM	H2 MFC set to  0.000000
8/11/2011	4:01:25 PM	BCl3 MFC set to  0.000000
8/11/2011	4:01:25 PM	PHl3 MFC set to  0.000000
8/11/2011	4:01:25 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:01:25 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:01:25 PM	Tube furnace set to 0
8/11/2011	4:01:28 PM	H2 valve closed
8/11/2011	4:01:28 PM	BCl3 valve closed
8/11/2011	4:01:28 PM	PH3 valve closed
8/11/2011	4:01:28 PM	SiCl4 pre valve closed
8/11/2011	4:01:28 PM	SiCl4 post valve closed
8/11/2011	4:01:28 PM	Main Vac valve closed
8/11/2011	4:01:28 PM	Bypass valve closed
8/11/2011	4:01:28 PM	Bubbler valve closed
8/11/2011	4:01:28 PM	Helium valve opened
8/11/2011	4:01:28 PM	Helium MFC set to  500.000000
8/11/2011	4:01:28 PM	H2 MFC set to  0.000000
8/11/2011	4:01:28 PM	BCl3 MFC set to  0.000000
8/11/2011	4:01:28 PM	PHl3 MFC set to  0.000000
8/11/2011	4:01:28 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:01:28 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:01:28 PM	Tube furnace set to 0
8/11/2011	4:01:35 PM	Helium valve closed
8/11/2011	4:01:35 PM	H2 valve closed
8/11/2011	4:01:35 PM	BCl3 valve closed
8/11/2011	4:01:35 PM	PH3 valve closed
8/11/2011	4:01:35 PM	SiCl4 pre valve closed
8/11/2011	4:01:35 PM	SiCl4 post valve closed
8/11/2011	4:01:35 PM	Main Vac valve closed
8/11/2011	4:01:35 PM	Bypass valve closed
8/11/2011	4:01:35 PM	Bubbler valve closed
8/11/2011	4:01:35 PM	Helium MFC set to  0.000000
8/11/2011	4:01:35 PM	H2 MFC set to  0.000000
8/11/2011	4:01:35 PM	BCl3 MFC set to  0.000000
8/11/2011	4:01:35 PM	PHl3 MFC set to  0.000000
8/11/2011	4:01:35 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:01:35 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:01:35 PM	Tube furnace set to 0
8/11/2011	4:01:36 PM	Run finished at 4:01 PM
8/11/2011	4:01:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	4:16:26 PM	Recipe started at 4:16 PM
8/11/2011	4:16:26 PM	Helium valve closed
8/11/2011	4:16:26 PM	H2 valve closed
8/11/2011	4:16:26 PM	BCl3 valve closed
8/11/2011	4:16:26 PM	PH3 valve closed
8/11/2011	4:16:26 PM	SiCl4 pre valve closed
8/11/2011	4:16:26 PM	SiCl4 post valve closed
8/11/2011	4:16:26 PM	Main Vac valve closed
8/11/2011	4:16:26 PM	Bubbler valve closed
8/11/2011	4:16:26 PM	Bypass valve opened
8/11/2011	4:16:26 PM	Helium MFC set to  0.000000
8/11/2011	4:16:26 PM	H2 MFC set to  0.000000
8/11/2011	4:16:26 PM	BCl3 MFC set to  0.000000
8/11/2011	4:16:26 PM	PHl3 MFC set to  0.000000
8/11/2011	4:16:26 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:16:26 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:16:26 PM	Tube furnace set to 0
8/11/2011	4:17:46 PM	Helium valve closed
8/11/2011	4:17:46 PM	H2 valve closed
8/11/2011	4:17:46 PM	BCl3 valve closed
8/11/2011	4:17:46 PM	PH3 valve closed
8/11/2011	4:17:46 PM	SiCl4 pre valve closed
8/11/2011	4:17:46 PM	SiCl4 post valve closed
8/11/2011	4:17:46 PM	Main Vac valve closed
8/11/2011	4:17:46 PM	Bubbler valve closed
8/11/2011	4:17:46 PM	Bypass valve opened
8/11/2011	4:17:46 PM	Helium MFC set to  0.000000
8/11/2011	4:17:46 PM	H2 MFC set to  0.000000
8/11/2011	4:17:46 PM	BCl3 MFC set to  0.000000
8/11/2011	4:17:46 PM	PHl3 MFC set to  0.000000
8/11/2011	4:17:46 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:17:46 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:17:46 PM	Tube furnace set to 0
8/11/2011	4:18:16 PM	Helium valve closed
8/11/2011	4:18:16 PM	H2 valve closed
8/11/2011	4:18:16 PM	BCl3 valve closed
8/11/2011	4:18:16 PM	PH3 valve closed
8/11/2011	4:18:16 PM	SiCl4 pre valve closed
8/11/2011	4:18:16 PM	SiCl4 post valve closed
8/11/2011	4:18:16 PM	Bypass valve closed
8/11/2011	4:18:16 PM	Bubbler valve closed
8/11/2011	4:18:16 PM	Main Vac valve opened
8/11/2011	4:18:16 PM	Helium MFC set to  0.000000
8/11/2011	4:18:16 PM	H2 MFC set to  0.000000
8/11/2011	4:18:16 PM	BCl3 MFC set to  0.000000
8/11/2011	4:18:16 PM	PHl3 MFC set to  0.000000
8/11/2011	4:18:16 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:18:16 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:18:16 PM	Tube furnace set to 0
8/11/2011	4:48:16 PM	H2 valve closed
8/11/2011	4:48:16 PM	BCl3 valve closed
8/11/2011	4:48:16 PM	PH3 valve closed
8/11/2011	4:48:16 PM	SiCl4 pre valve closed
8/11/2011	4:48:16 PM	SiCl4 post valve closed
8/11/2011	4:48:16 PM	Bypass valve closed
8/11/2011	4:48:16 PM	Bubbler valve closed
8/11/2011	4:48:16 PM	Helium valve opened
8/11/2011	4:48:16 PM	Main Vac valve opened
8/11/2011	4:48:16 PM	Helium MFC set to  20.000000
8/11/2011	4:48:16 PM	H2 MFC set to  0.000000
8/11/2011	4:48:16 PM	BCl3 MFC set to  0.000000
8/11/2011	4:48:16 PM	PHl3 MFC set to  0.000000
8/11/2011	4:48:16 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:48:16 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:48:16 PM	Tube furnace set to 0
8/11/2011	4:48:46 PM	Helium valve closed
8/11/2011	4:48:46 PM	H2 valve closed
8/11/2011	4:48:46 PM	BCl3 valve closed
8/11/2011	4:48:46 PM	PH3 valve closed
8/11/2011	4:48:46 PM	SiCl4 pre valve closed
8/11/2011	4:48:46 PM	SiCl4 post valve closed
8/11/2011	4:48:46 PM	Bypass valve closed
8/11/2011	4:48:46 PM	Bubbler valve closed
8/11/2011	4:48:46 PM	Main Vac valve opened
8/11/2011	4:48:46 PM	Helium MFC set to  0.000000
8/11/2011	4:48:46 PM	H2 MFC set to  0.000000
8/11/2011	4:48:46 PM	BCl3 MFC set to  0.000000
8/11/2011	4:48:46 PM	PHl3 MFC set to  0.000000
8/11/2011	4:48:46 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:48:46 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:48:47 PM	Tube furnace set to 0
8/11/2011	4:49:17 PM	H2 valve closed
8/11/2011	4:49:17 PM	BCl3 valve closed
8/11/2011	4:49:17 PM	PH3 valve closed
8/11/2011	4:49:17 PM	SiCl4 pre valve closed
8/11/2011	4:49:17 PM	SiCl4 post valve closed
8/11/2011	4:49:17 PM	Bypass valve closed
8/11/2011	4:49:17 PM	Bubbler valve closed
8/11/2011	4:49:17 PM	Helium valve opened
8/11/2011	4:49:17 PM	Main Vac valve opened
8/11/2011	4:49:17 PM	Helium MFC set to  20.000000
8/11/2011	4:49:17 PM	H2 MFC set to  0.000000
8/11/2011	4:49:17 PM	BCl3 MFC set to  0.000000
8/11/2011	4:49:17 PM	PHl3 MFC set to  0.000000
8/11/2011	4:49:17 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:49:17 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:49:17 PM	Tube furnace set to 0
8/11/2011	4:49:47 PM	Helium valve closed
8/11/2011	4:49:47 PM	H2 valve closed
8/11/2011	4:49:47 PM	BCl3 valve closed
8/11/2011	4:49:47 PM	PH3 valve closed
8/11/2011	4:49:47 PM	SiCl4 pre valve closed
8/11/2011	4:49:47 PM	SiCl4 post valve closed
8/11/2011	4:49:47 PM	Bypass valve closed
8/11/2011	4:49:47 PM	Bubbler valve closed
8/11/2011	4:49:47 PM	Main Vac valve opened
8/11/2011	4:49:47 PM	Helium MFC set to  0.000000
8/11/2011	4:49:47 PM	H2 MFC set to  0.000000
8/11/2011	4:49:47 PM	BCl3 MFC set to  0.000000
8/11/2011	4:49:47 PM	PHl3 MFC set to  0.000000
8/11/2011	4:49:47 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:49:47 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:49:47 PM	Tube furnace set to 0
8/11/2011	4:50:17 PM	H2 valve closed
8/11/2011	4:50:17 PM	BCl3 valve closed
8/11/2011	4:50:17 PM	PH3 valve closed
8/11/2011	4:50:17 PM	SiCl4 pre valve closed
8/11/2011	4:50:17 PM	SiCl4 post valve closed
8/11/2011	4:50:17 PM	Bypass valve closed
8/11/2011	4:50:17 PM	Bubbler valve closed
8/11/2011	4:50:17 PM	Helium valve opened
8/11/2011	4:50:17 PM	Main Vac valve opened
8/11/2011	4:50:17 PM	Helium MFC set to  20.000000
8/11/2011	4:50:17 PM	H2 MFC set to  0.000000
8/11/2011	4:50:17 PM	BCl3 MFC set to  0.000000
8/11/2011	4:50:17 PM	PHl3 MFC set to  0.000000
8/11/2011	4:50:17 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:50:17 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:50:17 PM	Tube furnace set to 0
8/11/2011	4:50:47 PM	Helium valve closed
8/11/2011	4:50:47 PM	H2 valve closed
8/11/2011	4:50:47 PM	BCl3 valve closed
8/11/2011	4:50:47 PM	PH3 valve closed
8/11/2011	4:50:47 PM	SiCl4 pre valve closed
8/11/2011	4:50:47 PM	SiCl4 post valve closed
8/11/2011	4:50:47 PM	Bypass valve closed
8/11/2011	4:50:47 PM	Bubbler valve closed
8/11/2011	4:50:47 PM	Main Vac valve opened
8/11/2011	4:50:47 PM	Helium MFC set to  0.000000
8/11/2011	4:50:47 PM	H2 MFC set to  0.000000
8/11/2011	4:50:47 PM	BCl3 MFC set to  0.000000
8/11/2011	4:50:47 PM	PHl3 MFC set to  0.000000
8/11/2011	4:50:47 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:50:47 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:50:47 PM	Tube furnace set to 0
8/11/2011	4:51:17 PM	H2 valve closed
8/11/2011	4:51:17 PM	BCl3 valve closed
8/11/2011	4:51:17 PM	PH3 valve closed
8/11/2011	4:51:17 PM	SiCl4 pre valve closed
8/11/2011	4:51:17 PM	SiCl4 post valve closed
8/11/2011	4:51:17 PM	Bypass valve closed
8/11/2011	4:51:17 PM	Bubbler valve closed
8/11/2011	4:51:17 PM	Helium valve opened
8/11/2011	4:51:17 PM	Main Vac valve opened
8/11/2011	4:51:17 PM	Helium MFC set to  20.000000
8/11/2011	4:51:17 PM	H2 MFC set to  0.000000
8/11/2011	4:51:17 PM	BCl3 MFC set to  0.000000
8/11/2011	4:51:17 PM	PHl3 MFC set to  0.000000
8/11/2011	4:51:17 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:51:17 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:51:18 PM	Tube furnace set to 0
8/11/2011	4:51:48 PM	Helium valve closed
8/11/2011	4:51:48 PM	H2 valve closed
8/11/2011	4:51:48 PM	BCl3 valve closed
8/11/2011	4:51:48 PM	PH3 valve closed
8/11/2011	4:51:48 PM	SiCl4 pre valve closed
8/11/2011	4:51:48 PM	SiCl4 post valve closed
8/11/2011	4:51:48 PM	Bypass valve closed
8/11/2011	4:51:48 PM	Bubbler valve closed
8/11/2011	4:51:48 PM	Main Vac valve opened
8/11/2011	4:51:48 PM	Helium MFC set to  0.000000
8/11/2011	4:51:48 PM	H2 MFC set to  0.000000
8/11/2011	4:51:48 PM	BCl3 MFC set to  0.000000
8/11/2011	4:51:48 PM	PHl3 MFC set to  0.000000
8/11/2011	4:51:48 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:51:48 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:51:48 PM	Tube furnace set to 0
8/11/2011	4:52:18 PM	H2 valve closed
8/11/2011	4:52:18 PM	BCl3 valve closed
8/11/2011	4:52:18 PM	PH3 valve closed
8/11/2011	4:52:18 PM	SiCl4 pre valve closed
8/11/2011	4:52:18 PM	SiCl4 post valve closed
8/11/2011	4:52:18 PM	Bypass valve closed
8/11/2011	4:52:18 PM	Bubbler valve closed
8/11/2011	4:52:18 PM	Helium valve opened
8/11/2011	4:52:18 PM	Main Vac valve opened
8/11/2011	4:52:18 PM	Helium MFC set to  20.000000
8/11/2011	4:52:18 PM	H2 MFC set to  0.000000
8/11/2011	4:52:18 PM	BCl3 MFC set to  0.000000
8/11/2011	4:52:18 PM	PHl3 MFC set to  0.000000
8/11/2011	4:52:18 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:52:18 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:52:18 PM	Tube furnace set to 0
8/11/2011	4:52:48 PM	Helium valve closed
8/11/2011	4:52:48 PM	H2 valve closed
8/11/2011	4:52:48 PM	BCl3 valve closed
8/11/2011	4:52:48 PM	PH3 valve closed
8/11/2011	4:52:48 PM	SiCl4 pre valve closed
8/11/2011	4:52:48 PM	SiCl4 post valve closed
8/11/2011	4:52:48 PM	Bypass valve closed
8/11/2011	4:52:48 PM	Bubbler valve closed
8/11/2011	4:52:48 PM	Main Vac valve opened
8/11/2011	4:52:48 PM	Helium MFC set to  0.000000
8/11/2011	4:52:48 PM	H2 MFC set to  0.000000
8/11/2011	4:52:48 PM	BCl3 MFC set to  0.000000
8/11/2011	4:52:48 PM	PHl3 MFC set to  0.000000
8/11/2011	4:52:48 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:52:48 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:52:48 PM	Tube furnace set to 0
8/11/2011	4:53:18 PM	H2 valve closed
8/11/2011	4:53:18 PM	BCl3 valve closed
8/11/2011	4:53:18 PM	PH3 valve closed
8/11/2011	4:53:18 PM	SiCl4 pre valve closed
8/11/2011	4:53:18 PM	SiCl4 post valve closed
8/11/2011	4:53:18 PM	Bypass valve closed
8/11/2011	4:53:18 PM	Bubbler valve closed
8/11/2011	4:53:18 PM	Helium valve opened
8/11/2011	4:53:18 PM	Main Vac valve opened
8/11/2011	4:53:18 PM	Helium MFC set to  20.000000
8/11/2011	4:53:18 PM	H2 MFC set to  0.000000
8/11/2011	4:53:18 PM	BCl3 MFC set to  0.000000
8/11/2011	4:53:18 PM	PHl3 MFC set to  0.000000
8/11/2011	4:53:18 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:53:18 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:53:18 PM	Tube furnace set to 0
8/11/2011	4:53:48 PM	Helium valve closed
8/11/2011	4:53:48 PM	H2 valve closed
8/11/2011	4:53:48 PM	BCl3 valve closed
8/11/2011	4:53:48 PM	PH3 valve closed
8/11/2011	4:53:48 PM	SiCl4 pre valve closed
8/11/2011	4:53:48 PM	SiCl4 post valve closed
8/11/2011	4:53:48 PM	Bypass valve closed
8/11/2011	4:53:48 PM	Bubbler valve closed
8/11/2011	4:53:48 PM	Main Vac valve opened
8/11/2011	4:53:48 PM	Helium MFC set to  0.000000
8/11/2011	4:53:48 PM	H2 MFC set to  0.000000
8/11/2011	4:53:48 PM	BCl3 MFC set to  0.000000
8/11/2011	4:53:48 PM	PHl3 MFC set to  0.000000
8/11/2011	4:53:48 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:53:48 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:53:49 PM	Tube furnace set to 0
8/11/2011	4:54:19 PM	H2 valve closed
8/11/2011	4:54:19 PM	BCl3 valve closed
8/11/2011	4:54:19 PM	PH3 valve closed
8/11/2011	4:54:19 PM	SiCl4 pre valve closed
8/11/2011	4:54:19 PM	SiCl4 post valve closed
8/11/2011	4:54:19 PM	Bypass valve closed
8/11/2011	4:54:19 PM	Bubbler valve closed
8/11/2011	4:54:19 PM	Helium valve opened
8/11/2011	4:54:19 PM	Main Vac valve opened
8/11/2011	4:54:19 PM	Helium MFC set to  20.000000
8/11/2011	4:54:19 PM	H2 MFC set to  0.000000
8/11/2011	4:54:19 PM	BCl3 MFC set to  0.000000
8/11/2011	4:54:19 PM	PHl3 MFC set to  0.000000
8/11/2011	4:54:19 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:54:19 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:54:19 PM	Tube furnace set to 0
8/11/2011	4:54:49 PM	Helium valve closed
8/11/2011	4:54:49 PM	H2 valve closed
8/11/2011	4:54:49 PM	BCl3 valve closed
8/11/2011	4:54:49 PM	PH3 valve closed
8/11/2011	4:54:49 PM	SiCl4 pre valve closed
8/11/2011	4:54:49 PM	SiCl4 post valve closed
8/11/2011	4:54:49 PM	Bypass valve closed
8/11/2011	4:54:49 PM	Bubbler valve closed
8/11/2011	4:54:49 PM	Main Vac valve opened
8/11/2011	4:54:49 PM	Helium MFC set to  0.000000
8/11/2011	4:54:49 PM	H2 MFC set to  0.000000
8/11/2011	4:54:49 PM	BCl3 MFC set to  0.000000
8/11/2011	4:54:49 PM	PHl3 MFC set to  0.000000
8/11/2011	4:54:49 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:54:49 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:54:49 PM	Tube furnace set to 0
8/11/2011	4:55:19 PM	H2 valve closed
8/11/2011	4:55:19 PM	BCl3 valve closed
8/11/2011	4:55:19 PM	PH3 valve closed
8/11/2011	4:55:19 PM	SiCl4 pre valve closed
8/11/2011	4:55:19 PM	SiCl4 post valve closed
8/11/2011	4:55:19 PM	Bypass valve closed
8/11/2011	4:55:19 PM	Bubbler valve closed
8/11/2011	4:55:19 PM	Helium valve opened
8/11/2011	4:55:19 PM	Main Vac valve opened
8/11/2011	4:55:19 PM	Helium MFC set to  20.000000
8/11/2011	4:55:19 PM	H2 MFC set to  0.000000
8/11/2011	4:55:19 PM	BCl3 MFC set to  0.000000
8/11/2011	4:55:19 PM	PHl3 MFC set to  0.000000
8/11/2011	4:55:19 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:55:19 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:55:19 PM	Tube furnace set to 0
8/11/2011	4:55:49 PM	Helium valve closed
8/11/2011	4:55:49 PM	H2 valve closed
8/11/2011	4:55:49 PM	BCl3 valve closed
8/11/2011	4:55:49 PM	PH3 valve closed
8/11/2011	4:55:49 PM	SiCl4 pre valve closed
8/11/2011	4:55:49 PM	SiCl4 post valve closed
8/11/2011	4:55:49 PM	Bypass valve closed
8/11/2011	4:55:49 PM	Bubbler valve closed
8/11/2011	4:55:49 PM	Main Vac valve opened
8/11/2011	4:55:49 PM	Helium MFC set to  0.000000
8/11/2011	4:55:49 PM	H2 MFC set to  0.000000
8/11/2011	4:55:49 PM	BCl3 MFC set to  0.000000
8/11/2011	4:55:49 PM	PHl3 MFC set to  0.000000
8/11/2011	4:55:49 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:55:49 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:55:49 PM	Tube furnace set to 0
8/11/2011	4:56:19 PM	H2 valve closed
8/11/2011	4:56:19 PM	BCl3 valve closed
8/11/2011	4:56:19 PM	PH3 valve closed
8/11/2011	4:56:19 PM	SiCl4 pre valve closed
8/11/2011	4:56:19 PM	SiCl4 post valve closed
8/11/2011	4:56:19 PM	Bypass valve closed
8/11/2011	4:56:19 PM	Bubbler valve closed
8/11/2011	4:56:19 PM	Helium valve opened
8/11/2011	4:56:19 PM	Main Vac valve opened
8/11/2011	4:56:19 PM	Helium MFC set to  20.000000
8/11/2011	4:56:19 PM	H2 MFC set to  0.000000
8/11/2011	4:56:19 PM	BCl3 MFC set to  0.000000
8/11/2011	4:56:19 PM	PHl3 MFC set to  0.000000
8/11/2011	4:56:19 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:56:19 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:56:20 PM	Tube furnace set to 0
8/11/2011	4:56:50 PM	Helium valve closed
8/11/2011	4:56:50 PM	H2 valve closed
8/11/2011	4:56:50 PM	BCl3 valve closed
8/11/2011	4:56:50 PM	PH3 valve closed
8/11/2011	4:56:50 PM	SiCl4 pre valve closed
8/11/2011	4:56:50 PM	SiCl4 post valve closed
8/11/2011	4:56:50 PM	Bypass valve closed
8/11/2011	4:56:50 PM	Bubbler valve closed
8/11/2011	4:56:50 PM	Main Vac valve opened
8/11/2011	4:56:50 PM	Helium MFC set to  0.000000
8/11/2011	4:56:50 PM	H2 MFC set to  0.000000
8/11/2011	4:56:50 PM	BCl3 MFC set to  0.000000
8/11/2011	4:56:50 PM	PHl3 MFC set to  0.000000
8/11/2011	4:56:50 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:56:50 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:56:50 PM	Tube furnace set to 0
8/11/2011	4:57:20 PM	H2 valve closed
8/11/2011	4:57:20 PM	BCl3 valve closed
8/11/2011	4:57:20 PM	PH3 valve closed
8/11/2011	4:57:20 PM	SiCl4 pre valve closed
8/11/2011	4:57:20 PM	SiCl4 post valve closed
8/11/2011	4:57:20 PM	Bypass valve closed
8/11/2011	4:57:20 PM	Bubbler valve closed
8/11/2011	4:57:20 PM	Helium valve opened
8/11/2011	4:57:20 PM	Main Vac valve opened
8/11/2011	4:57:20 PM	Helium MFC set to  20.000000
8/11/2011	4:57:20 PM	H2 MFC set to  0.000000
8/11/2011	4:57:20 PM	BCl3 MFC set to  0.000000
8/11/2011	4:57:20 PM	PHl3 MFC set to  0.000000
8/11/2011	4:57:20 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:57:20 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:57:20 PM	Tube furnace set to 0
8/11/2011	4:57:50 PM	Helium valve closed
8/11/2011	4:57:50 PM	H2 valve closed
8/11/2011	4:57:50 PM	BCl3 valve closed
8/11/2011	4:57:50 PM	PH3 valve closed
8/11/2011	4:57:50 PM	SiCl4 pre valve closed
8/11/2011	4:57:50 PM	SiCl4 post valve closed
8/11/2011	4:57:50 PM	Bypass valve closed
8/11/2011	4:57:50 PM	Bubbler valve closed
8/11/2011	4:57:50 PM	Main Vac valve opened
8/11/2011	4:57:50 PM	Helium MFC set to  0.000000
8/11/2011	4:57:50 PM	H2 MFC set to  0.000000
8/11/2011	4:57:50 PM	BCl3 MFC set to  0.000000
8/11/2011	4:57:50 PM	PHl3 MFC set to  0.000000
8/11/2011	4:57:50 PM	SiCl4 MFC set to  0.000000
8/11/2011	4:57:50 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	4:57:50 PM	Tube furnace set to 0
8/11/2011	4:57:51 PM	Run finished at 4:57 PM
8/11/2011	5:08:49 PM	Recipe started at 5:08 PM
8/11/2011	5:08:49 PM	Helium valve closed
8/11/2011	5:08:49 PM	H2 valve closed
8/11/2011	5:08:49 PM	BCl3 valve closed
8/11/2011	5:08:49 PM	PH3 valve closed
8/11/2011	5:08:49 PM	SiCl4 pre valve closed
8/11/2011	5:08:49 PM	SiCl4 post valve closed
8/11/2011	5:08:49 PM	Bypass valve closed
8/11/2011	5:08:49 PM	Bubbler valve closed
8/11/2011	5:08:49 PM	Main Vac valve opened
8/11/2011	5:08:49 PM	Helium MFC set to  0.000000
8/11/2011	5:08:49 PM	H2 MFC set to  0.000000
8/11/2011	5:08:49 PM	BCl3 MFC set to  0.000000
8/11/2011	5:08:49 PM	PHl3 MFC set to  0.000000
8/11/2011	5:08:49 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:08:49 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:08:49 PM	Tube furnace set to 0
8/11/2011	5:09:19 PM	H2 valve closed
8/11/2011	5:09:19 PM	BCl3 valve closed
8/11/2011	5:09:19 PM	PH3 valve closed
8/11/2011	5:09:19 PM	SiCl4 pre valve closed
8/11/2011	5:09:19 PM	SiCl4 post valve closed
8/11/2011	5:09:19 PM	Bypass valve closed
8/11/2011	5:09:19 PM	Bubbler valve closed
8/11/2011	5:09:19 PM	Helium valve opened
8/11/2011	5:09:19 PM	Main Vac valve opened
8/11/2011	5:09:19 PM	Helium MFC set to  20.000000
8/11/2011	5:09:19 PM	H2 MFC set to  0.000000
8/11/2011	5:09:19 PM	BCl3 MFC set to  0.000000
8/11/2011	5:09:19 PM	PHl3 MFC set to  0.000000
8/11/2011	5:09:19 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:09:19 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:09:19 PM	Tube furnace set to 0
8/11/2011	5:09:49 PM	Helium valve closed
8/11/2011	5:09:49 PM	H2 valve closed
8/11/2011	5:09:49 PM	BCl3 valve closed
8/11/2011	5:09:49 PM	PH3 valve closed
8/11/2011	5:09:49 PM	SiCl4 pre valve closed
8/11/2011	5:09:49 PM	SiCl4 post valve closed
8/11/2011	5:09:49 PM	Bypass valve closed
8/11/2011	5:09:49 PM	Bubbler valve closed
8/11/2011	5:09:49 PM	Main Vac valve opened
8/11/2011	5:09:49 PM	Helium MFC set to  0.000000
8/11/2011	5:09:49 PM	H2 MFC set to  0.000000
8/11/2011	5:09:49 PM	BCl3 MFC set to  0.000000
8/11/2011	5:09:49 PM	PHl3 MFC set to  0.000000
8/11/2011	5:09:49 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:09:49 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:09:49 PM	Tube furnace set to 0
8/11/2011	5:10:19 PM	H2 valve closed
8/11/2011	5:10:19 PM	BCl3 valve closed
8/11/2011	5:10:19 PM	PH3 valve closed
8/11/2011	5:10:19 PM	SiCl4 pre valve closed
8/11/2011	5:10:19 PM	SiCl4 post valve closed
8/11/2011	5:10:19 PM	Bypass valve closed
8/11/2011	5:10:19 PM	Bubbler valve closed
8/11/2011	5:10:19 PM	Helium valve opened
8/11/2011	5:10:19 PM	Main Vac valve opened
8/11/2011	5:10:19 PM	Helium MFC set to  20.000000
8/11/2011	5:10:19 PM	H2 MFC set to  0.000000
8/11/2011	5:10:19 PM	BCl3 MFC set to  0.000000
8/11/2011	5:10:19 PM	PHl3 MFC set to  0.000000
8/11/2011	5:10:19 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:10:19 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:10:19 PM	Tube furnace set to 0
8/11/2011	5:10:49 PM	Helium valve closed
8/11/2011	5:10:49 PM	H2 valve closed
8/11/2011	5:10:49 PM	BCl3 valve closed
8/11/2011	5:10:49 PM	PH3 valve closed
8/11/2011	5:10:49 PM	SiCl4 pre valve closed
8/11/2011	5:10:49 PM	SiCl4 post valve closed
8/11/2011	5:10:49 PM	Bypass valve closed
8/11/2011	5:10:49 PM	Bubbler valve closed
8/11/2011	5:10:49 PM	Main Vac valve opened
8/11/2011	5:10:49 PM	Helium MFC set to  0.000000
8/11/2011	5:10:49 PM	H2 MFC set to  0.000000
8/11/2011	5:10:49 PM	BCl3 MFC set to  0.000000
8/11/2011	5:10:49 PM	PHl3 MFC set to  0.000000
8/11/2011	5:10:49 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:10:49 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:10:50 PM	Tube furnace set to 0
8/11/2011	5:11:20 PM	H2 valve closed
8/11/2011	5:11:20 PM	BCl3 valve closed
8/11/2011	5:11:20 PM	PH3 valve closed
8/11/2011	5:11:20 PM	SiCl4 pre valve closed
8/11/2011	5:11:20 PM	SiCl4 post valve closed
8/11/2011	5:11:20 PM	Bypass valve closed
8/11/2011	5:11:20 PM	Bubbler valve closed
8/11/2011	5:11:20 PM	Helium valve opened
8/11/2011	5:11:20 PM	Main Vac valve opened
8/11/2011	5:11:20 PM	Helium MFC set to  20.000000
8/11/2011	5:11:20 PM	H2 MFC set to  0.000000
8/11/2011	5:11:20 PM	BCl3 MFC set to  0.000000
8/11/2011	5:11:20 PM	PHl3 MFC set to  0.000000
8/11/2011	5:11:20 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:11:20 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:11:20 PM	Tube furnace set to 0
8/11/2011	5:11:50 PM	Helium valve closed
8/11/2011	5:11:50 PM	H2 valve closed
8/11/2011	5:11:50 PM	BCl3 valve closed
8/11/2011	5:11:50 PM	PH3 valve closed
8/11/2011	5:11:50 PM	SiCl4 pre valve closed
8/11/2011	5:11:50 PM	SiCl4 post valve closed
8/11/2011	5:11:50 PM	Bypass valve closed
8/11/2011	5:11:50 PM	Bubbler valve closed
8/11/2011	5:11:50 PM	Main Vac valve opened
8/11/2011	5:11:50 PM	Helium MFC set to  0.000000
8/11/2011	5:11:50 PM	H2 MFC set to  0.000000
8/11/2011	5:11:50 PM	BCl3 MFC set to  0.000000
8/11/2011	5:11:50 PM	PHl3 MFC set to  0.000000
8/11/2011	5:11:50 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:11:50 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:11:50 PM	Tube furnace set to 0
8/11/2011	5:12:20 PM	H2 valve closed
8/11/2011	5:12:20 PM	BCl3 valve closed
8/11/2011	5:12:20 PM	PH3 valve closed
8/11/2011	5:12:20 PM	SiCl4 pre valve closed
8/11/2011	5:12:20 PM	SiCl4 post valve closed
8/11/2011	5:12:20 PM	Bypass valve closed
8/11/2011	5:12:20 PM	Bubbler valve closed
8/11/2011	5:12:20 PM	Helium valve opened
8/11/2011	5:12:20 PM	Main Vac valve opened
8/11/2011	5:12:20 PM	Helium MFC set to  20.000000
8/11/2011	5:12:20 PM	H2 MFC set to  0.000000
8/11/2011	5:12:20 PM	BCl3 MFC set to  0.000000
8/11/2011	5:12:20 PM	PHl3 MFC set to  0.000000
8/11/2011	5:12:20 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:12:20 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:12:20 PM	Tube furnace set to 0
8/11/2011	5:12:50 PM	Helium valve closed
8/11/2011	5:12:50 PM	H2 valve closed
8/11/2011	5:12:50 PM	BCl3 valve closed
8/11/2011	5:12:50 PM	PH3 valve closed
8/11/2011	5:12:50 PM	SiCl4 pre valve closed
8/11/2011	5:12:50 PM	SiCl4 post valve closed
8/11/2011	5:12:50 PM	Bypass valve closed
8/11/2011	5:12:50 PM	Bubbler valve closed
8/11/2011	5:12:50 PM	Main Vac valve opened
8/11/2011	5:12:50 PM	Helium MFC set to  0.000000
8/11/2011	5:12:50 PM	H2 MFC set to  0.000000
8/11/2011	5:12:50 PM	BCl3 MFC set to  0.000000
8/11/2011	5:12:50 PM	PHl3 MFC set to  0.000000
8/11/2011	5:12:50 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:12:50 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:12:50 PM	Tube furnace set to 0
8/11/2011	5:13:20 PM	H2 valve closed
8/11/2011	5:13:20 PM	BCl3 valve closed
8/11/2011	5:13:20 PM	PH3 valve closed
8/11/2011	5:13:20 PM	SiCl4 pre valve closed
8/11/2011	5:13:20 PM	SiCl4 post valve closed
8/11/2011	5:13:20 PM	Bypass valve closed
8/11/2011	5:13:20 PM	Bubbler valve closed
8/11/2011	5:13:20 PM	Helium valve opened
8/11/2011	5:13:20 PM	Main Vac valve opened
8/11/2011	5:13:20 PM	Helium MFC set to  20.000000
8/11/2011	5:13:20 PM	H2 MFC set to  0.000000
8/11/2011	5:13:20 PM	BCl3 MFC set to  0.000000
8/11/2011	5:13:20 PM	PHl3 MFC set to  0.000000
8/11/2011	5:13:20 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:13:20 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:13:21 PM	Tube furnace set to 0
8/11/2011	5:13:51 PM	Helium valve closed
8/11/2011	5:13:51 PM	H2 valve closed
8/11/2011	5:13:51 PM	BCl3 valve closed
8/11/2011	5:13:51 PM	PH3 valve closed
8/11/2011	5:13:51 PM	SiCl4 pre valve closed
8/11/2011	5:13:51 PM	SiCl4 post valve closed
8/11/2011	5:13:51 PM	Bypass valve closed
8/11/2011	5:13:51 PM	Bubbler valve closed
8/11/2011	5:13:51 PM	Main Vac valve opened
8/11/2011	5:13:51 PM	Helium MFC set to  0.000000
8/11/2011	5:13:51 PM	H2 MFC set to  0.000000
8/11/2011	5:13:51 PM	BCl3 MFC set to  0.000000
8/11/2011	5:13:51 PM	PHl3 MFC set to  0.000000
8/11/2011	5:13:51 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:13:51 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:13:51 PM	Tube furnace set to 0
8/11/2011	5:14:21 PM	H2 valve closed
8/11/2011	5:14:21 PM	BCl3 valve closed
8/11/2011	5:14:21 PM	PH3 valve closed
8/11/2011	5:14:21 PM	SiCl4 pre valve closed
8/11/2011	5:14:21 PM	SiCl4 post valve closed
8/11/2011	5:14:21 PM	Bypass valve closed
8/11/2011	5:14:21 PM	Bubbler valve closed
8/11/2011	5:14:21 PM	Helium valve opened
8/11/2011	5:14:21 PM	Main Vac valve opened
8/11/2011	5:14:21 PM	Helium MFC set to  20.000000
8/11/2011	5:14:21 PM	H2 MFC set to  0.000000
8/11/2011	5:14:21 PM	BCl3 MFC set to  0.000000
8/11/2011	5:14:21 PM	PHl3 MFC set to  0.000000
8/11/2011	5:14:21 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:14:21 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:14:21 PM	Tube furnace set to 0
8/11/2011	5:14:51 PM	Helium valve closed
8/11/2011	5:14:51 PM	H2 valve closed
8/11/2011	5:14:51 PM	BCl3 valve closed
8/11/2011	5:14:51 PM	PH3 valve closed
8/11/2011	5:14:51 PM	SiCl4 pre valve closed
8/11/2011	5:14:51 PM	SiCl4 post valve closed
8/11/2011	5:14:51 PM	Bypass valve closed
8/11/2011	5:14:51 PM	Bubbler valve closed
8/11/2011	5:14:51 PM	Main Vac valve opened
8/11/2011	5:14:51 PM	Helium MFC set to  0.000000
8/11/2011	5:14:51 PM	H2 MFC set to  0.000000
8/11/2011	5:14:51 PM	BCl3 MFC set to  0.000000
8/11/2011	5:14:51 PM	PHl3 MFC set to  0.000000
8/11/2011	5:14:51 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:14:51 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:14:51 PM	Tube furnace set to 0
8/11/2011	5:15:21 PM	H2 valve closed
8/11/2011	5:15:21 PM	BCl3 valve closed
8/11/2011	5:15:21 PM	PH3 valve closed
8/11/2011	5:15:21 PM	SiCl4 pre valve closed
8/11/2011	5:15:21 PM	SiCl4 post valve closed
8/11/2011	5:15:21 PM	Bypass valve closed
8/11/2011	5:15:21 PM	Bubbler valve closed
8/11/2011	5:15:21 PM	Helium valve opened
8/11/2011	5:15:21 PM	Main Vac valve opened
8/11/2011	5:15:21 PM	Helium MFC set to  20.000000
8/11/2011	5:15:21 PM	H2 MFC set to  0.000000
8/11/2011	5:15:21 PM	BCl3 MFC set to  0.000000
8/11/2011	5:15:21 PM	PHl3 MFC set to  0.000000
8/11/2011	5:15:21 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:15:21 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:15:21 PM	Tube furnace set to 0
8/11/2011	5:15:51 PM	Helium valve closed
8/11/2011	5:15:51 PM	H2 valve closed
8/11/2011	5:15:51 PM	BCl3 valve closed
8/11/2011	5:15:51 PM	PH3 valve closed
8/11/2011	5:15:51 PM	SiCl4 pre valve closed
8/11/2011	5:15:51 PM	SiCl4 post valve closed
8/11/2011	5:15:51 PM	Bypass valve closed
8/11/2011	5:15:51 PM	Bubbler valve closed
8/11/2011	5:15:51 PM	Main Vac valve opened
8/11/2011	5:15:51 PM	Helium MFC set to  0.000000
8/11/2011	5:15:51 PM	H2 MFC set to  0.000000
8/11/2011	5:15:51 PM	BCl3 MFC set to  0.000000
8/11/2011	5:15:51 PM	PHl3 MFC set to  0.000000
8/11/2011	5:15:51 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:15:51 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:15:52 PM	Tube furnace set to 0
8/11/2011	5:16:22 PM	H2 valve closed
8/11/2011	5:16:22 PM	BCl3 valve closed
8/11/2011	5:16:22 PM	PH3 valve closed
8/11/2011	5:16:22 PM	SiCl4 pre valve closed
8/11/2011	5:16:22 PM	SiCl4 post valve closed
8/11/2011	5:16:22 PM	Bypass valve closed
8/11/2011	5:16:22 PM	Bubbler valve closed
8/11/2011	5:16:22 PM	Helium valve opened
8/11/2011	5:16:22 PM	Main Vac valve opened
8/11/2011	5:16:22 PM	Helium MFC set to  20.000000
8/11/2011	5:16:22 PM	H2 MFC set to  0.000000
8/11/2011	5:16:22 PM	BCl3 MFC set to  0.000000
8/11/2011	5:16:22 PM	PHl3 MFC set to  0.000000
8/11/2011	5:16:22 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:16:22 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:16:22 PM	Tube furnace set to 0
8/11/2011	5:16:52 PM	Helium valve closed
8/11/2011	5:16:52 PM	H2 valve closed
8/11/2011	5:16:52 PM	BCl3 valve closed
8/11/2011	5:16:52 PM	PH3 valve closed
8/11/2011	5:16:52 PM	SiCl4 pre valve closed
8/11/2011	5:16:52 PM	SiCl4 post valve closed
8/11/2011	5:16:52 PM	Bypass valve closed
8/11/2011	5:16:52 PM	Bubbler valve closed
8/11/2011	5:16:52 PM	Main Vac valve opened
8/11/2011	5:16:52 PM	Helium MFC set to  0.000000
8/11/2011	5:16:52 PM	H2 MFC set to  0.000000
8/11/2011	5:16:52 PM	BCl3 MFC set to  0.000000
8/11/2011	5:16:52 PM	PHl3 MFC set to  0.000000
8/11/2011	5:16:52 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:16:52 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:16:52 PM	Tube furnace set to 0
8/11/2011	5:17:22 PM	H2 valve closed
8/11/2011	5:17:22 PM	BCl3 valve closed
8/11/2011	5:17:22 PM	PH3 valve closed
8/11/2011	5:17:22 PM	SiCl4 pre valve closed
8/11/2011	5:17:22 PM	SiCl4 post valve closed
8/11/2011	5:17:22 PM	Bypass valve closed
8/11/2011	5:17:22 PM	Bubbler valve closed
8/11/2011	5:17:22 PM	Helium valve opened
8/11/2011	5:17:22 PM	Main Vac valve opened
8/11/2011	5:17:22 PM	Helium MFC set to  20.000000
8/11/2011	5:17:22 PM	H2 MFC set to  0.000000
8/11/2011	5:17:22 PM	BCl3 MFC set to  0.000000
8/11/2011	5:17:22 PM	PHl3 MFC set to  0.000000
8/11/2011	5:17:22 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:17:22 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:17:22 PM	Tube furnace set to 0
8/11/2011	5:17:52 PM	Helium valve closed
8/11/2011	5:17:52 PM	H2 valve closed
8/11/2011	5:17:52 PM	BCl3 valve closed
8/11/2011	5:17:52 PM	PH3 valve closed
8/11/2011	5:17:52 PM	SiCl4 pre valve closed
8/11/2011	5:17:52 PM	SiCl4 post valve closed
8/11/2011	5:17:52 PM	Bypass valve closed
8/11/2011	5:17:52 PM	Bubbler valve closed
8/11/2011	5:17:52 PM	Main Vac valve opened
8/11/2011	5:17:52 PM	Helium MFC set to  0.000000
8/11/2011	5:17:52 PM	H2 MFC set to  0.000000
8/11/2011	5:17:52 PM	BCl3 MFC set to  0.000000
8/11/2011	5:17:52 PM	PHl3 MFC set to  0.000000
8/11/2011	5:17:52 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:17:52 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:17:52 PM	Tube furnace set to 0
8/11/2011	5:18:22 PM	H2 valve closed
8/11/2011	5:18:22 PM	BCl3 valve closed
8/11/2011	5:18:22 PM	PH3 valve closed
8/11/2011	5:18:22 PM	SiCl4 pre valve closed
8/11/2011	5:18:22 PM	SiCl4 post valve closed
8/11/2011	5:18:22 PM	Bypass valve closed
8/11/2011	5:18:22 PM	Bubbler valve closed
8/11/2011	5:18:22 PM	Helium valve opened
8/11/2011	5:18:22 PM	Main Vac valve opened
8/11/2011	5:18:22 PM	Helium MFC set to  20.000000
8/11/2011	5:18:22 PM	H2 MFC set to  0.000000
8/11/2011	5:18:22 PM	BCl3 MFC set to  0.000000
8/11/2011	5:18:22 PM	PHl3 MFC set to  0.000000
8/11/2011	5:18:22 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:18:22 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:18:23 PM	Tube furnace set to 0
8/11/2011	5:18:53 PM	Helium valve closed
8/11/2011	5:18:53 PM	H2 valve closed
8/11/2011	5:18:53 PM	BCl3 valve closed
8/11/2011	5:18:53 PM	PH3 valve closed
8/11/2011	5:18:53 PM	SiCl4 pre valve closed
8/11/2011	5:18:53 PM	SiCl4 post valve closed
8/11/2011	5:18:53 PM	Bypass valve closed
8/11/2011	5:18:53 PM	Bubbler valve closed
8/11/2011	5:18:53 PM	Main Vac valve opened
8/11/2011	5:18:53 PM	Helium MFC set to  0.000000
8/11/2011	5:18:53 PM	H2 MFC set to  0.000000
8/11/2011	5:18:53 PM	BCl3 MFC set to  0.000000
8/11/2011	5:18:53 PM	PHl3 MFC set to  0.000000
8/11/2011	5:18:53 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:18:53 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:18:53 PM	Tube furnace set to 0
8/11/2011	5:18:54 PM	Run finished at 5:18 PM
8/11/2011	5:27:52 PM	Main Vac valve closed
8/11/2011	5:28:01 PM	Main Vac valve opened
8/11/2011	5:37:04 PM	Recipe started at 5:37 PM
8/11/2011	5:37:04 PM	Helium valve closed
8/11/2011	5:37:04 PM	H2 valve closed
8/11/2011	5:37:04 PM	BCl3 valve closed
8/11/2011	5:37:04 PM	PH3 valve closed
8/11/2011	5:37:04 PM	SiCl4 pre valve closed
8/11/2011	5:37:04 PM	SiCl4 post valve closed
8/11/2011	5:37:04 PM	Main Vac valve closed
8/11/2011	5:37:04 PM	Bypass valve closed
8/11/2011	5:37:04 PM	Bubbler valve closed
8/11/2011	5:37:04 PM	Helium MFC set to  0.000000
8/11/2011	5:37:04 PM	H2 MFC set to  0.000000
8/11/2011	5:37:04 PM	BCl3 MFC set to  0.000000
8/11/2011	5:37:04 PM	PHl3 MFC set to  0.000000
8/11/2011	5:37:04 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:37:04 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:37:04 PM	Tube furnace set to 0
8/11/2011	5:37:07 PM	Helium valve closed
8/11/2011	5:37:07 PM	BCl3 valve closed
8/11/2011	5:37:07 PM	PH3 valve closed
8/11/2011	5:37:07 PM	SiCl4 pre valve closed
8/11/2011	5:37:07 PM	SiCl4 post valve closed
8/11/2011	5:37:07 PM	Main Vac valve closed
8/11/2011	5:37:07 PM	Bypass valve closed
8/11/2011	5:37:07 PM	Bubbler valve closed
8/11/2011	5:37:07 PM	H2 valve opened
8/11/2011	5:37:07 PM	Helium MFC set to  0.000000
8/11/2011	5:37:07 PM	H2 MFC set to  500.000000
8/11/2011	5:37:07 PM	BCl3 MFC set to  0.000000
8/11/2011	5:37:07 PM	PHl3 MFC set to  0.000000
8/11/2011	5:37:07 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:37:07 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:37:07 PM	Tube furnace set to 0
8/11/2011	5:38:14 PM	Helium valve closed
8/11/2011	5:38:14 PM	BCl3 valve closed
8/11/2011	5:38:14 PM	PH3 valve closed
8/11/2011	5:38:14 PM	SiCl4 pre valve closed
8/11/2011	5:38:14 PM	SiCl4 post valve closed
8/11/2011	5:38:14 PM	Main Vac valve closed
8/11/2011	5:38:14 PM	Bypass valve closed
8/11/2011	5:38:14 PM	H2 valve opened
8/11/2011	5:38:14 PM	Bubbler valve opened
8/11/2011	5:38:14 PM	Helium MFC set to  0.000000
8/11/2011	5:38:14 PM	H2 MFC set to  500.000000
8/11/2011	5:38:14 PM	BCl3 MFC set to  0.000000
8/11/2011	5:38:14 PM	PHl3 MFC set to  0.000000
8/11/2011	5:38:14 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:38:14 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:38:14 PM	Tube furnace set to 0
8/11/2011	5:38:15 PM	Helium valve closed
8/11/2011	5:38:15 PM	BCl3 valve closed
8/11/2011	5:38:15 PM	PH3 valve closed
8/11/2011	5:38:15 PM	SiCl4 pre valve closed
8/11/2011	5:38:15 PM	SiCl4 post valve closed
8/11/2011	5:38:15 PM	Main Vac valve closed
8/11/2011	5:38:15 PM	Bypass valve closed
8/11/2011	5:38:15 PM	H2 valve opened
8/11/2011	5:38:15 PM	Bubbler valve opened
8/11/2011	5:38:15 PM	Helium MFC set to  0.000000
8/11/2011	5:38:15 PM	H2 MFC set to  500.000000
8/11/2011	5:38:15 PM	BCl3 MFC set to  0.000000
8/11/2011	5:38:15 PM	PHl3 MFC set to  0.000000
8/11/2011	5:38:15 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:38:15 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:38:15 PM	Tube furnace set to 1000
8/11/2011	5:58:15 PM	Helium valve closed
8/11/2011	5:58:15 PM	BCl3 valve closed
8/11/2011	5:58:15 PM	PH3 valve closed
8/11/2011	5:58:15 PM	SiCl4 pre valve closed
8/11/2011	5:58:15 PM	SiCl4 post valve closed
8/11/2011	5:58:15 PM	Main Vac valve closed
8/11/2011	5:58:15 PM	Bypass valve closed
8/11/2011	5:58:15 PM	H2 valve opened
8/11/2011	5:58:15 PM	Bubbler valve opened
8/11/2011	5:58:15 PM	Helium MFC set to  0.000000
8/11/2011	5:58:15 PM	H2 MFC set to  500.000000
8/11/2011	5:58:15 PM	BCl3 MFC set to  0.000000
8/11/2011	5:58:15 PM	PHl3 MFC set to  0.000000
8/11/2011	5:58:15 PM	SiCl4 MFC set to  0.000000
8/11/2011	5:58:15 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	5:58:15 PM	Tube furnace set to 1000
8/11/2011	6:08:15 PM	Helium valve closed
8/11/2011	6:08:15 PM	PH3 valve closed
8/11/2011	6:08:15 PM	Main Vac valve closed
8/11/2011	6:08:15 PM	Bypass valve closed
8/11/2011	6:08:15 PM	H2 valve opened
8/11/2011	6:08:15 PM	BCl3 valve opened
8/11/2011	6:08:15 PM	SiCl4 pre valve opened
8/11/2011	6:08:15 PM	SiCl4 post valve opened
8/11/2011	6:08:15 PM	Bubbler valve opened
8/11/2011	6:08:15 PM	Helium MFC set to  0.000000
8/11/2011	6:08:15 PM	H2 MFC set to  500.000000
8/11/2011	6:08:15 PM	BCl3 MFC set to  2.500000
8/11/2011	6:08:15 PM	PHl3 MFC set to  0.000000
8/11/2011	6:08:15 PM	SiCl4 MFC set to  50.000000
8/11/2011	6:08:15 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:08:16 PM	Tube furnace set to 1000
8/11/2011	6:21:46 PM	Helium valve closed
8/11/2011	6:21:46 PM	BCl3 valve closed
8/11/2011	6:21:46 PM	PH3 valve closed
8/11/2011	6:21:46 PM	SiCl4 pre valve closed
8/11/2011	6:21:46 PM	SiCl4 post valve closed
8/11/2011	6:21:46 PM	Main Vac valve closed
8/11/2011	6:21:46 PM	Bypass valve closed
8/11/2011	6:21:46 PM	H2 valve opened
8/11/2011	6:21:46 PM	Bubbler valve opened
8/11/2011	6:21:46 PM	Helium MFC set to  0.000000
8/11/2011	6:21:46 PM	H2 MFC set to  500.000000
8/11/2011	6:21:46 PM	BCl3 MFC set to  0.000000
8/11/2011	6:21:46 PM	PHl3 MFC set to  0.000000
8/11/2011	6:21:46 PM	SiCl4 MFC set to  0.000000
8/11/2011	6:21:46 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:21:46 PM	Tube furnace set to 750
8/11/2011	6:26:46 PM	H2 valve closed
8/11/2011	6:26:46 PM	BCl3 valve closed
8/11/2011	6:26:46 PM	PH3 valve closed
8/11/2011	6:26:46 PM	SiCl4 pre valve closed
8/11/2011	6:26:46 PM	SiCl4 post valve closed
8/11/2011	6:26:46 PM	Main Vac valve closed
8/11/2011	6:26:46 PM	Bypass valve closed
8/11/2011	6:26:46 PM	Helium valve opened
8/11/2011	6:26:46 PM	Bubbler valve opened
8/11/2011	6:26:46 PM	Helium MFC set to  500.000000
8/11/2011	6:26:46 PM	H2 MFC set to  0.000000
8/11/2011	6:26:46 PM	BCl3 MFC set to  0.000000
8/11/2011	6:26:46 PM	PHl3 MFC set to  0.000000
8/11/2011	6:26:46 PM	SiCl4 MFC set to  0.000000
8/11/2011	6:26:46 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:26:46 PM	Tube furnace set to 0
8/11/2011	6:46:46 PM	Helium valve closed
8/11/2011	6:46:46 PM	H2 valve closed
8/11/2011	6:46:46 PM	BCl3 valve closed
8/11/2011	6:46:46 PM	PH3 valve closed
8/11/2011	6:46:46 PM	SiCl4 pre valve closed
8/11/2011	6:46:46 PM	SiCl4 post valve closed
8/11/2011	6:46:46 PM	Main Vac valve closed
8/11/2011	6:46:46 PM	Bypass valve closed
8/11/2011	6:46:46 PM	Bubbler valve closed
8/11/2011	6:46:46 PM	Helium MFC set to  0.000000
8/11/2011	6:46:46 PM	H2 MFC set to  0.000000
8/11/2011	6:46:46 PM	BCl3 MFC set to  0.000000
8/11/2011	6:46:46 PM	PHl3 MFC set to  0.000000
8/11/2011	6:46:46 PM	SiCl4 MFC set to  0.000000
8/11/2011	6:46:46 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	6:46:46 PM	Tube furnace set to 0
8/11/2011	6:46:47 PM	Run finished at 6:46 PM
8/11/2011	7:22:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	7:22:44 PM	Recipe started at 7:22 PM
8/11/2011	7:22:44 PM	Helium valve closed
8/11/2011	7:22:44 PM	H2 valve closed
8/11/2011	7:22:44 PM	BCl3 valve closed
8/11/2011	7:22:44 PM	PH3 valve closed
8/11/2011	7:22:44 PM	SiCl4 pre valve closed
8/11/2011	7:22:44 PM	SiCl4 post valve closed
8/11/2011	7:22:44 PM	Main Vac valve closed
8/11/2011	7:22:44 PM	Bypass valve closed
8/11/2011	7:22:44 PM	Bubbler valve closed
8/11/2011	7:22:44 PM	Helium MFC set to  0.000000
8/11/2011	7:22:44 PM	H2 MFC set to  0.000000
8/11/2011	7:22:44 PM	BCl3 MFC set to  0.000000
8/11/2011	7:22:44 PM	PHl3 MFC set to  0.000000
8/11/2011	7:22:44 PM	SiCl4 MFC set to  0.000000
8/11/2011	7:22:44 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	7:22:44 PM	Tube furnace set to 0
8/11/2011	7:22:47 PM	H2 valve closed
8/11/2011	7:22:47 PM	BCl3 valve closed
8/11/2011	7:22:47 PM	PH3 valve closed
8/11/2011	7:22:47 PM	SiCl4 pre valve closed
8/11/2011	7:22:47 PM	SiCl4 post valve closed
8/11/2011	7:22:47 PM	Main Vac valve closed
8/11/2011	7:22:47 PM	Bypass valve closed
8/11/2011	7:22:47 PM	Bubbler valve closed
8/11/2011	7:22:47 PM	Helium valve opened
8/11/2011	7:22:47 PM	Helium MFC set to  500.000000
8/11/2011	7:22:47 PM	H2 MFC set to  0.000000
8/11/2011	7:22:47 PM	BCl3 MFC set to  0.000000
8/11/2011	7:22:47 PM	PHl3 MFC set to  0.000000
8/11/2011	7:22:47 PM	SiCl4 MFC set to  0.000000
8/11/2011	7:22:47 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	7:22:48 PM	Tube furnace set to 0
8/11/2011	7:22:54 PM	Helium valve closed
8/11/2011	7:22:54 PM	H2 valve closed
8/11/2011	7:22:54 PM	BCl3 valve closed
8/11/2011	7:22:54 PM	PH3 valve closed
8/11/2011	7:22:54 PM	SiCl4 pre valve closed
8/11/2011	7:22:54 PM	SiCl4 post valve closed
8/11/2011	7:22:54 PM	Main Vac valve closed
8/11/2011	7:22:54 PM	Bypass valve closed
8/11/2011	7:22:54 PM	Bubbler valve closed
8/11/2011	7:22:54 PM	Helium MFC set to  0.000000
8/11/2011	7:22:54 PM	H2 MFC set to  0.000000
8/11/2011	7:22:54 PM	BCl3 MFC set to  0.000000
8/11/2011	7:22:54 PM	PHl3 MFC set to  0.000000
8/11/2011	7:22:54 PM	SiCl4 MFC set to  0.000000
8/11/2011	7:22:54 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	7:22:54 PM	Tube furnace set to 0
8/11/2011	7:22:55 PM	Run finished at 7:22 PM
8/11/2011	7:22:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	7:27:17 PM	Recipe started at 7:27 PM
8/11/2011	7:27:17 PM	Helium valve closed
8/11/2011	7:27:17 PM	H2 valve closed
8/11/2011	7:27:17 PM	BCl3 valve closed
8/11/2011	7:27:17 PM	PH3 valve closed
8/11/2011	7:27:17 PM	SiCl4 pre valve closed
8/11/2011	7:27:17 PM	SiCl4 post valve closed
8/11/2011	7:27:17 PM	Main Vac valve closed
8/11/2011	7:27:17 PM	Bubbler valve closed
8/11/2011	7:27:17 PM	Bypass valve opened
8/11/2011	7:27:17 PM	Helium MFC set to  0.000000
8/11/2011	7:27:17 PM	H2 MFC set to  0.000000
8/11/2011	7:27:17 PM	BCl3 MFC set to  0.000000
8/11/2011	7:27:17 PM	PHl3 MFC set to  0.000000
8/11/2011	7:27:17 PM	SiCl4 MFC set to  0.000000
8/11/2011	7:27:17 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	7:27:17 PM	Tube furnace set to 0
8/11/2011	7:28:23 PM	Helium valve closed
8/11/2011	7:28:23 PM	H2 valve closed
8/11/2011	7:28:23 PM	BCl3 valve closed
8/11/2011	7:28:23 PM	PH3 valve closed
8/11/2011	7:28:23 PM	SiCl4 pre valve closed
8/11/2011	7:28:23 PM	SiCl4 post valve closed
8/11/2011	7:28:23 PM	Main Vac valve closed
8/11/2011	7:28:23 PM	Bubbler valve closed
8/11/2011	7:28:23 PM	Bypass valve opened
8/11/2011	7:28:23 PM	Helium MFC set to  0.000000
8/11/2011	7:28:23 PM	H2 MFC set to  0.000000
8/11/2011	7:28:23 PM	BCl3 MFC set to  0.000000
8/11/2011	7:28:23 PM	PHl3 MFC set to  0.000000
8/11/2011	7:28:23 PM	SiCl4 MFC set to  0.000000
8/11/2011	7:28:23 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	7:28:23 PM	Tube furnace set to 0
8/11/2011	7:28:53 PM	Helium valve closed
8/11/2011	7:28:53 PM	H2 valve closed
8/11/2011	7:28:53 PM	BCl3 valve closed
8/11/2011	7:28:53 PM	PH3 valve closed
8/11/2011	7:28:53 PM	SiCl4 pre valve closed
8/11/2011	7:28:53 PM	SiCl4 post valve closed
8/11/2011	7:28:53 PM	Bypass valve closed
8/11/2011	7:28:53 PM	Bubbler valve closed
8/11/2011	7:28:53 PM	Main Vac valve opened
8/11/2011	7:28:53 PM	Helium MFC set to  0.000000
8/11/2011	7:28:53 PM	H2 MFC set to  0.000000
8/11/2011	7:28:53 PM	BCl3 MFC set to  0.000000
8/11/2011	7:28:53 PM	PHl3 MFC set to  0.000000
8/11/2011	7:28:53 PM	SiCl4 MFC set to  0.000000
8/11/2011	7:28:53 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	7:28:53 PM	Tube furnace set to 0
8/11/2011	7:58:53 PM	H2 valve closed
8/11/2011	7:58:53 PM	BCl3 valve closed
8/11/2011	7:58:53 PM	PH3 valve closed
8/11/2011	7:58:53 PM	SiCl4 pre valve closed
8/11/2011	7:58:53 PM	SiCl4 post valve closed
8/11/2011	7:58:53 PM	Bypass valve closed
8/11/2011	7:58:53 PM	Bubbler valve closed
8/11/2011	7:58:53 PM	Helium valve opened
8/11/2011	7:58:53 PM	Main Vac valve opened
8/11/2011	7:58:53 PM	Helium MFC set to  20.000000
8/11/2011	7:58:53 PM	H2 MFC set to  0.000000
8/11/2011	7:58:53 PM	BCl3 MFC set to  0.000000
8/11/2011	7:58:53 PM	PHl3 MFC set to  0.000000
8/11/2011	7:58:53 PM	SiCl4 MFC set to  0.000000
8/11/2011	7:58:53 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	7:58:53 PM	Tube furnace set to 0
8/11/2011	7:59:24 PM	Helium valve closed
8/11/2011	7:59:24 PM	H2 valve closed
8/11/2011	7:59:24 PM	BCl3 valve closed
8/11/2011	7:59:24 PM	PH3 valve closed
8/11/2011	7:59:24 PM	SiCl4 pre valve closed
8/11/2011	7:59:24 PM	SiCl4 post valve closed
8/11/2011	7:59:24 PM	Bypass valve closed
8/11/2011	7:59:24 PM	Bubbler valve closed
8/11/2011	7:59:24 PM	Main Vac valve opened
8/11/2011	7:59:24 PM	Helium MFC set to  0.000000
8/11/2011	7:59:24 PM	H2 MFC set to  0.000000
8/11/2011	7:59:24 PM	BCl3 MFC set to  0.000000
8/11/2011	7:59:24 PM	PHl3 MFC set to  0.000000
8/11/2011	7:59:24 PM	SiCl4 MFC set to  0.000000
8/11/2011	7:59:24 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	7:59:24 PM	Tube furnace set to 0
8/11/2011	7:59:54 PM	H2 valve closed
8/11/2011	7:59:54 PM	BCl3 valve closed
8/11/2011	7:59:54 PM	PH3 valve closed
8/11/2011	7:59:54 PM	SiCl4 pre valve closed
8/11/2011	7:59:54 PM	SiCl4 post valve closed
8/11/2011	7:59:54 PM	Bypass valve closed
8/11/2011	7:59:54 PM	Bubbler valve closed
8/11/2011	7:59:54 PM	Helium valve opened
8/11/2011	7:59:54 PM	Main Vac valve opened
8/11/2011	7:59:54 PM	Helium MFC set to  20.000000
8/11/2011	7:59:54 PM	H2 MFC set to  0.000000
8/11/2011	7:59:54 PM	BCl3 MFC set to  0.000000
8/11/2011	7:59:54 PM	PHl3 MFC set to  0.000000
8/11/2011	7:59:54 PM	SiCl4 MFC set to  0.000000
8/11/2011	7:59:54 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	7:59:54 PM	Tube furnace set to 0
8/11/2011	8:00:24 PM	Helium valve closed
8/11/2011	8:00:24 PM	H2 valve closed
8/11/2011	8:00:24 PM	BCl3 valve closed
8/11/2011	8:00:24 PM	PH3 valve closed
8/11/2011	8:00:24 PM	SiCl4 pre valve closed
8/11/2011	8:00:24 PM	SiCl4 post valve closed
8/11/2011	8:00:24 PM	Bypass valve closed
8/11/2011	8:00:24 PM	Bubbler valve closed
8/11/2011	8:00:24 PM	Main Vac valve opened
8/11/2011	8:00:24 PM	Helium MFC set to  0.000000
8/11/2011	8:00:24 PM	H2 MFC set to  0.000000
8/11/2011	8:00:24 PM	BCl3 MFC set to  0.000000
8/11/2011	8:00:24 PM	PHl3 MFC set to  0.000000
8/11/2011	8:00:24 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:00:24 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:00:24 PM	Tube furnace set to 0
8/11/2011	8:00:54 PM	H2 valve closed
8/11/2011	8:00:54 PM	BCl3 valve closed
8/11/2011	8:00:54 PM	PH3 valve closed
8/11/2011	8:00:54 PM	SiCl4 pre valve closed
8/11/2011	8:00:54 PM	SiCl4 post valve closed
8/11/2011	8:00:54 PM	Bypass valve closed
8/11/2011	8:00:54 PM	Bubbler valve closed
8/11/2011	8:00:54 PM	Helium valve opened
8/11/2011	8:00:54 PM	Main Vac valve opened
8/11/2011	8:00:54 PM	Helium MFC set to  20.000000
8/11/2011	8:00:54 PM	H2 MFC set to  0.000000
8/11/2011	8:00:54 PM	BCl3 MFC set to  0.000000
8/11/2011	8:00:54 PM	PHl3 MFC set to  0.000000
8/11/2011	8:00:54 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:00:54 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:00:54 PM	Tube furnace set to 0
8/11/2011	8:01:24 PM	Helium valve closed
8/11/2011	8:01:24 PM	H2 valve closed
8/11/2011	8:01:24 PM	BCl3 valve closed
8/11/2011	8:01:24 PM	PH3 valve closed
8/11/2011	8:01:24 PM	SiCl4 pre valve closed
8/11/2011	8:01:24 PM	SiCl4 post valve closed
8/11/2011	8:01:24 PM	Bypass valve closed
8/11/2011	8:01:24 PM	Bubbler valve closed
8/11/2011	8:01:24 PM	Main Vac valve opened
8/11/2011	8:01:24 PM	Helium MFC set to  0.000000
8/11/2011	8:01:24 PM	H2 MFC set to  0.000000
8/11/2011	8:01:24 PM	BCl3 MFC set to  0.000000
8/11/2011	8:01:24 PM	PHl3 MFC set to  0.000000
8/11/2011	8:01:24 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:01:24 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:01:24 PM	Tube furnace set to 0
8/11/2011	8:01:54 PM	H2 valve closed
8/11/2011	8:01:54 PM	BCl3 valve closed
8/11/2011	8:01:54 PM	PH3 valve closed
8/11/2011	8:01:54 PM	SiCl4 pre valve closed
8/11/2011	8:01:54 PM	SiCl4 post valve closed
8/11/2011	8:01:54 PM	Bypass valve closed
8/11/2011	8:01:55 PM	Bubbler valve closed
8/11/2011	8:01:55 PM	Helium valve opened
8/11/2011	8:01:55 PM	Main Vac valve opened
8/11/2011	8:01:55 PM	Helium MFC set to  20.000000
8/11/2011	8:01:55 PM	H2 MFC set to  0.000000
8/11/2011	8:01:55 PM	BCl3 MFC set to  0.000000
8/11/2011	8:01:55 PM	PHl3 MFC set to  0.000000
8/11/2011	8:01:55 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:01:55 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:01:55 PM	Tube furnace set to 0
8/11/2011	8:02:25 PM	Helium valve closed
8/11/2011	8:02:25 PM	H2 valve closed
8/11/2011	8:02:25 PM	BCl3 valve closed
8/11/2011	8:02:25 PM	PH3 valve closed
8/11/2011	8:02:25 PM	SiCl4 pre valve closed
8/11/2011	8:02:25 PM	SiCl4 post valve closed
8/11/2011	8:02:25 PM	Bypass valve closed
8/11/2011	8:02:25 PM	Bubbler valve closed
8/11/2011	8:02:25 PM	Main Vac valve opened
8/11/2011	8:02:25 PM	Helium MFC set to  0.000000
8/11/2011	8:02:25 PM	H2 MFC set to  0.000000
8/11/2011	8:02:25 PM	BCl3 MFC set to  0.000000
8/11/2011	8:02:25 PM	PHl3 MFC set to  0.000000
8/11/2011	8:02:25 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:02:25 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:02:25 PM	Tube furnace set to 0
8/11/2011	8:02:55 PM	H2 valve closed
8/11/2011	8:02:55 PM	BCl3 valve closed
8/11/2011	8:02:55 PM	PH3 valve closed
8/11/2011	8:02:55 PM	SiCl4 pre valve closed
8/11/2011	8:02:55 PM	SiCl4 post valve closed
8/11/2011	8:02:55 PM	Bypass valve closed
8/11/2011	8:02:55 PM	Bubbler valve closed
8/11/2011	8:02:55 PM	Helium valve opened
8/11/2011	8:02:55 PM	Main Vac valve opened
8/11/2011	8:02:55 PM	Helium MFC set to  20.000000
8/11/2011	8:02:55 PM	H2 MFC set to  0.000000
8/11/2011	8:02:55 PM	BCl3 MFC set to  0.000000
8/11/2011	8:02:55 PM	PHl3 MFC set to  0.000000
8/11/2011	8:02:55 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:02:55 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:02:55 PM	Tube furnace set to 0
8/11/2011	8:03:25 PM	Helium valve closed
8/11/2011	8:03:25 PM	H2 valve closed
8/11/2011	8:03:25 PM	BCl3 valve closed
8/11/2011	8:03:25 PM	PH3 valve closed
8/11/2011	8:03:25 PM	SiCl4 pre valve closed
8/11/2011	8:03:25 PM	SiCl4 post valve closed
8/11/2011	8:03:25 PM	Bypass valve closed
8/11/2011	8:03:25 PM	Bubbler valve closed
8/11/2011	8:03:25 PM	Main Vac valve opened
8/11/2011	8:03:25 PM	Helium MFC set to  0.000000
8/11/2011	8:03:25 PM	H2 MFC set to  0.000000
8/11/2011	8:03:25 PM	BCl3 MFC set to  0.000000
8/11/2011	8:03:25 PM	PHl3 MFC set to  0.000000
8/11/2011	8:03:25 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:03:25 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:03:25 PM	Tube furnace set to 0
8/11/2011	8:03:55 PM	H2 valve closed
8/11/2011	8:03:55 PM	BCl3 valve closed
8/11/2011	8:03:55 PM	PH3 valve closed
8/11/2011	8:03:55 PM	SiCl4 pre valve closed
8/11/2011	8:03:55 PM	SiCl4 post valve closed
8/11/2011	8:03:55 PM	Bypass valve closed
8/11/2011	8:03:55 PM	Bubbler valve closed
8/11/2011	8:03:55 PM	Helium valve opened
8/11/2011	8:03:55 PM	Main Vac valve opened
8/11/2011	8:03:55 PM	Helium MFC set to  20.000000
8/11/2011	8:03:55 PM	H2 MFC set to  0.000000
8/11/2011	8:03:55 PM	BCl3 MFC set to  0.000000
8/11/2011	8:03:55 PM	PHl3 MFC set to  0.000000
8/11/2011	8:03:55 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:03:55 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:03:55 PM	Tube furnace set to 0
8/11/2011	8:04:25 PM	Helium valve closed
8/11/2011	8:04:25 PM	H2 valve closed
8/11/2011	8:04:25 PM	BCl3 valve closed
8/11/2011	8:04:25 PM	PH3 valve closed
8/11/2011	8:04:25 PM	SiCl4 pre valve closed
8/11/2011	8:04:25 PM	SiCl4 post valve closed
8/11/2011	8:04:25 PM	Bypass valve closed
8/11/2011	8:04:25 PM	Bubbler valve closed
8/11/2011	8:04:25 PM	Main Vac valve opened
8/11/2011	8:04:25 PM	Helium MFC set to  0.000000
8/11/2011	8:04:25 PM	H2 MFC set to  0.000000
8/11/2011	8:04:25 PM	BCl3 MFC set to  0.000000
8/11/2011	8:04:25 PM	PHl3 MFC set to  0.000000
8/11/2011	8:04:26 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:04:26 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:04:26 PM	Tube furnace set to 0
8/11/2011	8:04:56 PM	H2 valve closed
8/11/2011	8:04:56 PM	BCl3 valve closed
8/11/2011	8:04:56 PM	PH3 valve closed
8/11/2011	8:04:56 PM	SiCl4 pre valve closed
8/11/2011	8:04:56 PM	SiCl4 post valve closed
8/11/2011	8:04:56 PM	Bypass valve closed
8/11/2011	8:04:56 PM	Bubbler valve closed
8/11/2011	8:04:56 PM	Helium valve opened
8/11/2011	8:04:56 PM	Main Vac valve opened
8/11/2011	8:04:56 PM	Helium MFC set to  20.000000
8/11/2011	8:04:56 PM	H2 MFC set to  0.000000
8/11/2011	8:04:56 PM	BCl3 MFC set to  0.000000
8/11/2011	8:04:56 PM	PHl3 MFC set to  0.000000
8/11/2011	8:04:56 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:04:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:04:56 PM	Tube furnace set to 0
8/11/2011	8:05:26 PM	Helium valve closed
8/11/2011	8:05:26 PM	H2 valve closed
8/11/2011	8:05:26 PM	BCl3 valve closed
8/11/2011	8:05:26 PM	PH3 valve closed
8/11/2011	8:05:26 PM	SiCl4 pre valve closed
8/11/2011	8:05:26 PM	SiCl4 post valve closed
8/11/2011	8:05:26 PM	Bypass valve closed
8/11/2011	8:05:26 PM	Bubbler valve closed
8/11/2011	8:05:26 PM	Main Vac valve opened
8/11/2011	8:05:26 PM	Helium MFC set to  0.000000
8/11/2011	8:05:26 PM	H2 MFC set to  0.000000
8/11/2011	8:05:26 PM	BCl3 MFC set to  0.000000
8/11/2011	8:05:26 PM	PHl3 MFC set to  0.000000
8/11/2011	8:05:26 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:05:26 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:05:26 PM	Tube furnace set to 0
8/11/2011	8:05:56 PM	H2 valve closed
8/11/2011	8:05:56 PM	BCl3 valve closed
8/11/2011	8:05:56 PM	PH3 valve closed
8/11/2011	8:05:56 PM	SiCl4 pre valve closed
8/11/2011	8:05:56 PM	SiCl4 post valve closed
8/11/2011	8:05:56 PM	Bypass valve closed
8/11/2011	8:05:56 PM	Bubbler valve closed
8/11/2011	8:05:56 PM	Helium valve opened
8/11/2011	8:05:56 PM	Main Vac valve opened
8/11/2011	8:05:56 PM	Helium MFC set to  20.000000
8/11/2011	8:05:56 PM	H2 MFC set to  0.000000
8/11/2011	8:05:56 PM	BCl3 MFC set to  0.000000
8/11/2011	8:05:56 PM	PHl3 MFC set to  0.000000
8/11/2011	8:05:56 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:05:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:05:56 PM	Tube furnace set to 0
8/11/2011	8:06:26 PM	Helium valve closed
8/11/2011	8:06:26 PM	H2 valve closed
8/11/2011	8:06:26 PM	BCl3 valve closed
8/11/2011	8:06:26 PM	PH3 valve closed
8/11/2011	8:06:26 PM	SiCl4 pre valve closed
8/11/2011	8:06:26 PM	SiCl4 post valve closed
8/11/2011	8:06:26 PM	Bypass valve closed
8/11/2011	8:06:26 PM	Bubbler valve closed
8/11/2011	8:06:26 PM	Main Vac valve opened
8/11/2011	8:06:26 PM	Helium MFC set to  0.000000
8/11/2011	8:06:26 PM	H2 MFC set to  0.000000
8/11/2011	8:06:26 PM	BCl3 MFC set to  0.000000
8/11/2011	8:06:26 PM	PHl3 MFC set to  0.000000
8/11/2011	8:06:26 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:06:26 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:06:26 PM	Tube furnace set to 0
8/11/2011	8:06:56 PM	H2 valve closed
8/11/2011	8:06:56 PM	BCl3 valve closed
8/11/2011	8:06:56 PM	PH3 valve closed
8/11/2011	8:06:56 PM	SiCl4 pre valve closed
8/11/2011	8:06:56 PM	SiCl4 post valve closed
8/11/2011	8:06:56 PM	Bypass valve closed
8/11/2011	8:06:56 PM	Bubbler valve closed
8/11/2011	8:06:56 PM	Helium valve opened
8/11/2011	8:06:56 PM	Main Vac valve opened
8/11/2011	8:06:56 PM	Helium MFC set to  20.000000
8/11/2011	8:06:56 PM	H2 MFC set to  0.000000
8/11/2011	8:06:56 PM	BCl3 MFC set to  0.000000
8/11/2011	8:06:56 PM	PHl3 MFC set to  0.000000
8/11/2011	8:06:56 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:06:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:06:57 PM	Tube furnace set to 0
8/11/2011	8:07:27 PM	Helium valve closed
8/11/2011	8:07:27 PM	H2 valve closed
8/11/2011	8:07:27 PM	BCl3 valve closed
8/11/2011	8:07:27 PM	PH3 valve closed
8/11/2011	8:07:27 PM	SiCl4 pre valve closed
8/11/2011	8:07:27 PM	SiCl4 post valve closed
8/11/2011	8:07:27 PM	Bypass valve closed
8/11/2011	8:07:27 PM	Bubbler valve closed
8/11/2011	8:07:27 PM	Main Vac valve opened
8/11/2011	8:07:27 PM	Helium MFC set to  0.000000
8/11/2011	8:07:27 PM	H2 MFC set to  0.000000
8/11/2011	8:07:27 PM	BCl3 MFC set to  0.000000
8/11/2011	8:07:27 PM	PHl3 MFC set to  0.000000
8/11/2011	8:07:27 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:07:27 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:07:27 PM	Tube furnace set to 0
8/11/2011	8:07:57 PM	H2 valve closed
8/11/2011	8:07:57 PM	BCl3 valve closed
8/11/2011	8:07:57 PM	PH3 valve closed
8/11/2011	8:07:57 PM	SiCl4 pre valve closed
8/11/2011	8:07:57 PM	SiCl4 post valve closed
8/11/2011	8:07:57 PM	Bypass valve closed
8/11/2011	8:07:57 PM	Bubbler valve closed
8/11/2011	8:07:57 PM	Helium valve opened
8/11/2011	8:07:57 PM	Main Vac valve opened
8/11/2011	8:07:57 PM	Helium MFC set to  20.000000
8/11/2011	8:07:57 PM	H2 MFC set to  0.000000
8/11/2011	8:07:57 PM	BCl3 MFC set to  0.000000
8/11/2011	8:07:57 PM	PHl3 MFC set to  0.000000
8/11/2011	8:07:57 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:07:57 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:07:57 PM	Tube furnace set to 0
8/11/2011	8:08:27 PM	Helium valve closed
8/11/2011	8:08:27 PM	H2 valve closed
8/11/2011	8:08:27 PM	BCl3 valve closed
8/11/2011	8:08:27 PM	PH3 valve closed
8/11/2011	8:08:27 PM	SiCl4 pre valve closed
8/11/2011	8:08:27 PM	SiCl4 post valve closed
8/11/2011	8:08:27 PM	Bypass valve closed
8/11/2011	8:08:27 PM	Bubbler valve closed
8/11/2011	8:08:27 PM	Main Vac valve opened
8/11/2011	8:08:27 PM	Helium MFC set to  0.000000
8/11/2011	8:08:27 PM	H2 MFC set to  0.000000
8/11/2011	8:08:27 PM	BCl3 MFC set to  0.000000
8/11/2011	8:08:27 PM	PHl3 MFC set to  0.000000
8/11/2011	8:08:27 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:08:27 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:08:27 PM	Tube furnace set to 0
8/11/2011	8:08:28 PM	Run finished at 8:08 PM
8/11/2011	8:16:51 PM	Main Vac valve closed
8/11/2011	8:16:59 PM	Main Vac valve opened
8/11/2011	8:26:46 PM	Recipe started at 8:26 PM
8/11/2011	8:26:46 PM	Helium valve closed
8/11/2011	8:26:46 PM	H2 valve closed
8/11/2011	8:26:46 PM	BCl3 valve closed
8/11/2011	8:26:46 PM	PH3 valve closed
8/11/2011	8:26:46 PM	SiCl4 pre valve closed
8/11/2011	8:26:46 PM	SiCl4 post valve closed
8/11/2011	8:26:46 PM	Main Vac valve closed
8/11/2011	8:26:46 PM	Bypass valve closed
8/11/2011	8:26:46 PM	Bubbler valve closed
8/11/2011	8:26:46 PM	Helium MFC set to  0.000000
8/11/2011	8:26:46 PM	H2 MFC set to  0.000000
8/11/2011	8:26:46 PM	BCl3 MFC set to  0.000000
8/11/2011	8:26:46 PM	PHl3 MFC set to  0.000000
8/11/2011	8:26:46 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:26:46 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:26:46 PM	Tube furnace set to 0
8/11/2011	8:26:49 PM	Helium valve closed
8/11/2011	8:26:49 PM	BCl3 valve closed
8/11/2011	8:26:49 PM	PH3 valve closed
8/11/2011	8:26:49 PM	SiCl4 pre valve closed
8/11/2011	8:26:49 PM	SiCl4 post valve closed
8/11/2011	8:26:49 PM	Main Vac valve closed
8/11/2011	8:26:49 PM	Bypass valve closed
8/11/2011	8:26:49 PM	Bubbler valve closed
8/11/2011	8:26:49 PM	H2 valve opened
8/11/2011	8:26:49 PM	Helium MFC set to  0.000000
8/11/2011	8:26:49 PM	H2 MFC set to  500.000000
8/11/2011	8:26:49 PM	BCl3 MFC set to  0.000000
8/11/2011	8:26:49 PM	PHl3 MFC set to  0.000000
8/11/2011	8:26:49 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:26:49 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:26:49 PM	Tube furnace set to 0
8/11/2011	8:27:54 PM	Helium valve closed
8/11/2011	8:27:54 PM	BCl3 valve closed
8/11/2011	8:27:54 PM	PH3 valve closed
8/11/2011	8:27:54 PM	SiCl4 pre valve closed
8/11/2011	8:27:54 PM	SiCl4 post valve closed
8/11/2011	8:27:54 PM	Main Vac valve closed
8/11/2011	8:27:54 PM	Bypass valve closed
8/11/2011	8:27:54 PM	H2 valve opened
8/11/2011	8:27:54 PM	Bubbler valve opened
8/11/2011	8:27:54 PM	Helium MFC set to  0.000000
8/11/2011	8:27:54 PM	H2 MFC set to  500.000000
8/11/2011	8:27:54 PM	BCl3 MFC set to  0.000000
8/11/2011	8:27:54 PM	PHl3 MFC set to  0.000000
8/11/2011	8:27:54 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:27:54 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:27:55 PM	Tube furnace set to 0
8/11/2011	8:27:56 PM	Helium valve closed
8/11/2011	8:27:56 PM	BCl3 valve closed
8/11/2011	8:27:56 PM	PH3 valve closed
8/11/2011	8:27:56 PM	SiCl4 pre valve closed
8/11/2011	8:27:56 PM	SiCl4 post valve closed
8/11/2011	8:27:56 PM	Main Vac valve closed
8/11/2011	8:27:56 PM	Bypass valve closed
8/11/2011	8:27:56 PM	H2 valve opened
8/11/2011	8:27:56 PM	Bubbler valve opened
8/11/2011	8:27:56 PM	Helium MFC set to  0.000000
8/11/2011	8:27:56 PM	H2 MFC set to  500.000000
8/11/2011	8:27:56 PM	BCl3 MFC set to  0.000000
8/11/2011	8:27:56 PM	PHl3 MFC set to  0.000000
8/11/2011	8:27:56 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:27:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:27:56 PM	Tube furnace set to 1000
8/11/2011	8:47:56 PM	Helium valve closed
8/11/2011	8:47:56 PM	BCl3 valve closed
8/11/2011	8:47:56 PM	PH3 valve closed
8/11/2011	8:47:56 PM	SiCl4 pre valve closed
8/11/2011	8:47:56 PM	SiCl4 post valve closed
8/11/2011	8:47:56 PM	Main Vac valve closed
8/11/2011	8:47:56 PM	Bypass valve closed
8/11/2011	8:47:56 PM	H2 valve opened
8/11/2011	8:47:56 PM	Bubbler valve opened
8/11/2011	8:47:56 PM	Helium MFC set to  0.000000
8/11/2011	8:47:56 PM	H2 MFC set to  500.000000
8/11/2011	8:47:56 PM	BCl3 MFC set to  0.000000
8/11/2011	8:47:56 PM	PHl3 MFC set to  0.000000
8/11/2011	8:47:56 PM	SiCl4 MFC set to  0.000000
8/11/2011	8:47:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:47:56 PM	Tube furnace set to 1000
8/11/2011	8:57:56 PM	Helium valve closed
8/11/2011	8:57:56 PM	PH3 valve closed
8/11/2011	8:57:56 PM	Main Vac valve closed
8/11/2011	8:57:56 PM	Bypass valve closed
8/11/2011	8:57:56 PM	H2 valve opened
8/11/2011	8:57:56 PM	BCl3 valve opened
8/11/2011	8:57:56 PM	SiCl4 pre valve opened
8/11/2011	8:57:56 PM	SiCl4 post valve opened
8/11/2011	8:57:56 PM	Bubbler valve opened
8/11/2011	8:57:56 PM	Helium MFC set to  0.000000
8/11/2011	8:57:56 PM	H2 MFC set to  500.000000
8/11/2011	8:57:56 PM	BCl3 MFC set to  2.500000
8/11/2011	8:57:56 PM	PHl3 MFC set to  0.000000
8/11/2011	8:57:56 PM	SiCl4 MFC set to  50.000000
8/11/2011	8:57:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	8:57:56 PM	Tube furnace set to 1000
8/11/2011	9:11:56 PM	Helium valve closed
8/11/2011	9:11:56 PM	BCl3 valve closed
8/11/2011	9:11:56 PM	PH3 valve closed
8/11/2011	9:11:56 PM	SiCl4 pre valve closed
8/11/2011	9:11:56 PM	SiCl4 post valve closed
8/11/2011	9:11:56 PM	Main Vac valve closed
8/11/2011	9:11:56 PM	Bypass valve closed
8/11/2011	9:11:56 PM	H2 valve opened
8/11/2011	9:11:56 PM	Bubbler valve opened
8/11/2011	9:11:56 PM	Helium MFC set to  0.000000
8/11/2011	9:11:56 PM	H2 MFC set to  500.000000
8/11/2011	9:11:56 PM	BCl3 MFC set to  0.000000
8/11/2011	9:11:56 PM	PHl3 MFC set to  0.000000
8/11/2011	9:11:56 PM	SiCl4 MFC set to  0.000000
8/11/2011	9:11:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:11:56 PM	Tube furnace set to 750
8/11/2011	9:16:56 PM	H2 valve closed
8/11/2011	9:16:56 PM	BCl3 valve closed
8/11/2011	9:16:56 PM	PH3 valve closed
8/11/2011	9:16:56 PM	SiCl4 pre valve closed
8/11/2011	9:16:56 PM	SiCl4 post valve closed
8/11/2011	9:16:56 PM	Main Vac valve closed
8/11/2011	9:16:56 PM	Bypass valve closed
8/11/2011	9:16:56 PM	Helium valve opened
8/11/2011	9:16:56 PM	Bubbler valve opened
8/11/2011	9:16:56 PM	Helium MFC set to  500.000000
8/11/2011	9:16:56 PM	H2 MFC set to  0.000000
8/11/2011	9:16:56 PM	BCl3 MFC set to  0.000000
8/11/2011	9:16:56 PM	PHl3 MFC set to  0.000000
8/11/2011	9:16:56 PM	SiCl4 MFC set to  0.000000
8/11/2011	9:16:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:16:56 PM	Tube furnace set to 0
8/11/2011	9:36:56 PM	Helium valve closed
8/11/2011	9:36:56 PM	H2 valve closed
8/11/2011	9:36:56 PM	BCl3 valve closed
8/11/2011	9:36:56 PM	PH3 valve closed
8/11/2011	9:36:56 PM	SiCl4 pre valve closed
8/11/2011	9:36:56 PM	SiCl4 post valve closed
8/11/2011	9:36:56 PM	Main Vac valve closed
8/11/2011	9:36:56 PM	Bypass valve closed
8/11/2011	9:36:56 PM	Bubbler valve closed
8/11/2011	9:36:56 PM	Helium MFC set to  0.000000
8/11/2011	9:36:56 PM	H2 MFC set to  0.000000
8/11/2011	9:36:56 PM	BCl3 MFC set to  0.000000
8/11/2011	9:36:56 PM	PHl3 MFC set to  0.000000
8/11/2011	9:36:56 PM	SiCl4 MFC set to  0.000000
8/11/2011	9:36:56 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	9:36:57 PM	Tube furnace set to 0
8/11/2011	9:36:58 PM	Run finished at 9:36 PM
8/11/2011	10:45:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	10:45:14 PM	Recipe started at 10:45 PM
8/11/2011	10:45:14 PM	Helium valve closed
8/11/2011	10:45:14 PM	H2 valve closed
8/11/2011	10:45:14 PM	BCl3 valve closed
8/11/2011	10:45:14 PM	PH3 valve closed
8/11/2011	10:45:14 PM	SiCl4 pre valve closed
8/11/2011	10:45:14 PM	SiCl4 post valve closed
8/11/2011	10:45:14 PM	Main Vac valve closed
8/11/2011	10:45:14 PM	Bypass valve closed
8/11/2011	10:45:14 PM	Bubbler valve closed
8/11/2011	10:45:14 PM	Helium MFC set to  0.000000
8/11/2011	10:45:14 PM	H2 MFC set to  0.000000
8/11/2011	10:45:14 PM	BCl3 MFC set to  0.000000
8/11/2011	10:45:14 PM	PHl3 MFC set to  0.000000
8/11/2011	10:45:14 PM	SiCl4 MFC set to  0.000000
8/11/2011	10:45:14 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	10:45:14 PM	Tube furnace set to 0
8/11/2011	10:45:17 PM	H2 valve closed
8/11/2011	10:45:17 PM	BCl3 valve closed
8/11/2011	10:45:17 PM	PH3 valve closed
8/11/2011	10:45:17 PM	SiCl4 pre valve closed
8/11/2011	10:45:17 PM	SiCl4 post valve closed
8/11/2011	10:45:17 PM	Main Vac valve closed
8/11/2011	10:45:17 PM	Bypass valve closed
8/11/2011	10:45:17 PM	Bubbler valve closed
8/11/2011	10:45:17 PM	Helium valve opened
8/11/2011	10:45:17 PM	Helium MFC set to  500.000000
8/11/2011	10:45:17 PM	H2 MFC set to  0.000000
8/11/2011	10:45:17 PM	BCl3 MFC set to  0.000000
8/11/2011	10:45:17 PM	PHl3 MFC set to  0.000000
8/11/2011	10:45:17 PM	SiCl4 MFC set to  0.000000
8/11/2011	10:45:17 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	10:45:18 PM	Tube furnace set to 0
8/11/2011	10:45:21 PM	Helium valve closed
8/11/2011	10:45:21 PM	H2 valve closed
8/11/2011	10:45:21 PM	BCl3 valve closed
8/11/2011	10:45:21 PM	PH3 valve closed
8/11/2011	10:45:21 PM	SiCl4 pre valve closed
8/11/2011	10:45:21 PM	SiCl4 post valve closed
8/11/2011	10:45:21 PM	Main Vac valve closed
8/11/2011	10:45:21 PM	Bypass valve closed
8/11/2011	10:45:21 PM	Bubbler valve closed
8/11/2011	10:45:21 PM	Helium MFC set to  0.000000
8/11/2011	10:45:21 PM	H2 MFC set to  0.000000
8/11/2011	10:45:21 PM	BCl3 MFC set to  0.000000
8/11/2011	10:45:21 PM	PHl3 MFC set to  0.000000
8/11/2011	10:45:21 PM	SiCl4 MFC set to  0.000000
8/11/2011	10:45:21 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	10:45:21 PM	Tube furnace set to 0
8/11/2011	10:45:22 PM	Run finished at 10:45 PM
8/11/2011	10:45:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/11/2011	10:58:15 PM	Recipe started at 10:58 PM
8/11/2011	10:58:15 PM	Helium valve closed
8/11/2011	10:58:15 PM	H2 valve closed
8/11/2011	10:58:15 PM	BCl3 valve closed
8/11/2011	10:58:15 PM	PH3 valve closed
8/11/2011	10:58:15 PM	SiCl4 pre valve closed
8/11/2011	10:58:15 PM	SiCl4 post valve closed
8/11/2011	10:58:15 PM	Main Vac valve closed
8/11/2011	10:58:15 PM	Bubbler valve closed
8/11/2011	10:58:15 PM	Bypass valve opened
8/11/2011	10:58:15 PM	Helium MFC set to  0.000000
8/11/2011	10:58:15 PM	H2 MFC set to  0.000000
8/11/2011	10:58:15 PM	BCl3 MFC set to  0.000000
8/11/2011	10:58:15 PM	PHl3 MFC set to  0.000000
8/11/2011	10:58:15 PM	SiCl4 MFC set to  0.000000
8/11/2011	10:58:15 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	10:58:15 PM	Tube furnace set to 0
8/11/2011	10:58:29 PM	Run aborted at 10:58 PM
8/11/2011	10:58:29 PM	Helium valve closed
8/11/2011	10:58:29 PM	H2 valve closed
8/11/2011	10:58:29 PM	BCl3 valve closed
8/11/2011	10:58:29 PM	PH3 valve closed
8/11/2011	10:58:29 PM	SiCl4 pre valve closed
8/11/2011	10:58:29 PM	SiCl4 post valve closed
8/11/2011	10:58:29 PM	Bypass valve closed
8/11/2011	10:58:29 PM	Main Vac valve closed
8/11/2011	10:58:29 PM	Bubbler valve closed
8/11/2011	10:58:29 PM	Helium MFC set to  0.000000
8/11/2011	10:58:29 PM	H2 MFC set to  0.000000
8/11/2011	10:58:29 PM	BCl3 MFC set to  0.000000
8/11/2011	10:58:29 PM	PHl3 MFC set to  0.000000
8/11/2011	10:58:29 PM	SiCl4 MFC set to  0.000000
8/11/2011	10:58:29 PM	Tube furnace set to 0
8/11/2011	10:58:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/11/2011	10:58:33 PM	Recipe started at 10:58 PM
8/11/2011	10:58:33 PM	Helium valve closed
8/11/2011	10:58:33 PM	H2 valve closed
8/11/2011	10:58:33 PM	BCl3 valve closed
8/11/2011	10:58:33 PM	PH3 valve closed
8/11/2011	10:58:33 PM	SiCl4 pre valve closed
8/11/2011	10:58:33 PM	SiCl4 post valve closed
8/11/2011	10:58:33 PM	Main Vac valve closed
8/11/2011	10:58:33 PM	Bubbler valve closed
8/11/2011	10:58:33 PM	Bypass valve opened
8/11/2011	10:58:33 PM	Helium MFC set to  0.000000
8/11/2011	10:58:33 PM	H2 MFC set to  0.000000
8/11/2011	10:58:33 PM	BCl3 MFC set to  0.000000
8/11/2011	10:58:33 PM	PHl3 MFC set to  0.000000
8/11/2011	10:58:33 PM	SiCl4 MFC set to  0.000000
8/11/2011	10:58:33 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	10:58:33 PM	Tube furnace set to 0
8/11/2011	10:59:24 PM	Helium valve closed
8/11/2011	10:59:24 PM	H2 valve closed
8/11/2011	10:59:24 PM	BCl3 valve closed
8/11/2011	10:59:24 PM	PH3 valve closed
8/11/2011	10:59:24 PM	SiCl4 pre valve closed
8/11/2011	10:59:24 PM	SiCl4 post valve closed
8/11/2011	10:59:24 PM	Main Vac valve closed
8/11/2011	10:59:24 PM	Bubbler valve closed
8/11/2011	10:59:24 PM	Bypass valve opened
8/11/2011	10:59:24 PM	Helium MFC set to  0.000000
8/11/2011	10:59:24 PM	H2 MFC set to  0.000000
8/11/2011	10:59:24 PM	BCl3 MFC set to  0.000000
8/11/2011	10:59:24 PM	PHl3 MFC set to  0.000000
8/11/2011	10:59:24 PM	SiCl4 MFC set to  0.000000
8/11/2011	10:59:24 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	10:59:24 PM	Tube furnace set to 0
8/11/2011	11:00:24 PM	Helium valve closed
8/11/2011	11:00:24 PM	H2 valve closed
8/11/2011	11:00:24 PM	BCl3 valve closed
8/11/2011	11:00:24 PM	PH3 valve closed
8/11/2011	11:00:24 PM	SiCl4 pre valve closed
8/11/2011	11:00:24 PM	SiCl4 post valve closed
8/11/2011	11:00:24 PM	Bypass valve closed
8/11/2011	11:00:24 PM	Bubbler valve closed
8/11/2011	11:00:24 PM	Main Vac valve opened
8/11/2011	11:00:24 PM	Helium MFC set to  0.000000
8/11/2011	11:00:24 PM	H2 MFC set to  0.000000
8/11/2011	11:00:24 PM	BCl3 MFC set to  0.000000
8/11/2011	11:00:24 PM	PHl3 MFC set to  0.000000
8/11/2011	11:00:24 PM	SiCl4 MFC set to  0.000000
8/11/2011	11:00:24 PM	Bypass solenoid MFC set to  0.000000
8/11/2011	11:00:25 PM	Tube furnace set to 0
8/11/2011	11:00:26 PM	Run finished at 11:00 PM
8/11/2011	11:00:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
